Table of Contents

N-04 N-06 L-04 L-06 S-04 S-06 LL-04 LL-06 4 6 N-08 8 N-10 10 N-12 12 4 6 L-08 8 L-10 10 L-12 12 4 6 S-08 8 S-10 10 S-12 12 4 6 LL-08 8 LL-10 10 LL-12 12 Precautions Be sure to read before handling.

2

Thread type Nil R N NPT G G INDEX 498 Series AS-FS Needle Valve/Flow-rate Characteristics AS1201FS-M5, AS1211FS-M5 AS2201FS-01, AS2211FS-01 AS2201FS-02, AS2211FS-02 600 300 Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa 100 01, 23, 03, 04, 06, 07 01, 23, 03, 04, 06, 07 06, 07, 08, 09, 10 06, 07, 08, 09, 10 500 08, 09, 10, 11 Flow rate L/min (ANR) Flow rate L/min (

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ZH05BL-06-01 ZH07BS-06-01 ZH07BL-06-01 ZH10BS-06-01 ZH10BL-06-01 ZH13BS-08-02 ZH13BL-08-02 I J K L M N O P Model 1 8 Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 4 Rc 1 4 ZH05BS-06-01 ZH05BL-06-01 ZH07BS-06-01 ZH07BL-06-01 ZH10BS-06-01 ZH10BL-06-01 ZH13BS-08-02 ZH13BL-08-02 57 12 3.2 24 Rc 5.8 2 38.5 57 12 3.2 24 5.8 2 38.5 57 12 3.2 24 5.8 2 38.5 57 12 3.2 24 5.8 2 38.5 60 12 3.2 26 5.8 2 39.5

VM

VM120-01-07 VM120-01-07S VM130-01-07 VM130-01-07S VM122-M5-07 VM122-M5-07S VM132-M5-07 VM132-M5-07S Cross roller plunger Toggle lever VM120-01-08 VM130-01-08 VM122-M5-08 VM132-M5-08 VM130-01-30R VM130-01-30B VM130-01-30G VM130-01-30Y VM120-01-30R VM122-M5-30R VM122-M5-30B VM122-M5-30G VM122-M5-30Y VM132-M5-30R VM132-M5-30B VM132-M5-30G VM132-M5-30Y VM-30AR Red Push button (Mushroom) VM-30AB

KJ

N-04 N-06 L-04 L-06 S-04 S-06 LL-04 LL-06 4 6 N-08 8 N-10 10 N-12 12 4 6 L-08 8 L-10 10 L-12 12 4 6 S-08 8 S-10 10 S-12 12 4 6 LL-08 8 LL-10 10 LL-12 12 Precautions Be sure to read before handling.

Speed Controller with Indicator

[L/min (ANR)] 06, 07, 08, 09, 10 06, 07, 08, 09, 10 01, 23, 03, 04, 06, 07 01, 23, 03, 04, 06, 07 08, 09, 10, 11 08, 09, 10, 11 03, 04 400 200 06, 07 02 01, 23 300 50 03, 04 200 100 01, 23 100 0 0 0 5 0 10 5 0 10 5 0 10 Number of needle rotations Number of needle rotations Number of needle rotations Note) -U10/32 has the same specification as M5.

Table of Contents

L plug connector Closed center: VFR2310-LExhaust center: VFR2410-LPressure center: VFR2510-LM plug connector Closed center: VFR2310-MExhaust center: VFR2410-MPressure center: VFR2510-MDIN terminal Closed center: VFR2310Exhaust center: VFR2410Pressure center: VFR251001 02 01 02 01 02 01 02 01 02 01 02 01 02 D Y 01 02 D Y 01 02 D Y Applicable cable O.D. 6 to 8 [4.5 to 7] Light/Surge voltage

13

01 ZH13BS-08-02 ZH13BL-08-02 I J K L M N O P Model 1 8 Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 4 Rc 1 4 ZH05BS-06-01 ZH05BL-06-01 ZH07BS-06-01 ZH07BL-06-01 ZH10BS-06-01 ZH10BL-06-01 ZH13BS-08-02 ZH13BL-08-02 57 12 3.2 24 Rc 5.8 2 38.5 57 12 3.2 24 5.8 2 38.5 57 12 3.2 24 5.8 2 38.5 57 12 3.2 24 5.8 2 38.5 60 12 3.2 26 5.8 2 39.5 60 12 3.2 26 5.8 2 39.5 75 17 4.2 28 7.5 3 50 75 17 4.2 28 7.5

ZP

01 01 01 01 01 01 01 01 01 01 01 01 01 01 153.5 156.5 189.5 192.5 118.5 123.5 01 153.5 158.5 01 01 01 189.5 194.5 01 55 Series ZP Heavy-duty Pad Dimensions: With Buffer 40 50 01 ZPT HB -A18 01 ZPT HB -A18 63 80 01 ZPT HB -A22 100 125 1/8 (Rc, NPT, NPTF) Width across flat 17 (Hexagon) M22 x 1.5 50 24 1/8 (Rc, NPT, NPTF) Width across flat 14 (Hexagon) 1/8 (Rc, NPT, NPTF) Width across flat

Vacuum Ejector Box Type (Built-in Silencer)/Body Ported Type Series ZH 1

ZH05BL-06-01 ZH07BS-06-01 ZH07BL-06-01 ZH10BS-06-01 ZH10BL-06-01 ZH13BS-08-02 ZH13BL-08-02 I J K L M N O P Model 1 8 Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 4 Rc 1 4 ZH05BS-06-01 ZH05BL-06-01 ZH07BS-06-01 ZH07BL-06-01 ZH10BS-06-01 ZH10BL-06-01 ZH13BS-08-02 ZH13BL-08-02 57 12 3.2 24 Rc 5.8 2 38.5 57 12 3.2 24 5.8 2 38.5 57 12 3.2 24 5.8 2 38.5 57 12 3.2 24 5.8 2 38.5 60 12 3.2 26 5.8 2 39.5

Air Fittings & Tubing

76.5 77 78 8 6 KM14-06-08-01S-3 31 39 6 KM14-06-08-02S-3 15.2 12.8 KM14-06-08-03S-3 1 4 3 8 1 2 10 6 KM14-06-10-02S-3 43 44 66 7.5 KM14-06-10-03S-3 18.5 12.8 KM14-06-10-04S-3 87.5 88.5 92 81.5 82 84 19 22 21 19 12.8 45.4 17 12.8 21 1 4 3 8 1 2 94 95 98.5 88 89 90.5 10 8 KM14-08-10-02S-3 47 19 70 7.5 KM14-08-10-03S-3 18.5 15.2 KM14-08-10-04S-3 22 22.5 19 15.2 52.6 18.5 12.8 21 KM15 Precautions

CG5-S

-04-12 AS1301FG-M5-23 AS2301FG-01-23 AS1301FG-M5-04 AS2301FG-01-04 -02-04 AS1301FG-M5-06 AS2301FG-01-06 -02-06 AS3301FG-02-06 -03-06 AS2301FG-01-08 -02-08 AS3301FG-02-08 -03-08 AS1211FG-M5-23 AS2211FG-01-23 AS1211FG-M5-04 AS2211FG-01-04 -02-04 AS1211FG-M5-06 AS2211FG-01-06 -02-06 AS3211FG-02-06 -03-06 AS2211FG-01-08 -02-08 AS3211FG-02-08 -03-08 AS2211FG-01-10 -02-10 AS3211FG-02-10 -03-10

Proposals for Energy Saving

VM-07BS VM-07B VM-06BS VM-06B VM-05B Straight plunger VM130-01-05 VM132-M5-05 Polyacetal roller Hard steel roller Roller plunger VM130-01-06 VM130-01-06S VM132-M5-06 VM132-M5-06S Polyacetal roller Hard steel roller Cross roller plunger VM130-01-07 VM130-01-07S VM132-M5-07 VM132-M5-07S Toggle lever VM130-01-08 VM132-M5-08 VM-30AR Red Push button (Mushroom) VM130-01-30R VM130-01-30B VM130-

CG5-S

-04-12 AS1301FG-M5-23 AS2301FG-01-23 AS1301FG-M5-04 AS2301FG-01-04 -02-04 AS1301FG-M5-06 AS2301FG-01-06 -02-06 AS3301FG-02-06 -03-06 AS2301FG-01-08 -02-08 AS3301FG-02-08 -03-08 AS1211FG-M5-23 AS2211FG-01-23 AS1211FG-M5-04 AS2211FG-01-04 -02-04 AS1211FG-M5-06 AS2211FG-01-06 -02-06 AS3211FG-02-06 -03-06 AS2211FG-01-08 -02-08 AS3211FG-02-08 -03-08 AS2211FG-01-10 -02-10 AS3211FG-02-10 -03-10

5 Port Solenoid Valve Series SY3000/5000/7000/9000

SY3120-C6 SY3140-01 T0806 x 1 m AS3001F-06 T0806 x 1 m AS3001F-08 AS3001F-06 T0604 x 1 m T0604 x 1 m SY5120-01 SY5140-02 AS3001F-08 AN101-01 AN101-01 T1075 x 1 m AS4001F-10 T0604 x 1 m T0604 x 1 m T1075 x 1 m T1209 x 1 m SY7120-02 SY7140-03 AS4001F-10 AS3001F-06 AS3001F-06 AN110-01 AN200-02 T0604 x 1 m T1075 x 1 m T1209 x 1 m T1209 x 1 m AS3001F-06 AS4001F-10 AS4001F-12 T0604 x 1 m T1075

5-Port Solenoid Valve

SY Side/Bottom ported 3 1 3 0 5 1 W1 M5 01 SY Top ported q w r e t y u i o !

5 Port Solenoid Valve

Note 2) Specify wiring type of each station on the manifold In the case of the 16-output SI unit Symbol 01 Stations Note 1 station specification sheet. Double wiring Note 1) 08 01 8 stations 1 station Specified layout Note 2) (Available up to 16 solenoids) Note 1) Indicate the sizes on the manifold specification sheet in the case of CM.

Metal Seal/Rubber Seal Series VQ Body Ported

Note 3) Specify the wiring specifications on the manifold specification sheet. 01 1 station Note) 08 16 8 stations (Double) 16 stations (Single) NKE Corp.: Uni-wire H System Note) Note) For details, refer to page 2-4-29.

5 Port Solenoid Valve Series VFR2000/3000/4000/5000/6000

DIN terminal Closed center: VFR2310Exhaust center: VFR2410Pressure center: VFR2510L plug connector Closed center: VFR2310-LExhaust center: VFR2410-LPressure center: VFR2510-LM plug connector Closed center: VFR2310-MExhaust center: VFR2410-MPressure center: VFR2510-M01 02 01 02 01 02 01 02 01 02 01 02 01 02 D Y 01 02 D Y 01 02 D Y Applicable cable O.D. 6 to 8 [4.5 to 7] Light/Surge voltage

Speed Controller with One-touch Fitting Stainless Series Series AS-FG Elbow Type/Universal Type

Port size N M5 U10/32 01 02 03 04 M5 x 0.8 10-32 UNF 1/8 1/4 3/8 1/2 Needle Valve/Flow Characteristics AS121FG AS131FG AS221FG-01 AS231FG-01 AS221FG-02 AS231FG-02 Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa 07, 08, 09, 10, 11 05, 06, 07, 08, 09, 10 Flow rate (/min (ANR)) Flow rate (/min (ANR)) Flow rate (/min (ANR)) Effective area (mm2) Effective area (mm2) Effective