Micro Mechanical Valve Series VM1000

Application Weight (g) Actuator Model Polyacetal roller 120 160 170 170 180 200 200 200 190 Basic VZM450-01-00 Mechanical operation Manual operation VM-08C VM-06CS VM-06C VM-05C VM-02CS VM-02C VM-01CS VM-01C Roller lever VZM450-01-01 VZM450-01-01S Hard steel roller VZM450-01-02 VZM450-01-02S Polyacetal roller Hard steel roller One way roller lever Straight plunger VZM450-01-05 Polyacetal

Table of Contents

(mm) Note) Weight (g) Model D1 P A M D2 L 2-applicable tubing M5 x 0.8 KJU23-M5 KJU23-01S KJU04-M5 KJU04-01S KJU06-M5 KJU06-01S 5.9 8.3 6.4 8.8 7.4 9.9 Reference dimensions after R thread installation.

CATALOG

G33-4-01 G33-10-01 G43-2-01 G43-4-01 G43-10-01 G43-10-01 G43-4-01 G43-10-01 Accuracy + 3% (full span) Courtesy of Steven Engineering, Inc. !

KJ

(mm) Note) Weight (g) Model D1 P A M D2 L 2-applicable tubing M5 x 0.8 KJU23-M5 KJU23-01S KJU04-M5 KJU04-01S KJU06-M5 KJU06-01S 5.9 8.3 6.4 8.8 7.4 9.9 Reference dimensions after R thread installation.

Air Fittings & Tubing

D1 D2 L1 M L2 A Effective area (mm2) Nylon Urethane Weight (g) KQ2L23-M5 KQ2L23-01S KQ2L23-02S KQ2L04-M5 KQ2L04-M6 KQ2L04-01S KQ2L04-02S KQ2L06-M5 KQ2L06-M6 KQ2L06-01S KQ2L06-02S KQ2L06-03S KQ2L08-01S KQ2L08-02S KQ2L08-03S KQ2L10-01S KQ2L10-02S KQ2L10-03S KQ2L10-04S KQ2L12-02S KQ2L12-03S KQ2L12-04S KQ2L16-03S KQ2L16-04S 3.2 M5 X 0.8 2.6 2.2 7 8.5 15.3 13.2 14.3 12.7 2.5 8 18 2.7 3.6 10 19

F

10 7.8 17 25 25 14.5 2.6/2.2 10.4 3.2 R(PT)1/8 KJH23-01S 10 16.5 12.5 14.5 3/2.5 5 4 M3x0.5 KJW04-M3 7 8.9 17.5 23 25 14.5 0.8 5 4 M3x0.5 KJH04-M3 8 18 15.5 14.5 0.9 1.9 4 M5x0.8 KJW04-M5 7 8.9 17.5 25.5 27 14.5 3.5 6.4 4 M5x0.8 KJH04-M5 8 18.5 15.5 14.5 4 2.4 4 R(PT)1/8 KJW04-01S 10 8.9 17.5 25.5 26 14.5 3.5 10.6 4 R(PT)1/8 KJH04-01S 10 17.5 13.5 14.5 4 3.4 6 M5x0.8 KJW06-M5 7 11 17.5 26.5

KR

(mm) Weight (g) (1) D Applicable tubing KGH04-M5 KGH04-01 4 M5 x 0.8 4 2.4 9 16 4 1 4 KGH04-02 19.5 13.5 14 4 8 17 22 8 14 13 4 1 8 10 16 18 5.6 M5 x 0.8 KGH06-M5 KGH06-01 KGH06-02 14 3.4 16 14 4 10 12 14 18.5 22.5 23 10 15 18.5 17 1 8 1 4 6 13.1 10.4 17 3 8 KGH06-03 22 15.5 17 27 21 19 26 19 30 Connection thread 1 8 1 4 3 8 1 8 1 4 KGH08-01 KGH08-02 KGH08-03 KGH10-01 KGH10-02 28

KJ

-01 KDM20S-03 KDM20S-07 KDM20P-01 20 KDM20P-03 KDM20P-07 KDM20S-09 KDM20P-09 Clamp bolt Panel mounting Loosen (4) screws for bracket on the socket side using a Phillips screwdriver (JIS nominal No. 2) until the bracket touches the stop ring.

Table of Contents

" M5 x 0.8 18.3 23.1 12 12.7 7 13.5 AS121F-U10/32-07 AS221F-01-04 9.3 27.5 20.4 4 1/4" 10-32UNF 14.3 17 AS221F-01-01 AS221F-01-06 27.5 27.5 6 20.4 11.6 20.4 36.1 32.1 27.1 13.5 31.1 9.3 1/8" 14.2 12 (12.7) 1/8 16 12.7 AS221F-01-03 AS221F-01-08 32.4 8 20.4 15.2 18.5 19 27.5 25.3 17 9.3 5/32" 12 (12.7) AS221F-01-05 AS221F-01-10 14.2 14.3 40.2 10 23.1 18.5 21 15 21 30.2 36.1 31.1 27.1 33.1 17

Proposals for Energy Saving

Application No. of ports 3 port 3 port VM130-01-00 VM131-01-00 VM132-M5-00 VM133-M5-00 Actuator Basic type Polyacetal roller Hard steel roller Mechanical operation Manual operation Roller lever VM130-01-01 VM131-01-01S VM133-M5-01 VM133-M5-01S Directional Control Equipment Polyacetal roller One way roller lever VM131-01-02 VM131-01-02S VM133-M5-02 VM133-M5-02S Hard steel roller VM-08B

One-touch Fittings Series KQ2

D L M Weight (g) A Nylon Urethane M5 0.8 12.7 3.4 2.9 KQ2H23-M5 KQ2H23-01S KQ2H23-02S KQ2H04-M5 KQ2H04-M6 KQ2H04-01S KQ2H04-02S KQ2H06-M5 KQ2H06-M6 KQ2H06-01S KQ2H06-02S KQ2H06-03S KQ2H08-01S KQ2H08-02S KQ2H08-03S KQ2H10-01S KQ2H10-02S KQ2H10-03S KQ2H10-04S KQ2H12-02S KQ2H12-03S KQ2H12-04S KQ2H16-03S KQ2H16-04S 2 9 16 2.4 2.5 9 16 3.3 3.4 16 14 27 21 19 26 19 30 30 53 42 34 51 61 47 Reference

Check Valve Series AK 1

NPT thread Model Model 10-32 UNF M5 3/8 1/8 1/4 1/2 3/8 1/8 1/4 1/2 AKH04 AKH06 AKH08 AKH10 AKH12 AKH03 AKH07 AKH09 AKH11 AKH13 4 6 8 10 12 5/32 1/4 5/16 3/8 1/2 From One-touch fitting to male thread B Bushing type AKB 01 A 01 S With seal (Standard) Body size Port size 01 1/8 01 1/8 Thread type 02 1/4 02 1/4 03 3/8 Nil R 03 3/8 04 1/2 N NPT 04 1/2 Check valve free flow direction Female/Male

AKH/AKB Series

Port size NPT Model Model 10-32 UNF M5 3/8 1/8 1/4 1/2 3/8 1/8 1/4 1/2 AKH04 AKH06 AKH08 AKH10 AKH12 AKH03 AKH07 AKH09 AKH11 AKH13 4 6 8 10 12 5/32" 1/4" 5/16" 3/8" 1/2" From one-touch fitting to male thread B Bushing Type AKB 01 A 01 S With sealant (standard) Body size Port size 01 1/8 01 1/8 Thread type 02 1/4 02 1/4 03 3/8 Nil R 03 3/8 04 1/2 N NPT 04 1/2 Check valve free flow direction

AKH/AKB Series Check Valve with One-touch Fitting

Port size NPT Model Model 10-32 UNF M5 3/8 1/8 1/4 1/2 3/8 1/8 1/4 1/2 AKH04 AKH06 AKH08 AKH10 AKH12 AKH03 AKH07 AKH09 AKH11 AKH13 4 6 8 10 12 5/32" 1/4" 5/16" 3/8" 1/2" From one-touch fitting to male thread B Bushing Type AKB 01 A 01 S With sealant (standard) Body size Port size 01 1/8 01 1/8 Thread type 02 1/4 02 1/4 03 3/8 Nil R 03 3/8 04 1/2 N NPT 04 1/2 Check valve free flow direction

V100

Ordering Example: VV307-01-052-01-F1 pc. (5 station manifolds base) V0307-1G4 pcs. DXT060-51-13A 1 pc.

VQZ1000/2000/3000

AN110-01 AN200-02 AN200-02 AN110-01 For a silencer to be mounted in a single valve unit, refer to page 2-7-5.

Vacuum System Peripherals:

R L B 01 1 Nil F G Rc 1 8 ... ...

5 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported

Suitable tightening torque 0.18 to 0.25Nm 0.25 to 0.35Nm 0.5 to 0.7Nm Model VQZ1000 VQZ2000 VQZ3000 Silencer for 3(R2, R), 5(R1) Series One-touch fitting for 1(P) port Silencer AN120-M5 INA-25-46 AN101-01 One-touch fitting KJSO4-M5 KQH06-M5 KQH06-01S KQH08-02S VQZ1000 VQZ2000 VQZ3000 IN-457-32 (for 6) KQH06-01S The diameter of the above fitting and silencer is the maximum diameter to be installed

3 Port Solenoid Valve Metal Seal/Rubber Seal, Body Ported Series VQZ100/200/300 1

Series One-touch fitting KJSO4-M5 VQZ100 VQZ200 VQZ300 KQH06-M5 KQH06-01S KQH08-02S IN-457-32 (for 6) Screw KQH08-01S The diameter of the above fitting and silencer is the maximum diameter to in the EXH port.

3 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported VQZ100/200/300

Series One-touch fitting KJSO4-M5 KQH06-M5 KQH06-01S KQH08-02S VQZ100 VQZ200 VQZ300 IN-457-32(for 6) KQH08-01S The diameter of the above fitting and silencer is the maximum diameter for proper installation.