Table of Contents

LQ LVN Table(1) Connection Size and Applicable Model Table(2) Rated Voltage-Electrical Entry-Electrical Option Insulation type Electrical entry Electrical option 1 (100 V) 2 (200 V) 3 (110 V) 4 (220 V) 7 (240 V) 8 (48 V) 5 (24 V) 6 (12 V) TI/ TIL Applicable model VXR2150-04 VXR2150-06 VXR2260-10 1 VXR2270-12 1 VXR2380-14 2 VXR2390-20 Size Class B Class H G PA 1 2 3 4 C D, T G, C T S L,

VXR21/22/23

IN Model/Valve Specifications Connection Max. operating pressure differential (MPa) Flow characteristics Water, Oil Weight (g) Min.operating pressure differential (MPa) Orifice size (mm) Max. system pressure (MPa) Model Thread Water Oil Cv converted Av x 10 -6 (m 2) 1 2 3 4 VXR2150-04 VXR2150-06 VXR2260-10 VXR2270-12 VXR2380-14 VXR2390-20 20 20 25 35 40 50 1250 160 180 290 530 720 1200 6.5

AC Servo Motor Driver (Pulse input type/Positioning type ）

TROUBLESHOOTING Alarm No.: 7D Name: Safety observation error Alarm content The safety observation function detected an error. Detail No. Detail name Cause Check method Check result Action 7D.1 Stop (1) During activation of Check that the actual servo motor position is higher than the setting The travel distance of the servo motor is larger than the setting value in [Pr.PSA05].

AC Servo Motor Driver (Network card type ）

TROUBLESHOOTING Alarm No.: 7D Name: Safety observation error Alarm content The safety observation function detected an error. Detail No. Detail name Cause Check method Check result Action 7D.1 Stop (1) During activation of Check that the actual servo motor position is higher than the setting The travel distance of the servo motor is larger than the setting value in [Pr.PSA05].

Table of Contents

6 18 17 18 17 16.5 17 16.5 12.7 13.7 16.5 22 21 22 21 18 17 18 17 13.5 12.7 13.5 6.2 27.7 AS1001F-07T 1/4" AS2001F-04T 4 17.9 15.2 13.2 15.2 13.2 11.4 13.2 11.4 9.3 12 11.8 7 1.5 AS2001F-06T 6 AS2001F-03T 5/32" 9.5 8.2 7.4 8.1 7.1 6.2 7.1 6.2 5.2 47.2 46 45.2 36.7 35.7 34.9 33.7 32.8 31.9 AS AS2051F-06T 6 AS2001F-05T 3/16" 11.8 7 1.5 14.8 7 1.5 AS2051F-08T 8 AS2001F-07T 1/4" ASP AS3001F-

Tamper Proof Speed Controller with One-touch Fitting Series AS


1F-T Elbow Type/Universal Type 1

6 18 17 18 17 16.5 17 16.5 12.7 13.7 16.5 22 21 22 21 18 17 18 17 13.5 12.7 13.5 6.2 27.7 AS1001F-07T 1/4" AS2001F-04T 4 17.9 15.2 13.2 15.2 13.2 11.4 13.2 11.4 9.3 12 11.8 7 1.5 AS2001F-06T 6 AS2001F-03T 5/32" 9.5 8.2 7.4 8.1 7.1 6.2 7.1 6.2 5.2 47.2 46 45.2 36.7 35.7 34.9 33.7 32.8 31.9 AS AS2051F-06T 6 AS2001F-05T 3/16" 11.8 7 1.5 14.8 7 1.5 AS2051F-08T 8 AS2001F-07T 1/4" ASP AS3001F-

Tamper Proof and Flat Head Screw

6 11.4 48.7 16.5 11.6 40.7 6.2 27.7 13.5 6.2 27.7 AS1001F-07T 1/4" AS2001F-04T 4 12 40.7 13.7 9.3 40.7 5.2 31.9 12.7 11.8 7 1.5 AS2001F-06T 6 AS2001F-03T 5/32" 11.6 44.8 6.3 33 13.5 9.3 40.7 5.2 31.9 12.7 AS2051F-06T 6 12.8 53.2 6.7 35.2 17 AS2001F-05T 3/16" 11.8 7 1.5 11.4 50 6.2 32.8 16.5 14.8 7 1.5 AS2051F-08T 8 15.2 59.8 8.1 36.5 18 AS2001F-07T 1/4" 13.2 52.2 7.1 33.7 17 AS3001F-06T

AS

6 11.4 48.7 16.5 11.6 40.7 6.2 27.7 13.5 10 14 6.2 27.7 AS1001F-07T 1/4" AS2001F-04T 4 12 40.7 13.7 9.3 40.7 5.2 31.9 12.7 15 11 11.8 7 1.5 AS2001F-06T 6 AS2001F-03T 5/32" 11.6 44.8 6.3 33 13.5 16 9.3 40.7 5.2 31.9 12.7 15 AS2051F-06T 6 AS2001F-05T 3/16" 12.8 53.2 6.7 35.2 17 33 11.8 7 1.5 11.4 50 6.2 32.8 16.5 21 14.8 7 1.5 AS2051F-08T 8 AS2001F-07T 1/4" 15.2 59.8 8.1 36.5 18 36 13.2 52.2

Tamper Proof Speed Controller with One-touch Fitting Series AS


1F-T Elbow Type/Universal Type

6 18 17 18 17 16.5 17 16.5 12.7 13.7 16.5 22 21 22 21 18 17 18 17 13.5 12.7 13.5 6.2 27.7 AS1001F-07T 1/4" AS2001F-04T 4 17.9 15.2 13.2 15.2 13.2 11.4 13.2 11.4 9.3 12 11.8 7 1.5 AS2001F-06T 6 AS2001F-03T 5/32" 9.5 8.2 7.4 8.1 7.1 6.2 7.1 6.2 5.2 47.2 46 45.2 36.7 35.7 34.9 33.7 32.8 31.9 AS AS2051F-06T 6 AS2001F-05T 3/16" 11.8 7 1.5 14.8 7 1.5 AS2051F-08T 8 AS2001F-07T 1/4" ASP AS3001F-

Tamper Proof Speed Controller with One-touch Fitting Elbow Type/Universal Type Series AS  1F-T

6 11.4 48.7 16.5 11.6 40.7 6.2 27.7 13.5 10 14 6.2 27.7 AS1001F-07T 1/4" AS2001F-04T 4 12 40.7 13.7 9.3 40.7 5.2 31.9 12.7 15 11 12.3 7 1.5 AS2001F-06T 6 AS2001F-03T 5/32" 11.6 44.8 6.3 33 13.5 16 9.3 40.7 5.2 31.9 12.7 15 AS2051F-06T 6 AS2001F-05T 3/16" 12.8 53.2 6.7 35.2 17 12.3 7 1.5 33 11.4 50 6.2 32.8 16.5 21 15.5 7 1.5 AS2051F-08T 8 15.2 59.8 8.1 36.5 18 AS2001F-07T 1/4" 36 13.2 52.2

FGX-OM-R008

Dimensions 1) SFE11 Gasket 2) SFE42/52/53/73 Dimensions: SFE42/52/53/73 Model A B C D SFE42 10 62 16.5 R1/8 SFE52 10 71 20.5 R1/8 SFE53 17 75 20.5 R1/4 SFE73 17 84 24 R1/4 3) SFE3A -6- 4) SFE4B/5C/7D Dimensions: SFE4B/5C/7D Model A B C SFE4B 6 73 16.5 SFE5C 8 84 20.5 SFE7D 10 94 24 5) SFE3F Applicable tube O.D. 4 6) SFE4G/5H/7J Applicable tube O.D.

Solenoid: No.1 Solenoid, Body Size: 20A, Style: Energized Open/N.C., Option: BC6, Copper Body & Shading Coil, NBR Seal, Class B Coil, Port Size: 04 [1/2 (20A)], Thread: NPTF, Voltage: 240VAC 50/60HZ, Lead Wire: DIN Connector, Surge Suppressor: -

Solenoid: No.1 Solenoid, Body Size: 20A, Style: Energized Open/N.C., Option: BC6, Copper Body & Shading Coil, NBR Seal, Class B Coil, Port Size: 06 [3/4 (20A)], Thread: NPT, Voltage: 240VAC 50/60HZ, Lead Wire: DIN Connector, Surge Suppressor: -

Solenoid: No.1 Solenoid, Body Size: 5 (20A), Style: 0 (Energized Open/N.C.), Option: BC6, Copper Body & Shading Coil, NBR Seal, Class B Coil, Port Size: 04 [1/2 (20A)], Thread: T (NPTF), Voltage: 7 (240VAC 50/60HZ), Lead Wire: D (DIN Connector)

Solenoid: No.1 Solenoid, Body Size: 5 (20A), Style: 0 (Energized Open/N.C.), Option: BC6, Copper Body & Shading Coil, NBR Seal, Class B Coil, Port Size: 06 [3/4 (20A)], Thread: N (NPT), Voltage: 7 (240VAC 50/60HZ), Lead Wire: D (DIN Connector)

Clean Exhaust Filter

Hold the end of the tubing and insert it all the way in. 840 Clean Exhaust Filter SFE Series Dimensions SFE11 Gasket M5 9 4 25 SFE42/52/53/73 Dimensions (mm) C A Model A B C D SFE42 10 62 16.5 R1/8 SFE52 10 71 20.5 R1/8 SFE53 17 75 20.5 R1/4 SFE73 17 84 24 R1/4 D B SFE3A 4 13.5 59 SFE4B/5C/7D AN A C Dimensions (mm) AMC Model A B C SFE4B 6 73 16.5 SFE5C 8 84 20.5 SFE7D 10 94 24 B AMV AMP SFE

2

New Products Guide 2 Air Preparation Equipment, Modular F. R. L., Air Tanks Fittings and Tubing Flow Control Equipment, Exhaust Filters Switches/Sensors Process Valves High Vacuum Equipment Temperature Control Equipment Pneumatic Instrumentation Process Gas Equipment Equipment CAT.E00-7A INDEX New Products Guide 2 Air Preparation Equipment/ Modular F. R. L./Air Tanks Refrigerated Air Dryer

CATALOG

Electrical Coil Insulation 5.0VA/60Hz, 5.6VA/50Hz Apparent Power AC InRush 2.3VA(1.5W)/60Hz, 3.4VA(2.1W)/50Hz (Power Consumption) Holding 1.8W Power Consumption DC Conduit Terminal Electrical Entry With Indicator Light and Surge Option Voltage Suppressor (FZ Style) H O W T O O R D E R NVFS6000 0 NVFS 6 F P O S I T I O N P O R T S I Z E 1 2 Position Single 2 2 Position Double Without Subplate 06T

V

Electrical Coil Insulation 5.0VA/60Hz, 5.6VA/50Hz Apparent Power AC InRush 2.3VA(1.5W)/60Hz, 3.4VA(2.1W)/50Hz (Power Consumption) Holding 1.8W Power Consumption DC Conduit Terminal Electrical Entry With Indicator Light and Surge Option Voltage Suppressor (FZ Style) H O W T O O R D E R NVFS6000 0 NVFS 6 F P O S I T I O N P O R T S I Z E 1 2 Position Single 2 2 Position Double Without Subplate 06T

Tamper Proof Speed Controller with One-touch Fitting Series AS


1F-T Elbow Type/Universal Type 1

flats) M1 L3 A L5 L4 D3 L1 L2 D2 T Metric Size Inch Size A A D1 d T H D2 D3 D4 L1 L2 L3 L4 L5 L6 M1 d T H D1 D2 D3 D4 L1 L2 L3 L4 L5 L6 M1 Model Model AS131F-M5-23T AS131F-U10/32-01T 1/8" 8.4 3.2 8.4 19.8 19.8 12.7 17.5 28.7 17.5 28.7 12.7 AS131F-M5-04T AS131F-U10/32-03T 5/32" 9.3 M5 x 0.8 8 9.6 9.3 4.5 10.8 31 0.7 27.4 4 9.3 20.3 20.3 0.7 27.4 4.5 31 10.8 10-32 UNF 8 9.6 9.3 AS131F-M5-06T