Table of Contents

LQ LVN Table(1) Connection Size and Applicable Model Table(2) Rated Voltage-Electrical Entry-Electrical Option Insulation type Electrical entry Electrical option 1 (100 V) 2 (200 V) 3 (110 V) 4 (220 V) 7 (240 V) 8 (48 V) 5 (24 V) 6 (12 V) TI/ TIL Applicable model VXR2150-04 VXR2150-06 VXR2260-10 1 VXR2270-12 1 VXR2380-14 2 VXR2390-20 Size Class B Class H G PA 1 2 3 4 C D, T G, C T S L,

VXR21/22/23

IN Model/Valve Specifications Connection Max. operating pressure differential (MPa) Flow characteristics Water, Oil Weight (g) Min.operating pressure differential (MPa) Orifice size (mm) Max. system pressure (MPa) Model Thread Water Oil Cv converted Av x 10 -6 (m 2) 1 2 3 4 VXR2150-04 VXR2150-06 VXR2260-10 VXR2270-12 VXR2380-14 VXR2390-20 20 20 25 35 40 50 1250 160 180 290 530 720 1200 6.5

AC Servo Motor Driver (Pulse input type/Positioning type ）

TROUBLESHOOTING Alarm No.: 7D Name: Safety observation error Alarm content The safety observation function detected an error. Detail No. Detail name Cause Check method Check result Action 7D.1 Stop (1) During activation of Check that the actual servo motor position is higher than the setting The travel distance of the servo motor is larger than the setting value in [Pr.PSA05].

AC Servo Motor Driver (Network card type ）

TROUBLESHOOTING Alarm No.: 7D Name: Safety observation error Alarm content The safety observation function detected an error. Detail No. Detail name Cause Check method Check result Action 7D.1 Stop (1) During activation of Check that the actual servo motor position is higher than the setting The travel distance of the servo motor is larger than the setting value in [Pr.PSA05].

FGX-OM-R008

Dimensions 1) SFE11 Gasket 2) SFE42/52/53/73 Dimensions: SFE42/52/53/73 Model A B C D SFE42 10 62 16.5 R1/8 SFE52 10 71 20.5 R1/8 SFE53 17 75 20.5 R1/4 SFE73 17 84 24 R1/4 3) SFE3A -6- 4) SFE4B/5C/7D Dimensions: SFE4B/5C/7D Model A B C SFE4B 6 73 16.5 SFE5C 8 84 20.5 SFE7D 10 94 24 5) SFE3F Applicable tube O.D. 4 6) SFE4G/5H/7J Applicable tube O.D.

Solenoid: No.1 Solenoid, Body Size: 20A, Style: Energized Open/N.C., Option: BC6, Copper Body & Shading Coil, NBR Seal, Class B Coil, Port Size: 06 [3/4 (20A)], Thread: NPTF, Voltage: 240VAC 50/60HZ, Lead Wire: DIN Connector, Surge Suppressor: -

Solenoid: No.1 Solenoid, Body Size: 20A, Style: Energized Open/N.C., Option: BC6, Copper Body & Shading Coil, NBR Seal, Class B Coil, Port Size: 06 [3/4 (20A)], Thread: NPT, Voltage: 240VAC 50/60HZ, Lead Wire: DIN Connector, Surge Suppressor: -

Solenoid: No.1 Solenoid, Body Size: 5 (20A), Style: 0 (Energized Open/N.C.), Option: BC6, Copper Body & Shading Coil, NBR Seal, Class B Coil, Port Size: 06 [3/4 (20A)], Thread: T (NPTF), Voltage: 7 (240VAC 50/60HZ), Lead Wire: D (DIN Connector)

Solenoid: No.1 Solenoid, Body Size: 5 (20A), Style: 0 (Energized Open/N.C.), Option: BC6, Copper Body & Shading Coil, NBR Seal, Class B Coil, Port Size: 06 [3/4 (20A)], Thread: N (NPT), Voltage: 7 (240VAC 50/60HZ), Lead Wire: D (DIN Connector)

Clean Exhaust Filter

Hold the end of the tubing and insert it all the way in. 840 Clean Exhaust Filter SFE Series Dimensions SFE11 Gasket M5 9 4 25 SFE42/52/53/73 Dimensions (mm) C A Model A B C D SFE42 10 62 16.5 R1/8 SFE52 10 71 20.5 R1/8 SFE53 17 75 20.5 R1/4 SFE73 17 84 24 R1/4 D B SFE3A 4 13.5 59 SFE4B/5C/7D AN A C Dimensions (mm) AMC Model A B C SFE4B 6 73 16.5 SFE5C 8 84 20.5 SFE7D 10 94 24 B AMV AMP SFE

2

New Products Guide 2 Air Preparation Equipment, Modular F. R. L., Air Tanks Fittings and Tubing Flow Control Equipment, Exhaust Filters Switches/Sensors Process Valves High Vacuum Equipment Temperature Control Equipment Pneumatic Instrumentation Process Gas Equipment Equipment CAT.E00-7A INDEX New Products Guide 2 Air Preparation Equipment/ Modular F. R. L./Air Tanks Refrigerated Air Dryer

Series IDG

NS30-7D Membrane Air Dryer Series IDG Space Saving Design Low Dew Point Models (-76F) No Heat Generation No Vibration Membrane Air Dryer Series IDG Dew point indicator Environmentally friendly (non-freon) Dew point indicator confirms air drying at a glance Power supply not required (except IDG1) (optional on IDG3, IDG5, IDG3H, IDG5H) A power supply is completely unnecessary.

Clean Exhaust Filter SFE Series

Clean Exhaust Filter SFE Series RoHS How to Order SFE 11 Size/Port size Male thread type Plug-in type Symbol Port size Max. ow capacity L/min (ANR) 11 M5 x 0.8 3 42 R1/8 65 52 R1/8 130 53 R1/4 130 73 R1/4 200 Symbol Port size Max. ow capacity L/min (ANR) 3A 4 30 4B 6 65 5C 8 130 7D 10 200 Male thread type One-touch tting type Symbol Applicable tubing O.D.

Size/Port: 7D [Plug-in Type, Port Size: ø10, Flow: 200 L/min (ANR)]

OMS0020

52 R 114 72 r 19 13 DC3 51 33 3 83 53 S 115 73 s 20 14 DC4 52 34 4 84 54 T 116 74 t 21 15 NAK 53 35 5 85 55 U 117 75 u 22 16 SYN 54 36 6 86 56 V 118 76 v 23 17 ETB 55 37 7 87 57 W 119 77 w 24 18 CAN 56 38 8 88 58 X 120 78 x 25 19 EM 57 39 9 89 59 Y 121 79 y 26 1A SUB 58 3A : 90 5A Z 122 7A z 27 1B ESC 59 3B ; 91 5B [ 123 7B { 28 1C FS 60 3C < 92 5C \ 124 7C | 29 1D GS 61 3D = 93 5D ] 125 7D

OMU0023

52 R 114 72 r 19 13 DC3 51 33 3 83 53 S 115 73 s 20 14 DC4 52 34 4 84 54 T 116 74 t 21 15 NAK 53 35 5 85 55 U 117 75 u 22 16 SYN 54 36 6 86 56 V 118 76 v 23 17 ETB 55 37 7 87 57 W 119 77 w 24 18 CAN 56 38 8 88 58 X 120 78 x 25 19 EM 57 39 9 89 59 Y 121 79 y 26 1A SUB 58 3A : 90 5A Z 122 7A z 27 1B ESC 59 3B ; 91 5B [ 123 7B { 28 1C FS 60 3C < 92 5C \ 124 7C | 29 1D GS 61 3D = 93 5D ] 125 7D

Direct Operated Pilot Operated 2-Port Solenoid Valve Refer to pages 7, 9, 11, 25, 35, and 39 for details.

Test range Thermometer Test equipment Pressure tap Pressure tap Throttle valve on the Flow meter Throttle valve on the downstream side 2d 6d upstream side 20d 7d Fig. (3) Test circuit based on IEC 60534-2-3, JIS B 2005-2-3 100 100 Saturated steam flow rate Q0 [kg/h] (when Kv = 1) Upstream pressure Water flow rate Q0 [L/min] (When Kv = 1) 50 40 40 50 P1 = 1 MPa P1 = 0.8 MPa P1 = 0.6 MPa

7

VXZ VXS VXB Test range Thermometer VXE Equipment for test Pressure tap Pressure tap VXP VXR Throttle valve in the downstream side Flow meter Throttle valve in the upstream side VXH 2d 6d VXF 20d 7d VX3 Fig. (3) Test circuit based on IEC60534-2-3, JIS B 2005-2-3 VXA 100 100 Saturated steam flow rate Q0 [kg/h] (when Kv = 1) Upstream pressure Water flow rate Q0 [L/min] (When Kv = 1) 50 40

3

VXZ VXS VXS VXB Test range Thermometer VXE Equipment for test Pressure tap Pressure tap VXP VXR Throttle valve in the downstream side Flow meter Throttle valve in the upstream side VXH 2d 6d VXF 20d 7d VX3 Fig. (3) Test circuit based on IEC60534-2-3, JIS B 2005-2-3 VXA 100 100 Saturated steam flow rate Q0 [kg/h] (when Kv = 1) Upstream pressure Water flow rate Q0 [L/min] (When Kv = 1) 50

In-line Air Filter

Flow rate [L/min (ANR)] ZFC33/3B 4, 5/32" ZFC53/5B 4, 5/32" ZFC54/5D 6, 1/4" 0.3 MPa 0.3 MPa 0.3 MPa 30 30 30 0.1 MPa Pressure drop [kPa] Pressure drop [kPa] Pressure drop [kPa] 0.1 MPa 0.1 MPa 20 20 20 0.5 MPa 0.5 MPa 0.5 MPa 0.7 MPa 0.7 MPa 0.7 MPa 10 10 10 0 20 40 60 80 100 0 0 0 0 50 100 150 200 0 20 40 60 80 Flow rate [L/min (ANR)] Flow rate [L/min (ANR)] Flow rate [L/min (ANR)] ZFC74/7D