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0.4

D side Stations U side 8 7 6 5 4 3 2 1 n SQ C10: 10 One-touch fitting C10 [3(R) EXH port] VFS 4 x G 1/2 Conduit port C10 [3(R) EXH port] (C12 in case of branch type) VFR 90.7 2.6 C10: 10 One-touch fitting (C12: 12 One-touch fitting) VQ7 DIN rail clamp screw R R 3 X 3 X 12 10 55.5 49.5 B B B B B B B B 12 P12 P 30 25 1 1 A A A A A A A A 13.5 33.5 (7.5) 25 P = 16 45 C10: 10 One-touch fitting

5 Port Solenoid Valve Series SY3000/5000/7000/9000

(Pitch) P = 24 22.2 24.3 With External Pilot Specifications 1118.3 R R 4 A 4 A 4 A 4 A 18.8 3/5 3/5 18.8 18 4 A 4 A R R 4 A 4 A 4 A 4 A 3/5 3/5 39.3 40.1 4 A 4 A 39.3 63.3 79.8 SJ 1 P 1 P 2 B 2 B 2 B 2 B 2 B 2 B 1 P 1 P 2 B 2 B 2 B 2 B 2 B 2 B Plug [1(P), 3/5(R) port] One-touch fitting [1(P), 3/5(R) port] Applicable tubing O.D.: 12, 3/8" 1/4, 3/8 [4 (A), 2 (B) port] SY SV One-touch fitting

SY

Port size M5 x 0.8 Rc 1/8 Rc 1/4 SY3000 SY3000-39-2A SY5000 SY5000-39-2A SY7000 SY7000-39-2A SY3000 SY3000-38-2A SY5000 SY5000-38-2A SY7000 SY7000-38-2A M5 x 0.8 Rc 1/8 Rc 1/4 Series Round head combination screw Gasket Rc 1/4 SY9000 SY9000-39-2A Rc 1/4 SY9000 SY9000-38-2A SY3000 SY3000-23-4 (M2 x 21) M3 x 26 (Flat nickel plated) SY3000-11-25 Note 1) The SUP port can be on the lead wire side

1

C6 1 0 e t r y u i o !

Series 10-SY3000/5000/7000/9000 5 Port Solenoid Valve

(Pitch) P = 24 22.2 24.3 With External Pilot Specifications 1118.3 18.8 39.3 18 18.8 39.3 40.1 R R 3/5 3/5 4 A 4 A 4 A 3/5 4 A 4 A 4 A R R 3/5 4 A 4 A 4 A 4 A 4 A 4 A 63.3 79.8 2 B P 1 1 P 2 B 2 B 2 B 2 B 2 B Plug [1(P), 3/5(R) port] 2 B P 1 1 P 2 B 2 B 2 B 2 B 2 B One-touch fitting [1(P), 3/5(R) port] Applicable tubing O.D.: 12, 3/8" One-touch fitting [4(A), 2(B) port] Applicable tubing

Compact 5-Port Solenoid Valve

For D-sub Connector/Flat Ribbon Cable/Lead Wire pp. 21, 55, 119 1 3 5 JJ5SY 10 R For Terminal Block Box pp. 43, 119 1 3 5 T TC JJ5SY 10 R pp. 83, 73, 91, 119 For EX260/EX245/EX120 1 3 5 S S3 JJ5SY R 10 SUP/EXH block assembly R External pilot * The combination of external pilot type R and silencer type S is not available. * Only the JSY3000/5000 can be selected for the EX245.

42

-P--02: 1/4 VVQ4000-P--03: 3/8 4(A) 2(B) 1(P') 5(R1) 3(R2) Plug-in type Plug lead type Circuit diagram Individual EXH spacer VVQ4000 R 1 02 163 (Plug-in type) Thread type 115.5 (Plug lead type) 25 Manifold Port size Nil Rc F G N NPT T NPTF 73 12.5 02 1/4 03 3/8 1 Plug-in type 5 Plug lead type 26.4 1(P) 4(A) VVQ4000-R--02: 1/4 VVQ4000-R--03: 3/8 2(B) 3(R') 3(R2) 5(R1) Circuit diagram Plug-in

VQ4000

) (+) 2A SOL.B 2B (+) () 2 stations 1.

Series SV

TYPE 1 TYPE 1 TYPE 1 TYPE 1 TYPE 1 TYPE 1 TYPE 1 TYPE 1 TYPE1 US C R C US US C R R R R R R R US C US C US C US C US C US C SERIAL NO.

Plug-in Unit

Port size VQC1000/2000 VQC4000 --C8 Port size VQC2000 VQC1000 Symbol C3 C4 C6 C8 C10 C12 N1 N3 N7 N9 N11 M5 02 03 B C0 VVQC 1 000-2A-1 For 3.2 One-touch fitting For 4 One-touch fitting For 6 For 8 For 10 For 12 For 1/8" For 5/32" For 1/4" For 5/16" For 3/8" For M5 thread Rc 1/4" Rc 3/8" Rc 1/4" bottom ported Without One-touch fitting Option Series Nil R Centralized exhaust External pilot

VQC

1 Indicator light Manual override (12) 13 Approx. 10.5 (5.5) SI UNIT 127 Approx. 3.5 Approx. 5.5 105.5 (35) 80 (46.5) Series EX500 Mounting hole for 4-M5 n 1 2 3 4 5 6 7 Stations D-side 8 U-side C10 3(R) port 2-C12 3(R) port DIN rail clamp screw 0 76.5 1 10 (12) 60 49.5 30 25 C10 1(P) port 13.5 25 (7.5) 45 P = 16 2-C12 1(P) port 2n-C4, C6, C8 C4: 4 One-touch fitting C6: 6 One-touch fitting

5 Port Solenoid Valve, Series VQC

1 Indicator light Manual override (12) 13 Approx. 10.5 (5.5) SI UNIT 127 Approx. 3.5 Approx. 5.5 105.5 (35) 80 (46.5) Series EX500 Mounting hole for 4-M5 n 1 2 3 4 5 6 7 Stations D-side 8 U-side C10 3(R) port 2-C12 3(R) port DIN rail clamp screw 0 76.5 1 10 (12) 60 49.5 30 25 13.5 C10 1(P) port 25 (7.5) 45 P = 16 2-C12 1(P) port 2n-C4, C6, C8 C4: 4 One-touch fitting C6: 6 One-touch fitting

CATALOG

1 1 1/4 115/16 5/8 3/4 9/16 3/8 11/32 325 (3.25) 1 3/4-16 1 1/8 3.9 1 1/2 1/2 3/8-24 3 3/4 0 1.57 2.76 2.34 2.72 8.94 1.57 11.69 6.82 1 3/8 1 1/2 2 7/16 7/8 1/2 27/64 400 (4) 1 3/4-16 1 1/8 4.7 1 1/2 1/2 3/8-24 4 1/2 0 1.57 3.32 2.34 2.72 8.94 1.57 11.69 6.82 1 3/8 2 1/16 2 7/16 7/8 1/2 27/64 H O W T O O R D E R S E R I E S N C A 1 A I R C Y L I N D E R O P T I O N S D U A L O P E R A T

Table of Contents

2, Metal joint q, w, O-ring e, r, t, y, u VVFS5000-1A-2Plug-in type Non plug-in type !1 VVFS5000-2A-1 VVFS5000-2A-2 End plate (U side) assembly !

Series 10-SV1000/2000/3000/4000 5 Port Solenoid Valve

Stations 3 2 1 D D D D How to Order Valve 10-SV 1 1 0 0 F 5 Note) q w r e t y u i Air Preparation Equipment Pressure Control Equipment Flow Control Equipment Pressure Switches/ Pressure Sensors q Series r Back pressure check valve Note) Available with manifold block for station additions.

5 Port Solenoid Valve SY Series

5 (P) 1 t 2 position double JIS Symbol 2 position double (A) (B) 4 2 q w y u r (P) 1 (EB) 3 (EA) 5 t 3 Position Closed center / Exhaust center / Pressure center JIS Symbol 3 position closed center (A) (B) 4 2 q w y u r 3 position exhaust center 3 position pressure center (EB) 3 (EA) 5 (P) 1 t (This figure shows a closed center type.)

IDX-OM-W023

Rc1/2 32 25 1) 2830Nm 30 (5) (17)(30) 2 2 Rc1/2 10-4 1-1 IDU Series 10-3 10 3 IDX-OM-W023 11 R 11 R 11-1 11-2 1 AC100V AC200V INOUT IDU8E15E1-10-R IDU15E1-20/23-R IDU8E/11E-20/23-R (A) 10 5 (mA) 30 11-3 M5 9.5mm 2 1.25mm L ,N N L () () IDU Series 11-1 11 1 IDX-OM-W023 11 R AC100V M4 () AC200V (M3) 17 11-4 () () ONOFF 11-5 1-1 IDU Series 11-4 11 2 IDX-OM-W023

New

47.5 3 15 1/2 Electrical entry Size Port size Faston DIN terminal Conduit terminal Conduit P type Q R S Q R S T Q R Q R 1 2 1/8, 1/4 1/4, 3/8 1/4, 3/8 64.5 67 69.5 69.5 34 45 50 53 52.5 55 57.5 57.5 99.5 102 104.5 104.5 36 47 52 55 68.5 71 73.5 73.5 77 91 96 47.5 50 52.5 52.5 36 47 52 55 23 25.5 28 28 42 53.5 58 61 3 1/2 101.5 23 Series VX2 For Air mm Dimensions/Body Material: Resin Y Y