Compact 5-Port Solenoid Valve

S PN EX245 1A Manifold Options Specific Product Precautions SI unit Connector type Symbol Communication connector Power supply connector 1A Push Pull connector (SCRJ): 2 pcs.

5 Port Solenoid Valve Series SV1000/2000/3000/4000

Linearity (77F) 0.15% F .S. Repeatability (77F) 0.6% F .S. 0.5% F .S.

7.5

Note SJ3160-5CUCO 2 sets SJ3000-76-1A SJ2000 SJ3000 With power supply terminal (for PC wiring) SJ3000-120-1A-C8 1 set SJ3000-76-2A-05 Note) When ordering with an intermediate connector block assembly installed in the manifold, please order using the manifold specification sheet.

Series SV

Tie-rod base manifold: SS5V1-W10S1D Stations (S, R, RS) (-D) C3, N1 C4, N3 C6, N7 U D B When P, E port outlets are indicated on the U side or D side, the P, E ports on the opposite side are plugged.

5 Port Solenoid Valve Series SY3000/5000/7000/9000

SX3000-77-1A SX5000-77-1A SY3000 SY5000 Series Part no. SX3000-77-1A SX5000-77-1A SY3000 SY5000 EXH port SUP port Label for block disk The labels shown below are used on manifold stations containing SUP/EXH blocking disk(s) to show their location. (3 pcs. each) Series Assembly part no. Port size Series Assembly part no.

SX

SX3000-77-1A SX5000-77-1A SX3000 SX5000 Series Part no.

High Vacuum Angle Valve

w Standard XL XL Special Standard XLQ Special Standard Common XM XY Special XLD50-2-9-1A AS568-016V AS568-009V XLD63-2-9-1A XLD80-2-9-1A XLD100-2-9-1A Standard S valve seal assembly r XLD(V) DXLD40-2-9-1A AS568-016 XLD50-2-9-1A AS568-016 XLD63-2-9-1AXLD80-2-9-1A XLD160-2-9-1A AS568-020 AS568-009 XLD100-2-9-1A Special Note 1) In cases where the seal material is other than the standard (FKM

Series 10-SV1000/2000/3000/4000 5 Port Solenoid Valve

-59-2A 10-SV1000 16 SX3000-77-1A SX3000-77-1A 10 SV2000-59-1A SV2000-59-2A 10-SV2000 16 SV2000-59-3A SV2000-59-3A 10 SV3000-59-1A SV3000-59-1A 10-SV3000 10 SY9000-57-1A SY9000-57-1A 10-SV4000 261 Manifold Option 10-SV Manifold Option Circular connector / Cable assembly (26 pins) D-sub connector / Cable assembly (25 pins) AXT100 MC26 AXT100 DS25 Directional Control Valves Air Grippers

CATALOG

I N G S C3 C4 C6 M5 N1 N3 N7 C3 C4 C6 M5 N1 N3 N7 A S S E M B LY VVQ1000-R-1-C6 VVQ1000-52A-C8 (VQ1000) O F B A C K P R E S S U R E A S S E M B LY [-B] VVQ1000-57A DIN R A I L M O U N T E D B R A C K E T [-D] VA C U U M E J E C T O R U N I T C H E C K VA LV E F O R P R E V E N T I O N O F S I L E N C E R (EXH P O R T) VVQ1000-JA BM (VQ1000) VVQ1000-18A Courtesy of Steven Engineering, Inc.

Aluminum High Vacuum Angle Valve

AS568-016V XM XY AS568-009V XLD63-2-9-1A XLD80-2-9-1A XLD100-2-9-1A XLD160-2-9-1A Standard S valve seal assembly r XLD(V) XLD40-2-9-1A AS568-016 XLD50-2-9-1A AS568-016 XLD63-2-9-1AXLD80-2-9-1A AS568-009 XLD100-2-9-1A XLD160-2-9-1A Special DNote 3) In cases where the seal material is other than the standard (FKM: includes Compound no. 1349-80: made by Mitsubishi Cable Industries, Inc.),

Valve Single Unit

SX3000-77-1A SX5000-77-1A SX3000 SX5000 Series Part no. SX3000-77-1A SX5000-77-1A SX3000 SX5000 SY SYJ Lable for block disk The labels shown below are used on manifold stations containing SUP/EXH block disk(s) to show their location. (3 pcs. each) EXH port SUP port SX VZ3000-123-1A Label for SUP/EXH block disk Label for EXH block disk Label for SUP block disk Series Assembly part no.

Valve Single Unit

SX3000-77-1A SX5000-77-1A SX3000 SX5000 Series Part no. SX3000-77-1A SX5000-77-1A SX3000 SX5000 SY SYJ Lable for block disk The labels shown below are used on manifold stations containing SUP/EXH block disk(s) to show their location. (3 pcs. each) EXH port SUP port SX VZ3000-123-1A Label for SUP/EXH block disk Label for EXH block disk Label for SUP block disk Series Assembly part no.

5 Port Solenoid Valve

D-sub Note 1) M12 CC-Link Note 1) D-sub S kit: IP40 specification (IP67 specification for all other S kits) Note 2) For SI unit part number, refer to page 1.

Table of Contents

Fixed 4% F .S.

V

I N G S C3 C4 C6 M5 N1 N3 N7 C3 C4 C6 M5 N1 N3 N7 A S S E M B LY VVQ1000-R-1-C6 VVQ1000-52A-C8 (VQ1000) O F B A C K P R E S S U R E A S S E M B LY [-B] VVQ1000-57A DIN R A I L M O U N T E D B R A C K E T [-D] VA C U U M E J E C T O R U N I T C H E C K VA LV E F O R P R E V E N T I O N O F S I L E N C E R (EXH P O R T) VVQ1000-JA BM (VQ1000) VVQ1000-18A Courtesy of Steven Engineering, Inc.

SQ1000/2000

plate assembly u F kit L kit T kit S kit P (J) kit q !

V100

PVT317-53-1A 1 pc.

SZ3000

SZ3000-73-1A-L6 SZ3000-73-2A-L4 SZ3000-73-2A-L6 SZ3000-56-1A VVQ1000-51A-C6 VVQ1000-51A-C8 SZ3000-74-1A-L6 SZ3000-74-1A-L8 SZ3000-74-2A-L6 SZ3000-74-2A-L8 4(A), 2(B) port 1(P), 3(R) port Other Tube Brands Caution 1.

SZ3000

SZ3000-73-1A-L6 SZ3000-73-2A-L4 SZ3000-73-2A-L6 SZ3000-56-1A VVQ1000-51A-C6 VVQ1000-51A-C8 SZ3000-74-1A-L6 SZ3000-74-1A-L8 SZ3000-74-2A-L6 SZ3000-74-2A-L8 4(A), 2(B) port 1(P), 3(R) port Other Tube Brands Caution 1.

SY

Notes: Blanking plate assembly: SX3000-75-1A SUP block disc: SX3000-77-1A EXH block disc: SX3000-77-1A (2 pcs.