Power Valve Precision Regulator

Note) O-rings cannot be shipped as a single unit. 4 1 PVQ 8 3 3 A B 2 1 Body ported Base mounted 2 1 VY1 4 3 5 VBA VBAT 1 1 2 1 1 4 1 7 1 4 1 AP100 1 2 9 2 Without sub-plate 8 1 2 4 1 Option (2) Part no.



External pilot port Without M5 x 0.8 thread: Internal pilot VVEXB-1 With M5 x 0.8 thread: Common external pilot VVEXB-2 P = 31 P(1) port: Rc 1/8, For 6 manifold stations or n-Rc 1 8 more, exhaust from the both sides.

E-P HYREG ® Series VY1

-6 A 1 1 1 1 0 2.5 5 7.5 10 V 0 2.5 5 7.5 10 V 0 2.5 5 7.5 10 V VY1D00-7 VY1B0-7 VY120-7 1 A 2 2 2 mA mA mA 4 0 8 12 16 20 4 0 8 12 16 20 4 0 8 12 16 20 VY1D00-8 0 5 10 15 20 VY1B0-8 0 5 10 15 20 VY120-8 0 5 10 15 20 1 3 3 3 A mA mA mA Command signal Command signal Command signal VY11300 1 VY1400 1 VY1500 1 1 1 1 0.8 0.8 0.8 A port pressure (MPa) A port pressure (MPa) A port pressure (MPa

E-P HYREG ® Series VY1 1

20 1 3 3 3 A mA mA mA Command signal Command signal Command signal VY11300 1 VY1400 1 VY1500 1 1 1 1 0.8 0.8 0.8 A port pressure (MPa) A port pressure (MPa) A port pressure (MPa) 0.6 0.6 0.6 0.4 0.4 0.4 0.2 0.2 0.2 VY130-5 VY140-5 VY150-5 0 1 2 3 4 5 0 1 2 3 4 5 0 1 2 3 4 5 V V V VY130-6 VY140-6 VY150-6 1 1 1 0 2.5 5 7.5 10 0 2.5 5 7.5 10 0 2.5 5 7.5 10 V V V VY130-7 VY140-7 VY150-7 2 2

V100

Ground 4-7-11 12 Series VT317 How to Use DIN Terminal 1.

3 Port Solenoid Valve Series VQ100 1

16 173 167 17 183 177 18 193 187 19 203 197 20 213 207 1 23 17 103 97 VQ VKF Plug Lead Unit, Type U (Large Flow Type) Mounted Manifold (VV3Q12U) L1 L2 7 VQZ Round head combination screw M1.7 x 14 7 Manual override VZ 7 14 P E P E 37.4 16 VS 29 32 43.8 VFN 4-PT 1/8 P , E port 2-3.5 Mounting hole 300 300 15.5 P = 10 1 2 3 4 5 n U side D side 40.2 15.5 46.2 19.4 A A 9.5 16.7 P = 10 n-M5 x 0.8

3 Port Solenoid Valve Series VQ100 1

Stations U side D side 2 stations 02 VVQ1000-10A-2 Stations4321 20 stations 20 Port size and thread M5, Rc 1/8 NPT 1/8 NPTF 1/8 PF 1/8 Nil 01N 01T 01F Only thread port size 1/8 type, (Type 2U, P/E port) has choice of thread.

3 Port Solenoid Valve Series VQ100

Stations U side D side 2 stations 02 VVQ1000-10A-2 Stations4321 20 stations 20 Port size and thread M5, Rc 1/8 NPT 1/8 NPTF 1/8 PF 1/8 Nil 01N 01T 01F Only thread port size 1/8 type, (Type 2U, P/E port) has choice of thread.

VQ

Stations Stasions 3 2 1 Dside Uside 02 2 stations VVQ1000-10A-2 20 20 stations Port size and thread 01N 01T 01F M5, Rc(PT)1/8 NPT1/8 NPTF1/8 G(PF)1/8 Only thread port size 1/8 style (2U type, P/E port) has choice of thread.

Compact Vacuum Unit

None Supply valve (1) (1) (2) (2) Release valve (4) Supply valve (1) (1) (2) (2) Release valve (4) Supply valve (1) (1) Release valve (4) Supply valve (1) (1) Release valve (4) Supply valve (3) (3) Release valve (4) K1 J1 Q1 Q2 VQ110 Rated voltage (4) ZB1 (4) (4) 5 6 24 VDC 12 VDC Connector assembly Table 2 Connector entry direction Note 1) AXT661 L LO M MO L-type plug connector, with lead

Compact Vacuum Unit Ejector/ Vacuum Pump System

digit Hysteresis mode Hysteresis Adjustable (can be set from 0) Note 1) Window comparator mode Display type 3 1/2 digits, 7-segment LED 1-color display (red) Display accuracy +/-2%F.S., +/-1 digit (at ambient temperature 25+/-3 Celcius) Indication LED Lights up when ON OUT1: Green, OUT2: Red.

AC

55.2 5 5 7 7 7 7 10 10 10 7.5 8.5 11 11 13 13 16 16 16 16 23 26 26 33 36 40 40 40 16 16 20 10 12.5 9.5 14.5 14.5 14.5 38.5 50 70.5 70.5 88 88 115 117.5 117.5 90.5 126.5 AC1020 AC2020 AC2520 AC3020 AC4020 AC4020-06 AC5020 AC5520 AC6020 1/8, 1/4 1/4, 3/8 1/4, 3/8 1/4, 3/8, 1/2 3/4 3/4, 1 1 1 181 191 225.5 230.5 309.5 323.5 323.5 Option For piping adapter AC2520, 3020, port size 1/2: 40mm For

ZB-OM00301

LN1 1/8 LN3 5/32 10 ZFAZFBZFC 11 10 - No.ZB-OM00301 / 1 01 1 / 02 2 S / 1 S 12 12 PV PD 2 PD PVPD 01 Rc1/8 M5 M50.8PVPD 01N NPT1/8 2 01F G1/8 M5 M50.8 M50.8 M-5P ZB03 ZB04 ZB05 ZB06 PV N.C.

Electro-Pneumatic Proportional Valve

Base mounted Body ported Base mounted Voltage 5 6 24VDC 12VDC Port size Nil M5 01 01F 01N 01T Without sub-plate (PVQ13, 33) With sub-plate (PVQ13 only) Rc 1/8 G 1/8 NPT1/8 NPTF 1/8 Electrical entry Orifice size L type plug connector, with lead wire (PVQ13 only) M type plug connector, with lead wire (PVQ13 only) Grommet (PVQ31, 33) L 03 04 06 08 16 23 40 0.3mm ( for PVQ13) 0.4mm ( for PVQ13

Piping: 40 (Base Mounted Common SUP Common EXH), Stations: 7 Stations, A B Port Size: 01N (NPT 1/8)

Pilot: 1 (Internal Pilot), Stations: 7 Stations

Pilot: Internal Pilot, Stations: 7 Stations, Thread: -

Pilot: 1 (Internal Pilot), Stations: 10 Stations, Thread: N (NPT)

Pilot: 1 (Internal Pilot), Stations: 3 Stations, Thread: N (NPT)

Pilot: 1 (Internal Pilot), Stations: 4 Stations, Thread: N (NPT)