External pilot port Without M5 x 0.8 thread: Internal pilot VVEXB-1 With M5 x 0.8 thread: Common external pilot VVEXB-2 P = 31 P(1) port: Rc 1/8, For 6 manifold stations or n-Rc 1 8 more, exhaust from the both sides.

Power Valve Precision Regulator

Without thread: Internal pilot VVEXB-1 With M5 thread: Common external pilot VVEXB-2 (79) 61.5 P1 A A R 31 26 19 P 10 9 8 P=31 35 Port 1(P): 1 8 25.5 n x port 2(A): 1 8 For 6 manifold stations or more, exhaust from the both sides. 37 29 L Dimension L1 = 31n + 25, L2 = 31n + 12 n: Station 2 87 74 L1 L2 3 118 105 4 149 136 5 180 167 6 211 198 7 242 229 8 273 260 9 304 291 10 335 322 Symbol

E-P HYREG ® Series VY1

T Body size Pilot type Valve stations Port size 1 22 2 stations P , R A Internal pilot 0 1 For VY1B0 B 01 1 8 2 Common external pilot 210 2 10 stations 2 stations 1 Internal pilot 0 1 For VY120 2 1 4 02 2 Common external pilot 8 2 8 stations 3 8 1 4 A B C 2 stations 1 Internal pilot 0 1 For VY140 3 8 4 2 Common external pilot 3 8 1 2 6 Dimensions 6 stations VVEXB Connection mark All types

E-P HYREG ® Series VY1 1

T Body size Pilot type Valve stations Port size 1 22 2 stations P , R A Internal pilot 0 1 For VY1B0 B 01 1 8 2 Common external pilot 210 2 10 stations 2 stations 1 Internal pilot 0 1 For VY120 2 1 4 02 2 Common external pilot 8 2 8 stations 3 8 1 4 A B C 2 stations 1 Internal pilot 0 1 For VY140 3 8 4 2 Common external pilot 3 8 1 2 6 Dimensions 6 stations VVEXB Connection mark All types

V100

) 3 Individual 1 8 1 4 , 1 4 1 8 VZ Note) For more than 6 stations, supply air both sides of P port.

3 Port Solenoid Valve Series VQ100 1

Flow Rate SOL. 17 17 stations For obtaining the flow rate, refer to page 4-1-6.

3 Port Solenoid Valve Series VQ100 1

Flow Rate SOL. 17 17 stations For obtaining the flow rate, refer to page 4-1-6.

3 Port Solenoid Valve Series VQ100

Flow Rate SOL. 17 17 stations For obtaining the flow rate, refer to page 4-1-6.

VQ

rated voltage 1 2 3 4 5 6 9 100V AC (50/60Hz) 200V AC (50/60Hz) 110V AC (50/60Hz) 220V AC (50/60Hz) 24V DC 12V DC Other (1) : Option Note 1) Except for large flow capacity style.

Compact Vacuum Unit

None Supply valve (1) (1) (2) (2) Release valve (4) Supply valve (1) (1) (2) (2) Release valve (4) Supply valve (1) (1) Release valve (4) Supply valve (1) (1) Release valve (4) Supply valve (3) (3) Release valve (4) K1 J1 Q1 Q2 VQ110 Rated voltage (4) ZB1 (4) (4) 5 6 24 VDC 12 VDC Connector assembly Table 2 Connector entry direction Note 1) AXT661 L LO M MO L-type plug connector, with lead

Compact Vacuum Unit Ejector/ Vacuum Pump System

2001 (JIS B8392-1:2003).

ZB-OM00301

LN1 1/8 LN3 5/32 10 ZFAZFBZFC 11 10 - No.ZB-OM00301 / 1 01 1 / 02 2 S / 1 S 12 12 PV PD 2 PD PVPD 01 Rc1/8 M5 M50.8PVPD 01N NPT1/8 2 01F G1/8 M5 M50.8 M50.8 M-5P ZB03 ZB04 ZB05 ZB06 PV N.C.

AC

size 4 3 / 8 3 8 3 AV 2 1 Air Fluid AU 1.5MPa Proof pressure 1.0MPa Max. operating pressure AF 0.05 to 0.7MPa 0.1 to 0.85MPa Set pressure range AR : 34 8 3 : 56 2 1 : 84 Max. effective area (mm2) (OUT IN) / / 4 1 4 1 : 6 : 6.5 2.8 92 : 127 203 1: 131 8 3 : 26 : 31 4 1 4 1 4 3 8 3 : 18 : 20 8 1 IR 8 1/ 8 1/ 8 1/ 4 1 4 1 Pressure gauge port size 16 1 4 1 4 1 VEX Ambient and fluid temperature

Electro-Pneumatic Proportional Valve

Base mounted Body ported Base mounted Voltage 5 6 24VDC 12VDC Port size Nil M5 01 01F 01N 01T Without sub-plate (PVQ13, 33) With sub-plate (PVQ13 only) Rc 1/8 G 1/8 NPT1/8 NPTF 1/8 Electrical entry Orifice size L type plug connector, with lead wire (PVQ13 only) M type plug connector, with lead wire (PVQ13 only) Grommet (PVQ31, 33) L 03 04 06 08 16 23 40 0.3mm ( for PVQ13) 0.4mm ( for PVQ13

Pilot: 1 (Internal Pilot), Stations: 10 Stations, Thread: N (NPT)

Pilot: 1 (Internal Pilot), Stations: 3 Stations, Thread: N (NPT)

Pilot: 1 (Internal Pilot), Stations: 4 Stations, Thread: N (NPT)

Pilot: 1 (Internal Pilot), Stations: 5 Stations, Thread: N (NPT)

Pilot: 1 (Internal Pilot), Stations: 2 Stations, Thread: N (NPT)

Pilot: 1 (Internal Pilot), Stations: 8 Stations, Thread: N (NPT)