E-P HYREG ® Series VY1

01 M5 Port M5 01 02 01 02 02 03 20 04 02 03 04 04 06 10 12 14 P Port size Rc 11 2 1 1 8 1 8 1 4 1 8 1 4 1 4 3 8 1 2 1 4 3 8 1 2 1 2 3 4 1 1 1 4 A M5 M5 M5 2 1 4 R 2 1 0.11 0.16 Weight (kg) (1) 0.19 0.25 0.35 0.55 0.75 1.5 2 4 Hysteresis (2) 1% F.S. 2.5% F .S. 3% F .S. 5% F .S.

E-P HYREG ® Series VY1 1

4 1 8 1 4 1 4 3 8 1 2 1 4 3 8 1 2 1 2 3 4 1 1 1 4 A M5 M5 M5 2 1 4 R 2 1 0.11 0.16 Weight (kg) (1) 0.19 0.25 0.35 0.55 0.75 1.5 2 4 Hysteresis (2) 1% F.S. 2.5% F .S. 3% F .S. 5% F .S.

VEX-OMT0003

(1) (2) VEX4-2A-1 (1) (2) Base gasket VEX1-11-2 VEX4-4 Function plate between pilot valve and cover (with gasket) DXT152-14-1A Grommet L-connector M-connector V114VO307K-1 Pilot valve DIN terminal V115Note 2) Select the symbols from the table below for (1) and (2). (1) Port size (2) Thread type Symbol Port size Symbol Thread 4 5 type VEX322 VEX342 Nil Rc A 1/8 1/4 F G Description VVEX2 VVEX4

VEX-OMY0001

NXT013-3 VO307K-1 2) 3) VEX322 VEX342 Rc A 1/8 1/4 F G VVEX2 VVEX4 B 1/4 3/8 N NPT ( ) VEX1-17 VEX4-5 C 1/2 T NPTF 11 No.VEX-OMY0001 (2) () 3 2(A) 23(P2) 12(P1) a,b 12(P1),23(P2) (2) a 12(P1) 1(P)2(A)3 3(R) 3(R) b 23(P2) 2(A) 2(A)3(R)1 1(P) 1(P) 12(P1) 1 2 3 23(P2) 4 5 6 7 8 POM 9 -12No.VEX-OMY0001 () () 3(R) 2(A) 1(P) 1(P) 2(A) 3(R) () a b P1P2 2(A) 1(P)

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

Valve (Material: Stainless steel SUS304) 2. Valve seal (Maintenance part) 4.

XM, XY

Note 2) Figures in ( ) indicates the weight of CF (conflate) fittings.

Large Capacity Compressed Air Filters Series AFW

AFW1500-N30D-WS 1,500 1/2 1/2 215 3 flg. ** 32 39 7.5 16 2,550 AFW1500-N30FM-WS 1,500 1/2 1/2 326 4 flg. ** 32 39.5 9.75 18.25 3,570 AFW2100-N40FM-WS 2,100 C 1/2 1/2 439 6 flg. ** 32 41 12 20.5 6,460 AFW3800-N60FM-WS 3,800 3/4 3/4 647 8 flg. ** 32 41.5 14.5 24 11,050 AFW6500-N80FM-WS 6,500 3/4 3/4 778 10 flg. ** 32 42.5 17.5 28 17,000 AFW10-N100FM-WS 10,000 CF CF CF 12 flg. ** CF CF CF CF

XMC/XYC Series

XYC series / Straight Valve 8 XM-OMP0002-A 4-2.

IZx-OMT0049

Routing of cables . 32 3-2. Wiring (IZT40/41/42) . 35 3-2-1. Ground the F.G. cable . 35 3-2-2. Connection Circuit . 35 3-2-3. Wiring of the AC adapter (IZT40/41/42) . 37 3-3. Timing chartIZT40/41/42 . 38 3-3-1. IZT40 . 3-3-2. IZT41IZT42 . 41 4. Function . 45 4-1. Name of Parts . 45 4-1-1. Controller . 45 4-1-2. High voltage power supply module . 47 4-2. Operation modes . 48 4-2-1.

IZx-OMX0087

Name of Parts . 4-1-1. Controller . 4-1-2. High voltage power supply module . 4-2. Operation modes . 4-3. High voltage power supply module CH number setting . 4-4. Controller setting . 4-4-1. Operation overview . 4-4-2. Channel selection mode . 4-4-3. Frequency set mode . 4-4-4. Offset voltage adjustment mode . 4-4-5. Balance control selection mode . 4-4-6.

Ionizer

With 2 pcs.

XMA/XYA Series

Contents Safety Instructions 2 1. Product Specific Precautions 1 4 (Precautions on Design, Selection, Mounting, Piping, Maintenance) 2. Product Specific Precautions 2 6 (Maintenance parts) 3. Specifications 7 4. Construction / Dimensions 8 5.

NCQ8

/8 4 1/2 4 3/4 5 5 1/4 1 5/8 1 3/4 1 7/8 2 2 1/8 2 1/4 2 3/8 3 1/4 3 1/2 3 3/4 4 1 7/8 2 2 1/8 2 1/4 2 3/8 2 1/2 2 5/8 3 1/2 3 3/4 4 4 1/2 2 1/8 2 1/4 2 3/8 2 1/2 2 5/8 2 3/4 2 7/8 3 3/4 4 4 1/4 4 1/2 2 1/8 2 1/4 2 3/8 2 1/2 2 5/8 2 3/4 2 7/8 3 3/4 4 4 1/4 4 1/2 2 1/8 2 1/4 2 3/8 2 1/2 2 5/8 2 3/4 2 7/8 3 3/4 4 4 1/4 4 1/2 2 5/8 2 3/4 2 7/8 3 3 1/8 3 1/4 3 3/8 4 1/2 4 3/4 5 5 1/4 0.19 0.33

NCQ8

8 2-3/4 2-7/8 3 3-1/4 3-1/2 3-3/4 4 4-1/2 5 5-1/2 6 1/4-20UNC -2-1/2 2-5/8 2-3/4 2-7/8 3 3-1/8 3-1/4 3-1/2 3-3/4 4 4-1/4 4-3/4 5-1/4 5-3/4 6-1/4 1-3/4 1-7/8 2 2-1/8 2-1/4 2-3/8 2-1/2 2-3/4 3 3-1/4 3-1/2 4 4-1/2 5 5-1/2 1-3/4 1-7/8 2 2-1/8 2-1/4 2-3/8 2-1/2 2-3/4 3 3-1/4 3-1/2 4 4-1/2 5 5-1/2 2-1/8 2-1/4 2-3/8 2-1/2 2-5/8 2-3/4 2-7/8 3-1/8 3-3/8 3-5/8 3-7/8 4-3/8 4-7/8 5-3/8 5-7/8 2-1/8 2-

XMD/XYD Series

1A S Valve seal Assy (4) Specific XLD40-2-9-1A ** XLD50-2-9-1A ** XLD63-2-9-1A ** XLD80-2-9-1A ** Standard AS568-009V AS568-016V AS568-016V Initial pumping valve seal (5).

XMH/XYH Series

Contents Safety Instructions 2 1. Product Specific Precautions 1 4 (Precautions on Design, Selection, Mounting, Piping, Maintenance) 2. Product Specific Precautions 2 5 (Maintenance parts) 3. Specifications 6 4. Construction / Operation 7 5. Dimensions 8 6.

1

13.6 10.6 BUS IN 56.6 E 3/5 2 B 2 E 3/5 E 3/5 2 B B 2 B 2 B 2 B 2 40.2 PWR PWR 4 A 4 21.6 4 A 4 A 4 A 4 A 4 A 18 46.5 (17.8) 46.5 (7.5) (11.8) P = 10.5 (Pitch) 15.5 Note 1) These figures show the SS5Y3-10SQA-05D-C6.

Table of Contents

Single unit 1/8 to 3/4 2, 3, 4, 5, 7, 10 0 to 2 (1) 17-2-36 VV2CL2/3/4 N.C. Manifold 2, 3, 4, 5, 7 1/8, 1/4, (3/8) 17-2-42 VCS20/30/40 Single unit N.C. 2, 3, 4, 5, 7, 10 1/8 to 3/4 0 to 1 (1) 17-2-46 VV2CS2/3/4 N.C. Manifold 2, 3, 4, 5, 7 1/8, 1/4, (3/8) 2 port Direct operated 2, 3, 4, 5, 7, (10) (2) 17-2-52 VCW20/30/40 Single unit N.C.

Table of Contents

4 !5 !7 !8 !9 @0 @8 #4 $2 $3 $9 %2 ^0 ^7 Qty. 1 1 1 1 2 2 2 2 2 4 2 1 1 2 2 4 2 2 6 4 8 2 6 2 1 2 4 4 3 4 4 1 1 4 1 4 2 1 1 1 2 2 1 1 1 2 1 1 1 8 4 2 1 6 No. q w e r t y u i o !0 !1 !2 !3 !

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2 1-3/16 1-1/4 1-7/16 1-3/4 1-7/8 2 2-1/4 2-1/2 10 1-3/8 1-7/16 1-5/8 1-7/8 2 2-1/8 2-7/16 2-3/4 15 1-1/16 1-3/4 1-7/8 2-1/8 2-1/4 2-3/8 2-11/16 3 20 2 2 2-1/8 2-3/8 2-1/2 2-5/8 2-7/8 3-1/4 30 2-3/8 2-7/16 2-1/2 2-3/4 2-3/4 2-7/8 3-1/4 3-1/2 40 2-3/4 2-3/4 2-7/8 3 3 3-1/4 3-1/2 3-3/4 50 3-1/8 3-1/8 3-1/4 3-3/8 3-1/2 3-1/2 3-3/4 4 75 3-3/4 3-3/4 3-7/8 4 4 4-1/8 4-3/8 4-1/2 100 4-3/8 4-3/8