E-P HYREG ® Series VY1 1

20 1 3 3 3 A mA mA mA Command signal Command signal Command signal VY11300 1 VY1400 1 VY1500 1 1 1 1 0.8 0.8 0.8 A port pressure (MPa) A port pressure (MPa) A port pressure (MPa) 0.6 0.6 0.6 0.4 0.4 0.4 0.2 0.2 0.2 VY130-5 VY140-5 VY150-5 0 1 2 3 4 5 0 1 2 3 4 5 0 1 2 3 4 5 V V V VY130-6 VY140-6 VY150-6 1 1 1 0 2.5 5 7.5 10 0 2.5 5 7.5 10 0 2.5 5 7.5 10 V V V VY130-7 VY140-7 VY150-7 2 2

VEX-OMY0001

NXT013-3 VO307K-1 2) 3) VEX322 VEX342 Rc A 1/8 1/4 F G VVEX2 VVEX4 B 1/4 3/8 N NPT ( ) VEX1-17 VEX4-5 C 1/2 T NPTF 11 No.VEX-OMY0001 (2) () 3 2(A) 23(P2) 12(P1) a,b 12(P1),23(P2) (2) a 12(P1) 1(P)2(A)3 3(R) 3(R) b 23(P2) 2(A) 2(A)3(R)1 1(P) 1(P) 12(P1) 1 2 3 23(P2) 4 5 6 7 8 POM 9 -12No.VEX-OMY0001 () () 3(R) 2(A) 1(P) 1(P) 2(A) 3(R) () a b P1P2 2(A) 1(P)

Table of Contents

6/Rc 1 8 6/Rc 1 8 ZH07B ZH10B ZH13B ZH05D ZH07D ZH10D ZH13D ZH15D ZH18D ZH20D 12/Rc 3 8 Body ported type (Without silencer) 8/Rc 1 8 10/Rc 1 4 6/Rc 1 8 6/Rc 1 8 6/Rc 1 8 6/Rc 1 8 6/Rc 1 8 8/Rc 1 8 8/Rc 1 8 10/Rc 1 4 10/Rc 1 4 3 8 12/Rc 10/Rc 1 4 12/Rc 3 8 12/Rc 3 8 16/Rc 1 2 16/Rc 1 2 13-5-2 3 Series ZH Vacuum Ejector: Box Type (Built-in Silencer)/Body Ported Type Ejector JIS Symbol Body

LEC-OM02704CN

) 255 2000 2000 80 80 0 0 RS-422 USB CN 6 CN 1 CN3 CN5 DI/O ON USB CC-Link RS-422 1.

Vacuum System Peripherals:

8, R 10, R 10, R 10, R 6 8 10 4 6 KM11 6, 10 One-touch fitting One-touch fitting 1 4 3 8 KM12 6, 10 One-touch fitting Rc KM13 3 One-touch fitting One-touch fitting KM11 1 8 1 4 3 8 1 8 1 4 3 8 1 4 3 8 1 4 One-touch fitting R male thread KM12 KM14 3 One-touch fitting KM15 KM15 3 One-touch fitting One-touch fitting rod KM16 KM14 KM16 One-touch fitting 3 One-touch fitting KM13 Miniature fittings

ZX

VJ10-20-4A-6 2 pcs. Ordering example) ZX1051-K15LOECN 1 pc. VJ10-20-4A-6 2 pcs. ZS-10-5A-50 1 pc. (For 110 VAC) 3A 36 VJ10 6 Ejector System/Recommended Model (The models below will have shorter deliveries.)

1

AXT100-FC26-1 1.5 m AXT100-FC20-1 AXT100-FC10-1 AXT100-FC26-2 3 m AXT100-FC20-2 AXT100-FC10-2 AXT100-FC26-3 5 m AXT100-FC20-3 AXT100-FC10-3 Specified Layout COM. COM. 25 26 23 24 COM. COM. 21 22 19 20 19 20 19 20 17 18 17 18 17 18 15 16 15 16 15 16 COM. COM. 13 14 13 14 13 14 11 12 11 12 11 12 9 10 9 10 9 10 9 10 7 8 7 8 7 8 7 8 5 6 5 6 5 6 5 6 3 4 3 4 3 4 3 4 1 2 1 2 1 2 1 2 COM. COM.

IDX-OM-W035

. 3-1 3-3 . 3-2 3-4 . 3-2 3-5 . 3-2 3-6 . 3-2 4 4-1 . 4-1 4-2 . 4-1 4-2-1 . 4-1 4-2-2 . 4-1 4-2-3 . 4-1 5 5-1 . 5-1 5-2 (IDFB55E,75E) . 5-3 -1 6 6-1 . 6-1 6-2 GWP . 6-1 6-3 . 6-2 6-4 . 6-3 6-5 . 6-4 7 K 7-1 . 7-1 7-2 . 7-1 8 L 8-1 . 8-1 8-2 . 8-1 8-3 . 8-2 8-4 . 8-2 9 R 9-1 . 9-1 9-2 . 9-1 9-3 . 9-1 9-4 . 9-3 9-5 . 9-3 10 S 10-1 . 10-1 10-2 . 10-1

CATALOG

5/16-24 2 1/2 0.3 1.26 1.06 1 3/8 2.09 2.40 6 9/16 1 3/8 2 11/16 1 3 5/8 6 6 1 3/4 3/8 1/8 3/4-16 9/16 1/2 7/8 3/8 1 1/8 1 5/8 1 1/8 5/16-24 3 1 3/8 6 11/16 250 (2.5) 3.1 1.5 0 1.3 1.06 2.13 2.48 1 3 1/8 3 3/4 3/8 1 6 1/8 6 1/8 2 1/4 3/8 1/8 3/4-16 9/16 1/2 7/8 3/8 1 5/8 115/16 1 1/2 1 1/4 3/8-24 3 3/4 1 5/8 7 7/8 325 (3.25) 3.9 2 0 1.57 1.18 2.59 2.72 1 3/8 3 13/16 4 1/4 1/2 1 1/4 7 3/8

Table of Contents

(A contact) 1 2 1 pc. 2 pcs. 6 6 pcs.

Electric Actuator with Integrated Guide

rail T-slot dimensions) Body mounting reference plane1 17.5 Pitch = 100 60 (n1-1) x pitch 47.5 Section AA n1 100 200 300 400 500 600 n2 1 1 1 1 2 2 Stroke Model LTF6EPF100K--X10 LTF6EPF200K--X10 LTF6EPF300K--X10 LTF6EPF400K--X10 LTF6EPF500K--X10 LTF6EPF600K--X10 2 3 4 5 6 7 1.

ZR

ZR1--CN . 1 pc.

Dedicated Controller

OFF SUP 1MC 5Ry SGDE servomotor Motor 1MC 1 R U V SGDE servo pack 2 1MC M T 3 W 1CN 4 150 PULS PULS SIGN SIGN CLR CLR 1 2 3 4 5 6 Be sure to ground.

IDX-OM-W093

1 4.1 . 4-1 4.2 . 4-1 4.3 . 4-2 4.4 . 4-2 4.5 . 4-2 4.6 . 4-2 5 . 5-1 5.1 . 5-1 5.2 . 5-2 5.2.1 . 5-2 5.2.2 . 5-2 6 . 6-1 6.1 . 6-1 6.2 . 6-4 IDF60/70/80/90 Series IDX-OM-W093 7 . 7-1 7.1 . 7-1 7.2 GWP . 7-2 7.3 . 7-3 7.4 . 7-4 7.5 . 7-6 8 A . 8-1 8.1 . 8-1 8.2 . 8-1 8.3 . 8-1 8.4 . 8-1 8.5 . 8-2 9 C . 9-1 9.1 . 9-1 9.2 . 9-1 10 L . 10-1 10.1 . 10-1 10.2

A

5/16-24 2 1/2 0.3 1.26 1.06 1 3/8 2.09 2.40 6 9/16 1 3/8 2 11/16 1 3 5/8 6 6 1 3/4 3/8 1/8 3/4-16 9/16 1/2 7/8 3/8 1 1/8 1 5/8 1 1/8 5/16-24 3 1 3/8 6 11/16 250 (2.5) 3.1 1.5 0 1.3 1.06 2.13 2.48 1 3 1/8 3 3/4 3/8 1 6 1/8 6 1/8 2 1/4 3/8 1/8 3/4-16 9/16 1/2 7/8 3/8 1 5/8 115/16 1 1/2 1 1/4 3/8-24 3 3/4 1 5/8 7 7/8 325 (3.25) 3.9 2 0 1.57 1.18 2.59 2.72 1 3/8 3 13/16 4 1/4 1/2 1 1/4 7 3/8

Electric Actuators

(A contact) 1 2 1 pc. 2 pcs. 6 6 pcs.

Table of Contents

1 !2 !3 !4 !5 !6 !7 No. q w e r t y u i o !

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

1 !2 !3 !4 !5 !6 !7 No. q w e r t y u i o !

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

1 !2 !3 !4 !5 !6 !7 No. q w e r t y u i o !

CRB2/CRBU2/CRB1

Shaft type W1 = J K T J K T J K T J K T Size L1 = L3 = 50 11.5 to 39.5 1 to 6 Y3 L22 L4 = 50 L12 11.5 to 39.5 1 to 6 X3 L2 = 63 12.5 to 45 Y = Y3 L22 1 to 7.5 63 L12 1 to 7.5 12.5 to 45 X3 80 13.5 to 53.5 Y3 L22 1 to 8.5 80 L12 1 to 8.5 X3 13.5 to 53.5 X = 100 18.5 to 65 Y4 L22 1 to 12.5 W2 100 L12 1 to 12.5 X4 18.5 to 65 (mm) Caution Size Size W1 W2 W1 W2 L1L3 L2L4 L1L3 L2L4 For the shaft