VER2000/4000

Subsonic flow at P1 + 0.1013 < 1.89 (P2 + 0.1013) Q = 226S P (P2 + 0.1013) Sonic flow of P1 + 0.1013 1.89 (P2 + 0.1013) Q = 113S (P1 + 0.1013) Q: Air flow rate [l/min (ANR)] S: Effective area [mm2] P: Amount of pressure drop P1 P2 [MPa] P1: Upstream pressure [MPa] P2: Downstream pressure [MPa] Cylinder stroke (st/mm) Applicable area Unapplicable area Outlet pressure (MPa) Outlet pressure

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w No. q w e r t y u i o !

VQ7-6/7-8

How to Find the Flow Rate (at air temperature of 20C) Subsonic flow when P1 + 0.1013 < 1.89 (P2 + 0.1013) Q = 226S P(P2 + 0.1013) Sonic flow when P1 + 0.1013 1.89 (P2 + 0.1013) Q = 113S (P1 + 0.1013) Q: Air flow rate [l/min (ANR)] S: Effective area (mm) P: Differential pressure (P1-P2) [MPa] P1: Upstream pressure [MPa] P2: Downstream pressure [MPa] Correction for different air temperatures

Applicable Tubing: ø 2 Connection Thread: M3, M5 Made to Order (Refer to page 193 for details.) Miniature Fittings M Series

(O.D.) 3.2 4 2 / 1.2 M-32F-2 M-04F-2 17.7 18 13.7 14 7.5 8.5 2.4 2.9 4 0.9 12.7 2.5 q w e r M2 E Component Parts Material C3604 C3604 NBR No. 1 2 3 4 Description Sleeve Body Seal Cassette Note Electroless nickel plated Electroless nickel plated D C POM, Stainless steel 304 Applicable tubing M1 Applicable tubing B A Plug-in Reducer: M-32R-2, M-04R-2 Applicable tubing O.D. / I.D.

Stations: 2 Stations, AB Port: 03R (3/8, Right), Thread: Rc, Control: E (w/Air Release Valve), PR Port: 04U (1/2, Top), PR Thread: Rc, Silencer: None, Voltage: 3 (24VDC)

Stations: 2 Stations, AB Port: 3/8, Right, Thread: Rc, Control: w/Air Release Valve, PR Port: 1/2, Top, PR Thread: Rc, Silencer: None, Voltage: 24VDC

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0 t t r i w e r i u w y e q Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com q VQ7-8-FG-DVQ7-8-FG-D-R !0 !0 t t r i w y e q r i w e q VQ7-8-D-R FHG FJG FIG VQ7-8-DFHG FJG FIG !0 !0 t t r i w y e q r i w e q VQ7-8-FPG-D!

VS7-6

VQC VS7-6-FHG--Q VS7-6-FJG--Q VS7-6-FPG--Q SQ VQ VQ4 VQ5 VQZ VQD VFS VS VS7 VQ7 ( ): In case of direct manual override style. 1.19-5 VS7-6 With Sub-plate/Dimensions VS7-6-FG-SPort size of sub-plate -Q VS7-6-FG-DPort size of sub-plate -Q VS7-6-FHGPort size of sub-plate -Q VS7-6-FJGPort size of sub-plate -Q VS7-6-FPGPort size of sub-plate -Q ( ): In case of direct manual override style. 1.19

Vacuum Ejector Series ZM

ZM131H-K5LZ (-Q) ZM051H-K5LZ-E15 (-Q) ZM131H-K5LZ-E15 (-Q) ZM071H-K5LZ (-Q) ZM131M-K5LZ (-Q) ZM071H-K5LZ-E15 (-Q) ZM131M-K5LZ-E15 (-Q) ZM101H-K5LZ (-Q) ZM101H-K5LZ-E15 (-Q) 987 Series ZM Model Nozzle dia.

VQ7-6/7-8

0 t t r i w e r i u w y e q Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com q VQ7-8-FG-DVQ7-8-FG-D-R !0 !0 t t r i w y e q r i w e q VQ7-8-D-R FHG FJG FIG VQ7-8-DFHG FJG FIG !0 !0 t t r i w y e q r i w e q VQ7-8-FPG-D!

T

Tube TKS q Socket adapter Hook w 2. Rotate the TKS in the arrow direction while pushing it. Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 3. Strip the outer layer until the cut end of the tubing strikes the end surface inside the stripper.

Area: Japan, Asia, Australia, Stations: 7 Stations, AB Port: 04R (1/2, Right), Air Release Valve: w/o Air Release Valve, PR Port: 04D (1/2, Bottom), Silencer: None, Voltage: w/o Air Release Valve, Q: Q (CE Approval)

Area: E (Europe), Stations: 2 Stations, AB Port: 04R (1/2, Right), Air Release Valve: w/o Air Release Valve, PR Port: 04B (1/2, Both Sides), Silencer: None, Voltage: w/o Air Release Valve, Q: Q (CE Approval)

Area: E (Europe), Stations: 2 Stations, AB Port: 04R (1/2, Right), Air Release Valve: w/o Air Release Valve, PR Port: 04U (1/2, Top), Silencer: SB (Silencer Box), Voltage: w/o Air Release Valve, Q: Q (CE Approval)

Stations: 2 Stations, AB Port: 04R (1/2, Right), Thread: Rc, Control: E (w/Air Release Valve), PR Port: 04B (1/2, Both Sides), PR Thread: Rc, Silencer: None, Voltage: 3 (24VDC)

Stations: 2 Stations, AB Port: 04R (1/2, Right), Thread: Rc, Control: None, PR Port: 04B (1/2, Both Sides)

Stations: 2 Stations, AB Port: 04R (1/2, Right), Thread: Rc, Control: None, PR Port: 04D (1/2, Bottom)

Stations: 2 Stations, AB Port: 04R (1/2, Right), Thread: Rc, Control: None, PR Port: 04U (1/2, Top)

Stations: 2 Stations, AB Port: 04R (1/2, Right), Thread: Rc, Control: None, PR Port: 06B (3/4, Both Sides)

Stations: 2 Stations, AB Port: 04R (1/2, Right), Thread: Rc, Control: None, PR Port: 06D (3/4, Bottom)