2

Selection Example: Inlet air pressure 0.5 MPa Selected model IDG30A For the IDG30A 45 L/min [ANR] Model selected IDG50HA For the IDG50HA 38 L/min [ANR] IDG60 For the IDG60 94 L/min [ANR] IDG30A-03B IDG30AM4-03D INDEX 110 Series IDGA/IDG Reduced purge IDGA Series Made to Order 1 Please contact SMC for further details about dimensions, specifications and delivery.

VQ7-6/7-8

5 (R1). 2(B), 4(A) port piping connection Rc1/4 (right side) Rc3/8 (right side) Rc1/4 (left side) Rc3/8 (left side) Rc1/4 (bottom) Rc3/8 (bottom) One-touch fitting 6 (right side) One-touch fitting 8 (right side) One-touch fitting 10 (right side) One-touch fitting 6 (left side) One-touch fitting 8 (left side) One-touch fitting 10 (left side) Mixed 02R 03R 02L 03L 02Y 03Y C6R C8R C10R C6L C8L

Conforming to ISO Standard Solenoid Valve (with M12 Connector) Series EVS7-6/7-8/7-10 (Size 1) (Size 2) (Size 3) 1

03U C10L VFN 03B C12D C12U Size C12B 1 Size 1 VV71 02R 02D 6 6 Manifold VV72 03R 04D Size Rated coil voltage for air release valve 2 Size 2 Thread type Stations None 24 VDC 12 VDC Voltage other than above (50 VDC or less) Nil Rc G NPTF Nil 3 1 station . . . 10 stations 1 . . .

Table of Contents

www.stevenengineering.com Rc 1/4 (Right side) Rc 3/8 (Right side) Rc 1/4 (Left side) Rc 3/8 (Left side) Rc 1/4 (Bottom side) Rc 3/8 (Bottom side) One-touch fitting 6 (Right side) One-touch fitting 8 (Right side) One-touch fitting 10 (Right side) One-touch fitting 6 (Left side) One-touch fitting 8 (Left side) One-touch fitting 10 (Left side) Mixed 02R 03R 02L 03L 02Y 03Y C6R C8R C10R C6L C8L

VQ7-6/7-8

www.stevenengineering.com Rc 1/4 (Right side) Rc 3/8 (Right side) Rc 1/4 (Left side) Rc 3/8 (Left side) Rc 1/4 (Bottom side) Rc 3/8 (Bottom side) One-touch fitting 6 (Right side) One-touch fitting 8 (Right side) One-touch fitting 10 (Right side) One-touch fitting 6 (Left side) One-touch fitting 8 (Left side) One-touch fitting 10 (Left side) Mixed 02R 03R 02L 03L 02Y 03Y C6R C8R C10R C6L C8L

VS7-6

valve Filter with manual drain, regulator, pressure switch, air release valve Filter with auto-drain, regulator (air release valve-blank) Filter with manual drain, regulator (air release valve-blank) Air release valve (filter, regulator-blank) Air release valve C6R C8R One-touch for 6 tube (Right) MP Contact SMC for other voltages (9) C12D Order Made One-touch for 8 tube (Right) C10R C6L C8L

Stations: 2 Stations, AB Port: C8L (One-touch Fitting for ø8 Tube, Left), AB Thread: Rc, Control: None, PR Port: 03B (3/8, Both Sides)

2-Color Display Digital Flow Switch Series PFM

A 4 (5/32") 64.2 18 6 64.6 8 (5/16") 68 OUT1 OUT2 1/4" 64.6 10.2 DC () DC (+) 1 43 IN OUT (34.2) 13 1 IN 3 2 x one-touch fitting 18 2 x 3.4 28 8 2 x 2.6 depth 5 PFM7-C4L/C6L/C8L/N7L 88 (mm) 48 One-touch fitting Applicable tube O.D.

PFxx-OMJ0005CN

/N7L 2 -68No.PF-OMJ0005CN-I PFM7S-C4/C6/C8/N7 2 -69No.PF-OMJ0005CN-I PFM7S-C4L/C6L/C8L/N7L 2 -70No.PF-OMJ0005CN-I A 54 +0.5 0 74 +0.5 0 1 2R R3 313.2 mm (ZS-33-M) (ZS-33-MS) -71No.PF-OMJ0005CN-I (ZS-33-D (ZS-33-F) -72No.PF-OMJ0005CN-I INOUT X693 IN OUT X694 IN OUT 10 PFM7-C4/C6/C8/N7--X693 PFM7S-C4/C6/C8/N7--X693 A B A B C4 4(5/32) 10.1 8.1 C4 4(5/32) 10.1 8.1 C6 6 10.3 8.3 C6 6

Digital Flow Switch

-80No.PF-OMO0005-F PFMB7201S-C8 -81No.PF-OMO0005-F PFMB7201S-C8L -82No.PF-OMO0005-F Connector cover (ZS-33-F) Attached the connector cover Panel cut-out dimensions Flow adjustment valve A None 54 0.5 0 With flow adjustment valve 74 0.5 0 : Suitable for panel thickness of 1 to 3.2 mm. 1: These are the minimum dimensions for bottom entry piping type.

PFxx-OMO0004CN

2x -80No.PF-OMO0004CN-E PFMB7201S-C8 2x -81No.PF-OMO0004CN-E PFMB7201S-C8L 2x -82No.PF-OMO0004CN-E (ZS-33-F) A 54 +0.5 0 74 +0.5 0 13.2 mm 1, -83No.PF-OMO0004CN-E (ZS-33-M) (ZS-33-MS) (ZS-33-D) -84No.PF-OMO0004CN-E Revision history A B C [2016 9 ] D : [2018 8 ] E : [2019 5 ] 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL https://

New New 2-Color Display Digital Flow Switch ® (200 L type only) Applicable fluid Air, N2 Expanded flow range! Wide range of flow measurement with one product (100: 1) (100: 1) Setting resolution: 1 L/min Flow ratio Flow ratio is 10: 1 for current PF2A

18 G1/4 2 x 3.4 28 8 2 x 2.5 depth 5 PFMB7201-F02L 88 48 18 OUT2 OUT1 10.2 DC () DC (+) 17 43 1 (34.2) 3 1 IN 18 2 x 3.4 IN OUT 2 x Port size G1/4 Width across flats 21 68 28 8 2 x 2.5 depth 5 8 Series PFMB7 Dimensions PFMB7201S-C8 96 76 58 48 18 OUT1 OUT2 10.2 DC () DC (+) 43 1 51.5 (Max. 58.5) IN OUT (34.2) 3 13 1 IN 18 2 x 8 One-touch fitting 2 x 3.4 28 20 8 3 x 2.5 depth 5 PFMB7201S-C8L

Digital Flow Switch (Integrated display type)

/N7L -68No.PF-OMJ0006-J PFM7S-C4/C6/C8/N7 -69No.PF-OMJ0006-J PFM7S-C4L/C6L/C8L/N7L -70No.PF-OMJ0006-J Panel cut-out dimensions Flow adjustment valve A None 54 +0.5 0 With flow adjustment valve 74 +0.5 0 1: Piping entry direction: These are the minimum dimensions for bottom entry piping.

Stations: 2 Stations, AB Port: One-touch Fitting for ø8 Tube, Left, AB Thread: Rc, Control: None, PR Port: 3/8, Both Sides, PR Thread: -, Silencer: -, Voltage: -

Stations: 6 Stations, AB Port: C8R (One-touch Fitting for ø8 Tube, Right), AB Thread: Rc, Control: None, PR Port: 03B (3/8, Both Sides)

Stations: 6 Stations, AB Port: 02L (1/4, Left), AB Thread: Rc, Control: None, PR Port: 03B (3/8, Both Sides)

Stations: 6 Stations, AB Port: 02R (1/4, Right), AB Thread: Rc, Control: None, PR Port: 03B (3/8, Both Sides)

Stations: 6 Stations, AB Port: 02Y (1/4, Bottom), AB Thread: Rc, Control: None, PR Port: 03B (3/8, Both Sides)

Stations: 6 Stations, AB Port: 03L (3/8, Left), AB Thread: Rc, Control: None, PR Port: 03B (3/8, Both Sides)

Stations: 6 Stations, AB Port: 03R (3/8, Right), AB Thread: Rc, Control: None, PR Port: 03B (3/8, Both Sides)