VQ7-6/7-8

www.stevenengineering.com Rc 1/4 (Right side) Rc 3/8 (Right side) Rc 1/4 (Left side) Rc 3/8 (Left side) Rc 1/4 (Bottom side) Rc 3/8 (Bottom side) One-touch fitting 6 (Right side) One-touch fitting 8 (Right side) One-touch fitting 10 (Right side) One-touch fitting 6 (Left side) One-touch fitting 8 (Left side) One-touch fitting 10 (Left side) Mixed 02R 03R 02L 03L 02Y 03Y C6R C8R C10R C6L C8L

VS7-6

One-touch for 10 tube (Right) F C12U Protective class class I (Mark: ) One-touch for 6 tube (Left) One-touch fitting for 12 tube (Both sides) Combination One-touch for 8 tube (Left) G C12B C10L One-touch for 10 tube (Left) Combination Note) Manifold exploded view see page 1.19-33 for details C E Please provide piping specifications.

2-Color Display Digital Flow Switch Series PFM

A 4 (5/32") 64.2 18 6 64.6 8 (5/16") 68 OUT1 OUT2 1/4" 64.6 10.2 DC () DC (+) 1 43 IN OUT (34.2) 13 1 IN 3 2 x one-touch fitting 18 2 x 3.4 28 8 2 x 2.6 depth 5 PFM7-C4L/C6L/C8L/N7L 88 (mm) 48 One-touch fitting Applicable tube O.D.

PFxx-OMJ0005CN

/N7L 2 -68No.PF-OMJ0005CN-I PFM7S-C4/C6/C8/N7 2 -69No.PF-OMJ0005CN-I PFM7S-C4L/C6L/C8L/N7L 2 -70No.PF-OMJ0005CN-I A 54 +0.5 0 74 +0.5 0 1 2R R3 313.2 mm (ZS-33-M) (ZS-33-MS) -71No.PF-OMJ0005CN-I (ZS-33-D (ZS-33-F) -72No.PF-OMJ0005CN-I INOUT X693 IN OUT X694 IN OUT 10 PFM7-C4/C6/C8/N7--X693 PFM7S-C4/C6/C8/N7--X693 A B A B C4 4(5/32) 10.1 8.1 C4 4(5/32) 10.1 8.1 C6 6 10.3 8.3 C6 6

Digital Flow Switch

-80No.PF-OMO0005-F PFMB7201S-C8 -81No.PF-OMO0005-F PFMB7201S-C8L -82No.PF-OMO0005-F Connector cover (ZS-33-F) Attached the connector cover Panel cut-out dimensions Flow adjustment valve A None 54 0.5 0 With flow adjustment valve 74 0.5 0 : Suitable for panel thickness of 1 to 3.2 mm. 1: These are the minimum dimensions for bottom entry piping type.

PFxx-OMO0004CN

2x -80No.PF-OMO0004CN-E PFMB7201S-C8 2x -81No.PF-OMO0004CN-E PFMB7201S-C8L 2x -82No.PF-OMO0004CN-E (ZS-33-F) A 54 +0.5 0 74 +0.5 0 13.2 mm 1, -83No.PF-OMO0004CN-E (ZS-33-M) (ZS-33-MS) (ZS-33-D) -84No.PF-OMO0004CN-E Revision history A B C [2016 9 ] D : [2018 8 ] E : [2019 5 ] 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL https://

2

New Products Guide 2 Air Preparation Equipment, Modular F. R. L., Air Tanks Fittings and Tubing Flow Control Equipment, Exhaust Filters Switches/Sensors Process Valves High Vacuum Equipment Temperature Control Equipment Pneumatic Instrumentation Process Gas Equipment Equipment CAT.E00-7A INDEX New Products Guide 2 Air Preparation Equipment/ Modular F. R. L./Air Tanks Refrigerated Air Dryer

New New 2-Color Display Digital Flow Switch ® (200 L type only) Applicable fluid Air, N2 Expanded flow range! Wide range of flow measurement with one product (100: 1) (100: 1) Setting resolution: 1 L/min Flow ratio Flow ratio is 10: 1 for current PF2A

18 G1/4 2 x 3.4 28 8 2 x 2.5 depth 5 PFMB7201-F02L 88 48 18 OUT2 OUT1 10.2 DC () DC (+) 17 43 1 (34.2) 3 1 IN 18 2 x 3.4 IN OUT 2 x Port size G1/4 Width across flats 21 68 28 8 2 x 2.5 depth 5 8 Series PFMB7 Dimensions PFMB7201S-C8 96 76 58 48 18 OUT1 OUT2 10.2 DC () DC (+) 43 1 51.5 (Max. 58.5) IN OUT (34.2) 3 13 1 IN 18 2 x 8 One-touch fitting 2 x 3.4 28 20 8 3 x 2.5 depth 5 PFMB7201S-C8L

Digital Flow Switch (Integrated display type)

/N7L -68No.PF-OMJ0006-J PFM7S-C4/C6/C8/N7 -69No.PF-OMJ0006-J PFM7S-C4L/C6L/C8L/N7L -70No.PF-OMJ0006-J Panel cut-out dimensions Flow adjustment valve A None 54 +0.5 0 With flow adjustment valve 74 +0.5 0 1: Piping entry direction: These are the minimum dimensions for bottom entry piping.

Stations: 4 Stations, AB Port: C6R (One-touch Fitting ø6 Tube, Right), AB Thread: Rc, Control: None, PR Port: C12U (One-touch Fitting ø12, Top), PR Thread: Rc, Silencer: SB (Silencer Box)

Stations: 4 Stations, AB Port: C6L (One-touch Fitting for ø6 Tube, Left), AB Thread: Rc, Control: None, PR Port: C12U (One-touch Fitting ø12, Top), PR Thread: Rc, Silencer: SB (Silencer Box)

Stations: 6 Stations, AB Port: C6R (One-touch Fitting ø6 Tube, Right), AB Thread: Rc, Control: None, PR Port: C12U (One-touch Fitting ø12, Top)

Area: Japan, Asia, Australia, Stations: 9 Stations, AB Port: C6R (One-touch Fitting for ø6 Tube, Right), Control: None, PR Port: C12U (One-touch Fitting for ø12 Tube, Top), Silencer: SB (Silencer Box), Voltage: w/o Air Release Valve, Q: Q (CE Approval)

Stations: 2 Stations, AB Port: C8L (One-touch Fitting for ø8 Tube, Left), AB Thread: Rc, Control: None, PR Port: 03B (3/8, Both Sides)

Stations: 9 Stations, AB Port: C8L (One-touch Fitting for ø8 Tube, Left), AB Thread: Rc, Control: None, PR Port: 03D (3/8, Bottom)

Stations: 4 Stations, AB Port: C8L (One-touch Fitting for ø8 Tube, Left), AB Thread: Rc, Control: None, PR Port: 03D (3/8, Bottom)

Stations: 10 Stations, AB Port: C8L (One-touch Fitting for ø8 Tube, Left), AB Thread: Rc, Control: None, PR Port: 03D (3/8, Bottom)

Stations: 7 Stations, AB Port: C8L (One-touch Fitting for ø8 Tube, Left), AB Thread: Rc, Control: None, PR Port: 03D (3/8, Bottom)

Stations: 6 Stations, AB Port: C8L (One-touch Fitting for ø8 Tube, Left), AB Thread: Rc, Control: None, PR Port: 03B (3/8, Both Sides)

Stations: 6 Stations, AB Port: C8L (One-touch Fitting for ø8 Tube, Left), AB Thread: Rc, Control: None, PR Port: 03B (3/8, Both Sides), PR Thread: T (NPTF)