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5 Port Pilot Operated Solenoid Valve VFS1000/2000/3000/4000/5000/6000 Series

With terminal block With multi-connector With D-sub connector DIN terminal Grommet terminal Plug-in type VV5FS5-01 VFS500-F Rc , Side/ Bottom 2 to 10 Plug-in type with terminal block: 6 stations (Manifold base) VV5FS5-01T-061-04 1 (2 position single) VFS5100-5FZ 3 (2 position double) VFS5200-5FZ 2 (Blanking plate) VVFS5000-10A 1 Rc 3 4 1 2 3 4 Non plug-in type VV5FS5-10 VFS510

Table of Contents

With D-sub connector DIN terminal Grommet terminal Plug-in type VV5FS5-01 VFS500-F Rc , Side/ Bottom 2 to 10 Rc 3 4 1 2 3 4 How to Order Manifold Assembly Non plug-in type VV5FS5-10 VFS510-D VFS510-E Please indicate manifold base type, corresponding valve, and option parts.

CATALOG

32 6 36.5 41.5 10 44 54 8.5 13.5 16 5,10 16 8 5.4 35.5 40.5 5, 10 38 8 39 44 10.5 46 56 9.5 14.5 20 5, 10 20 10 7 36.5 41.5 5, 10 47 7 41 46 11 47.5 57.5 10 15 25 5, 10 25 12 10 37.5 42.5 5, 10 52 12 42.5 47.5 10.5 50 50 12 17 32 5, 10 32 16 13.3 38 43 5, 10 45 13 45 50 11 56.5 66.5 12 17 40 5, 10 40 16 18.3 44.5 41.5 5, 10 52 13 51.5 56.5 10.5 68.5 88.5 18 28 50 10, 20 50 20 17.6 50.5 60.5

VFS

With D-sub connector DIN terminal Grommet terminal Plug-in type VV5FS5-01 VFS500-F Rc , Side/ Bottom 2 to 10 Rc 3 4 1 2 3 4 How to Order Manifold Assembly Non plug-in type VV5FS5-10 VFS510-D VFS510-E Please indicate manifold base type, corresponding valve, and option parts.

Table of Contents

AS321FE AS331FE AS421FE AS431FE Model 8 10 6 8 10 12 12 10 6 8 10 Tubing O.D.

Tamper Proof and Flat Head Screw

Flow Rate and Effective Area AS1001F AS2001F AS3001F AS2051F AS4001F Models Metric sizes 10, 12 8 6 6 6 8 12 10 3.2, 4, 6 4 Tubing O.D.

Tamper Proof Speed Controller with One-touch Fitting Series AS


1F-T Elbow Type/Universal Type 1

2 15-9-102 12 Tamper Proof Dual Speed Controller with One-touch Fitting Dimensions Metric size M1 L3 L2 Applicable tubing O.D. d D1 L6 D2 L1 D4 L4 H (Hexagon width across flats) (Hexagon width across flats) D4 D3 A1 L5 A2 L6 T Metric Size Model H D1 D2 D3 D4 L1 L2 L3 L4 L5 L6 A1 A2 M1 T d 4 6 6 8 6 8 10 6 8 10 12 6 8 10 12 10 12 ASD230F-M5-04T ASD230F-M5-06T ASD330F-01-06ST ASD330F-01-08ST

AS

D2 D3 L1 4.5 L2 L3 L4 M1 Mass (g) Mass (g) AS1001F-01T 1/8" AS1001F-23T 3.2 8.4 38 4.5 26 8 8.4 38 26 8 12.7 12.7 AS1001F-03T 5/32" AS1001F-04T 4 9.3 39.2 5.2 26.6 10 4.5 0.7 9.3 39.2 5.2 26.6 9 9 10 4.5 0.7 AS1001F-05T 3/16" AS1001F-06T 6 11.4 48.7 16.5 11.6 40.7 6.2 27.7 13.5 10 14 6.2 27.7 AS1001F-07T 1/4" AS2001F-04T 4 12 40.7 13.7 9.3 40.7 5.2 31.9 12.7 15 11 11.8 7 1.5 AS2001F-06T

Tamper Proof Speed Controller with One-touch Fitting Series AS


1F-T Elbow Type/Universal Type

4.5 0.7 10 4.5 0.7 AS1001F-05T 3/16" AS1001F-06T 6 18 17 18 17 16.5 17 16.5 12.7 13.7 16.5 22 21 22 21 18 17 18 17 13.5 12.7 13.5 6.2 27.7 AS1001F-07T 1/4" AS2001F-04T 4 17.9 15.2 13.2 15.2 13.2 11.4 13.2 11.4 9.3 12 11.8 7 1.5 AS2001F-06T 6 AS2001F-03T 5/32" 9.5 8.2 7.4 8.1 7.1 6.2 7.1 6.2 5.2 47.2 46 45.2 36.7 35.7 34.9 33.7 32.8 31.9 AS AS2051F-06T 6 AS2001F-05T 3/16" 11.8 7 1.5 14.8

Tamper Proof Speed Controller with One-touch Fitting Elbow Type/Universal Type Series AS  1F-T

Flow Rate and Sonic Conductance AS1001F AS2001F AS3001F AS2051F AS4001F Model Metric size 3.2, 4, 6 4 6 6 8 6 8 10, 12 10 12 Tubing O.D.

Base Mounted Wiring: 01FD (Plug-in w/D-sub Connector on D Side), Stations: 3 Stations, Passage: 1 (P: Common, EA,EB: Common, Port A,B: Side), Port Size: 06 (3/4), Thread: T (NPTF)

Base Mounted Wiring: 01T (Plug-in w/Terminal Block), Stations: 3 Stations, Passage: 1 (P: Common, EA,EB: Common, Port A,B: Side), Port Size: 06 (3/4), Thread: T (NPTF)

Base Mounted Wiring: 01CD (Base Mounted Plug-in w/Multi-connector on D Side), Stations: 3 Stations, Passage: 1 (P: Common, EA,EB: Common, Port A,B: Side), Port Size: 06 (3/4), Thread: T (NPTF)

Base Mounted Wiring: Plug-in w/D-sub Connector on D Side, Stations: 3 Stations, Passage: P: Common, EA,EB: Common, Port A,B: Side, Port Size: 3/4, Thread: NPTF

Base Mounted Wiring: Plug-in w/Terminal Block, Stations: 3 Stations, Passage: P: Common, EA,EB: Common, Port A,B: Side, Port Size: 3/4, Thread: NPTF

Base Mounted Wiring: Base Mounted Plug-in w/Multi-connector on D Side, Stations: 3 Stations, Passage: P: Common, EA,EB: Common, Port A,B: Side, Port Size: 3/4, Thread: NPTF

V

The minimum quantity to order is 10 pieces.

Tamper Proof Speed Controller with One-touch Fitting Series AS


1F-T Elbow Type/Universal Type 1

-02 AS321F AS331F AS421F AS431F Model 3.2, 4, 6 Metric size 3.2, 4 6, 8, 10 4 6 8, 10 6 8 10, 12 10 12 Tubing O.D. 1/8", 5/32" 3/16", 1/4" 1/8" 5/32" 3/16", 1/4" 5/16" 1/4", 5/16" 3/8" 1/4" Inch size 5/32" 3/16" 5/16" 3/8" 3/8" 1/2" Flow rate (l/min (ANR)) 100 180 230 260 390 460 660 790 920 1580 1710 Controlled flow (Free flow) 1.5 2.7 3.5 4 6 7 10 12 14 24 26 Effective area (mm2) Note)