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VV5FS3-01T-061-03-CD VFS3100-5FZ VFS3200-5FZ VVFS3000-10A AMC610-10 1 3 2 1 1 (Manifold base) (2 position single) (2 position double) (Blanking plate) (Exhaust cleaner) VV5FS3-10-061-03-CU VFS3110-5E VFS3210-5E VVFS3000-10A AMC610-10 1 3 2 1 1 For details about exhaust cleaners, refer to Best Pneumatic Vol. 5. 3-8-63 64 Series VFS3000 Plug-in type, Non plug-in type Manifold with Exhaust Cleaner

VFS

VV5FS3-01T-061-03-CD VFS3100-5FZ VFS3200-5FZ VVFS3000-10A AMC610-10 1 3 2 1 1 (Manifold base) (2 position single) (2 position double) (Blanking plate) (Exhaust cleaner) VV5FS3-10-061-03-CU VFS3110-5E VFS3210-5E VVFS3000-10A AMC610-10 1 3 2 1 1 For details about exhaust cleaners, refer to Best Pneumatic Vol. 5. 3-8-63 64 Series VFS3000 Plug-in type, Non plug-in type Manifold with Exhaust Cleaner

5 Port Pilot Operated Solenoid Valve VFS1000/2000/3000/4000/5000/6000 Series

(Manifold base) (2 position single) Option VV5FS3-10-061-03-A VFS3110-5D 1 4 The asterisk denotes the symbol for assembly.

Compact Cylinder

Bore size (mm) YA 03 D E F M T1 T2 B Applicable air cylinder bore size YA-03 YA-05 YA-08 YA-10 32, 40 50, 63 80 100 18 6.8 16 6 42 6.5 10 20 9 20 8 50 6.5 12 03 05 08 10 For 32, 40 For 50, 63 For 80 For 100 26 11 25 10 62 8.5 16 31 14 30 12 76 10.5 18 Part no.

NCQ2/CQ2

F B E YA 03 Applicable air cylinder bore size Material: Chromium molybdenum steel (Nickel plated) (mm) Bore size (mm) 03 05 08 10 For 32, 40 For 50, 63 For 80 For 100 B D E F M T1 T2 Part no. 32, 40 50, 63 80 100 YA-03 YA-05 YA-08 YA-10 18 6.8 16 42 6.5 10 6 20 9 20 50 6.5 12 8 Mounting bracket 26 11 25 62 8.5 16 10 YA YB YU 31 14 30 76 10.5 18 12 Type A mounting bracket Type B mounting bracket

1

101 6 1.5 8 8 17 21 35 D-A9lV 10 2 9 9 16.5 28.5 40.5 16 2.5 8.5 8.5 17 29 41 47 71 89 101 6 1 7.5 16.5 20.5 34.5 D-H7l/H7C D-H7lW/H7BA D-H7NF 10 1.5 8.5 16 28 40 16 2 8 16.5 28.5 40.5 46.5 70.5 88.5 100.5 6 2 8.5 17.5 21.5 35.5 D-C7l/C80 D-C73C D-C80C 10 2.5 9.5 17 29 41 16 3 9 17.5 29.5 41.5 47.5 71.5 89.5 101.5 D-M9l D-M9lW/M9lWV D-M9lA/M9lAV 10 4.5 11.5 19 31 43 16 5 11 19.5

CRB2/CRBU2/CRB1

P211070-10 P211090-10 P211060-10 P211080-10 P211010-10 P211070-10 P211090-10 P211060-10 P211080-10 P211010-10 Model CDRB2BWU10 CDRB2BWU15 CDRB2BWU20 CDRB2BWU30 CDRB2BWU40 CDRBU2WU10 CDRBU2WU15 CDRBU2WU20 CDRBU2WU30 CDRBU2WU40 CDRB1BW50 Series CRB1 Single/Double type CDRB1BW63, 80, 100 Series CRB2 Solid state switch for size 10 and 15 requires no switch block, therefore the unit part no.

Electric Actuator

to 500 10 LEFS16 100 to 400 10 4 5 to 250 5 Series LECP6 20 7.5 12 to 500 12 LEFS25 100 to 600 20 15 6 to 250 6 Step motor Series LECP1 (Servo/24 VDC) 40 10 16 to 500 16 Ball screw drive LEFS32 100 to 800 45 20 8 to 250 8 Series LECPA o0.02 Page 2 50 20 to 500 20 LEFS40 200 to 1000 Clean room compatible 60 23 10 to 250 10 7 2 10 to 500 10 LEFS16A 100 to 400 10 4 5 to 250 5 Servo motor (

Rotary Actuator

$Applicable shaft type: W $Applicable shaft type: W (mm) Y L2 Size (mm) 10 X L1 Size 3 to 8 5-( 8-Y) to (Y-1) 15 10 3 to 9 6-( 9-Y) to (Y-1.5) 9-(14-X) to (X-3) 5 to 14 Y = L1 = 20 15 3 to 10 7-(10-Y) to (Y-1.5) 10-(18-X) to (X-4) 8 to 18 L2 = 30 20 5 to 13 8-(13-Y) to (Y-2) 10-(20-X) to (X-4.5) 10 to 20 X = 40 30 7 to 15 9-(15-Y) to (Y-2) 12-(22-X) to (X-5) 10 to 22 Symbol: A11 The long

Modular Design with Uniform Body Style

70 0.01 2 40 6000 100 40 0.1 3 90 1000 20 1 4 10 +3 5 5 10 +7 6 0 < Cp 5 +10 7 5 < Cp 10 Cw 0.5 8 0.5 < Cw 5 9 5 < Cw 10 x Cp > 10 Cw > 10 > 5 [How to Perform a Test to Check the Performance] ISO 12500, which sets out the test method to be used in order to check the filter performance for each of the three kinds of contaminants, is indicated below.

LEC-OM02904

C 1. ##0016 ## 00 01 1 02 2 03 3 04 4 05 5 06 6 07 7 08 8 09 9 10 10 11 11 12 12 13 13 14 14 15 15 16 16 2. **No. 3.

Table of Contents

P211070-10 P211090-10 P211060-10 P211080-10 P211010-10 P211070-10 P211090-10 P211060-10 P211080-10 P211010-10 CDRB1BW50 Series CRB1 Series CRB2 Single/Double type CDRB1BW63, 80, 100 Solid state switch for size 10 and 15 requires no switch block, therefore the unit part no. will be P611070-13.

Title not found

Stop KLH-105 Timer 1-10 sec.

Title not found

Stop KLH-105 Timer 1-10 sec.

Step Motor Controller

7 6 9 8 11 10 3 Connector B terminal no.

Base Mounted Wiring: 10 (Base Mounted Non Plug-in Individual Lead Wire Entry), Stations: 10 Stations, Passage: 1 [P and EA,EB: Common, Port A,B: Side (Type 31, Port A,B: Top)], Port Size: 03 (3/8)

Base Mounted Wiring: Base Mounted Non Plug-in Individual Lead Wire Entry, Stations: 10 Stations, Passage: 1 [P and EA,EB: Common, Port A,B: Side (Type 31, Port A,B: Top)], Port Size: 3/8, Thread: -, Control Unit: -, Release Valve Rated Voltage: -

Rotary Actuator/Vane Type

Weight [g] Vane type Single vane Double vane Size 10 15 20 30 40 10 15 20 30 40 Rotating angle 90 180 270 90 180 270 90 180 270 90 180 270 90 180 270 90 100 90 100 90 100 90 100 90 100 Rotary actuator body 27 26 26 48 47 46 104 103 101 199 194 189 385 374 363 42 43 55 58 119 142 219 239 398 444 Flange assembly 9 10 19 25 9 10 19 25 Auto switch unit 15 20 28 38 43 15 20 28 38 43 Angle adjuster