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Table of Contents

(Manifold base) (2 position single) VV5FS3-01T-081-03-AP5 VFS3100-5FZ VFS3200-5FZ 1 4 2 1 4 Nil N Rc NPT NPTF G Rc Rc Rc M Mixed 3 8 1 2 T F VV5FS3-10-061-03-A VFS3110-5D 1 4 Option 3-8-65 66 Series VFS3000 Plug-in type, Non plug-in type Manifold with Control Plug-in type: VV5FS3-01T1-AP Station Port size Voltage for release valve Example for manifold Individual EXH spacer (VVFS3000-R-03

VFS

(Manifold base) (2 position single) VV5FS3-01T-081-03-AP5 VFS3100-5FZ VFS3200-5FZ 1 4 2 1 4 Nil N Rc NPT NPTF G Rc Rc Rc M Mixed 3 8 1 2 T F VV5FS3-10-061-03-A VFS3110-5D 1 4 Option 3-8-65 66 Series VFS3000 Plug-in type, Non plug-in type Manifold with Control Plug-in type: VV5FS3-01T1-AP Station Port size Voltage for release valve Example for manifold Individual EXH spacer (VVFS3000-R-03

5 Port Pilot Operated Solenoid Valve VFS1000/2000/3000/4000/5000/6000 Series

(Manifold base) (2 position single) Option VV5FS3-10-061-03-A VFS3110-5D 1 4 The asterisk denotes the symbol for assembly.

5 Port Solenoid Valve Series VFR2000/3000/4000/5000/6000

-01T-081-03-AP5 1 set (Manifold base part no.)

VFR

-01T-081-03-AP5 1 set (Manifold base part no.)

Series AP500

to 1.0 MPa) Operating Parameters Delivery pressure Gas Source pressure Proof pressure (Inlet) Burst pressure Ambient and operating temperature Cv Vacuum to 3500 psig (24.1 MPa) 1) Vacuum to 300 psig (2.1MPa) 5000 psig (34.5 MPa) 10 psig (69 MPa) 40 to 160F (40 to 71C) (No freezing) 2) 0.09 2 x 10-11 Pam3/sec 2 x 10-10 Pam3/sec 3) 4 x 10-9 Pam3/sec 4) Ra max 15 in. (0.4 m) Option: 10 in.

Base Mounted Wiring: 10 (Base Mounted Non Plug-in Individual Lead Wire Entry), Stations: 10 Stations, Passage: 1 [P and EA,EB: Common, Port A,B: Side (Type 31, Port A,B: Top)], Port Size: 03 (3/8)

Base Mounted Wiring: Base Mounted Non Plug-in Individual Lead Wire Entry, Stations: 10 Stations, Passage: 1 [P and EA,EB: Common, Port A,B: Side (Type 31, Port A,B: Top)], Port Size: 3/8, Thread: -, Control Unit: -, Release Valve Rated Voltage: -

Base Mounted Wiring: 10 (Base Mounted Non Plug-in Individual Lead Wire Entry), Stations: 7 Stations, Passage: 1 [P and EA,EB: Common, Port A,B: Side (Type 31, Port A,B: Top)], Port Size: 03 (3/8), Thread: Rc, Control Unit: AP (Air Filter w/Auto Drain, Regulator, Air Release Valve,Pressure Switch), Release Valve Rated Voltage: 5 (24VDC)

Base Mounted Wiring: Base Mounted Non Plug-in Individual Lead Wire Entry, Stations: 7 Stations, Passage: 1 [P and EA,EB: Common, Port A,B: Side (Type 31, Port A,B: Top)], Port Size: 3/8, Thread: Rc, Control Unit: Air Filter w/Auto Drain, Regulator, Air Release Valve,Pressure Switch, Release Valve Rated Voltage: 24VDC

Base Mounted Wiring: 10 (Base Mounted Non Plug-in Individual Lead Wire Entry), Stations: 10 Stations, Passage: 1 [P and EA,EB: Common, Port A,B: Side (Type 31, Port A,B: Top)], Port Size: 03 (3/8), Thread: Rc, Control Unit: C (Air Release Valve, Blank Plate for Filter Regulator), Release Valve Rated Voltage: 5 (24VDC)

Base Mounted Wiring: Base Mounted Non Plug-in Individual Lead Wire Entry, Stations: 10 Stations, Passage: 1 [P and EA,EB: Common, Port A,B: Side (Type 31, Port A,B: Top)], Port Size: 3/8, Thread: Rc, Control Unit: Air Release Valve, Blank Plate for Filter Regulator, Release Valve Rated Voltage: 24VDC

1

101 6 1.5 8 8 17 21 35 D-A9lV 10 2 9 9 16.5 28.5 40.5 16 2.5 8.5 8.5 17 29 41 47 71 89 101 6 1 7.5 16.5 20.5 34.5 D-H7l/H7C D-H7lW/H7BA D-H7NF 10 1.5 8.5 16 28 40 16 2 8 16.5 28.5 40.5 46.5 70.5 88.5 100.5 6 2 8.5 17.5 21.5 35.5 D-C7l/C80 D-C73C D-C80C 10 2.5 9.5 17 29 41 16 3 9 17.5 29.5 41.5 47.5 71.5 89.5 101.5 D-M9l D-M9lW/M9lWV D-M9lA/M9lAV 10 4.5 11.5 19 31 43 16 5 11 19.5

Table of Contents

(6A) VX2320-03 VX2120-01 VX2230-03 VX2130-01 0.61 4.5 2.3 0.46 0.61 15.0 VX2330-03 VX2110-02 3 8 (10A) 3.0 VX2240-03 VX2120-02 1.10 6 4.1 0.3 1.1 26.0 VX2340-03 VX2220-02 0.33 7.9 3 0.45 0.33 3.0 VX2250-03 VX2320-02 1.60 8 6.4 0.3 1.6 38.0 VX2350-03 VX2130-02 VX2230-02 VX2360-03 1.0 0.61 15.0 53.0 2.20 4.5 10 11 0.3 2.2 0.46 0.61 2.3 1 4 (8A) VX2330-02 1 2 (15A) VX2360-04 10 11 0.3 2.2 53.0

CATALOG

KM12-06-02-6 6 99 47 84 6 14 17 10 19.5 31.5 21.5 31 13 13.5 17 7.5 KM12-06-02-10 10 125 73 96 KM12-08-03-6 6 108 55 100 8 38 19 11.5 22.5 35.5 24 34.5 15.5 14.7 18.5 9 KM12-08-03-10 10 139 86 117 L5 T N H L3 L4 L6 P Q1 Q2 M L1 F L2 B Port Min Weight Model NPT Hex Inside Dia (g) (Inch Size) 19.5 6 16 16 18 29.5 29 40 12 1/4 87 5/32 10 6 67 KM12-03-35-6 19.5 10 16 16 18 29.5 29 61.5 12 1/

2

, 03, 04, 06, 07 06, 07, 08, 09, 10 500 08, 09, 10, 11 Flow rate L/min (ANR) Flow rate L/min (ANR) Flow rate L/min (ANR) 03, 04 400 200 06, 07 02 01, 23 300 50 03, 04 100 200 01, 23 100 0 0 0 5 0 10 5 0 10 5 0 10 Number of needle rotations Number of needle rotations Number of needle rotations Note) -U10/32 has the same specification as M5.

Table of Contents

-03-03-03 ZH18DL-03-03-03 ZH20DS-03-04-04 ZH20DL-03-04-04 Rc 133 52.45 42 19 3.5 19 20.95 20.95 133 52.45 42 19 3.5 19 151.1 60.95 47.7 19 3.5 24 26.75 151.1 60.95 47.7 19 3.5 24 26.75 I J K L M N O Model 3 8 Rc3 8 Rc3 8 Rc1 2 Rc1 2 ZH18DS-03-03-03 ZH18DL-03-03-03 ZH20DS-03-04-04 ZH20DL-03-04-04 19 47 57.5 17 10 19 47 57.5 10 24 50 69.3 12 24 50 69.3 12 Rc Rc3 8 Rc1 2 Rc1 2 17 22 22 13-5-

5 Port Solenoid Valve Series SY3000/5000/7000/9000

Dimensions Applicable fitting size d 4 Model A L D 10-KQP-04 16 32 6 6 10-KQP-06 18 35 8 8 10-KQP-08 20.5 39 10 10 10-KQP-10 22 43 12 12 10-KQP-12 24 44.5 14 10-KQP-01 16 31.5 5 10-KQP-03 16 32 6 10-KQP-07 18 35 8.5 10-KQP-09 20.5 39 10 10-KQP-11 22 43 11.5 Series Part no 10-SY9000 SY9000-57-1A 1 8" 5 32" Cable assembly 1 4" AXT100-FC261 5 16" 3 to 3 8" Red Terminal no.