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(Manifold base) (2 position single) VV5FS3-01T-081-03-AP5 VFS3100-5FZ VFS3200-5FZ 1 4 2 1 4 Nil N Rc NPT NPTF G Rc Rc Rc M Mixed 3 8 1 2 T F VV5FS3-10-061-03-A VFS3110-5D 1 4 Option 3-8-65 66 Series VFS3000 Plug-in type, Non plug-in type Manifold with Control Plug-in type: VV5FS3-01T1-AP Station Port size Voltage for release valve Example for manifold Individual EXH spacer (VVFS3000-R-03

VFS

(Manifold base) (2 position single) VV5FS3-01T-081-03-AP5 VFS3100-5FZ VFS3200-5FZ 1 4 2 1 4 Nil N Rc NPT NPTF G Rc Rc Rc M Mixed 3 8 1 2 T F VV5FS3-10-061-03-A VFS3110-5D 1 4 Option 3-8-65 66 Series VFS3000 Plug-in type, Non plug-in type Manifold with Control Plug-in type: VV5FS3-01T1-AP Station Port size Voltage for release valve Example for manifold Individual EXH spacer (VVFS3000-R-03

VFR

-01T-081-03-AP5 1 set (Manifold base part no.)

Base Mounted Wiring: Base Mounted Plug-in w/Terminal Blocks, Stations: 7 Stations, Passage: 1 [P and EA,EB: Common, Port A,B: Side (Type 31, Port A,B: Top)], Port Size: 3/8, Thread: Rc, Control Unit: Air Filter w/Auto Drain, Regulator, Air Release Valve,Pressure Switch, Release Valve Rated Voltage: 24VDC

Base Mounted Wiring: 01T (Base Mounted Plug-in w/Terminal Blocks), Stations: 7 Stations, Passage: 1 [P and EA,EB: Common, Port A,B: Side (Type 31, Port A,B: Top)], Port Size: 03 (3/8), Thread: Rc, Control Unit: AP (Air Filter w/Auto Drain, Regulator, Air Release Valve,Pressure Switch), Release Valve Rated Voltage: 5 (24VDC)

2/3 Port Valve

VX3324-03 VX3234-03 VX3334-03 VX3244-03 VX3344-03 6 0.33 0.5 4 9 0.19 2.2 3.4 3 8 0.33 3 6 (10A) Option Material 0.5 4 9 No.

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

-5 Gasket DXT192-10-5 (Use caution to the orientation.)

VZS

VZ Control Unit Specifications Control Unit/Option VF Air filter (With auto-drain/With manual drain) Filtration degree Regulator MP2-1 (With control unit/Filter regulator) VVZS2000-15A (With pressure switch) VVZS2000-24A-10(Release valve) 10 m VFR Blanking plate Plug-in type Set pressure (Outlet pressure) Pressure switch Set pressure range: OFF Differential pressure Contact Max. switch capacity

Base Mounted Wiring: Base Mounted Non Plug-in Individual Lead Wire Entry, Stations: 7 Stations, Passage: 1 [P and EA,EB: Common, Port A,B: Side (Type 31, Port A,B: Top)], Port Size: 3/8, Thread: -, Control Unit: -, Release Valve Rated Voltage: -

Base Mounted Wiring: 10 (Base Mounted Non Plug-in Individual Lead Wire Entry), Stations: 7 Stations, Passage: 1 [P and EA,EB: Common, Port A,B: Side (Type 31, Port A,B: Top)], Port Size: 03 (3/8)

Base Mounted Wiring: Base Mounted Non Plug-in Individual Lead Wire Entry, Stations: 10 Stations, Passage: 1 [P and EA,EB: Common, Port A,B: Side (Type 31, Port A,B: Top)], Port Size: 3/8, Thread: Rc, Control Unit: Air Filter w/Auto Drain, Regulator, Air Release Valve,Pressure Switch, Release Valve Rated Voltage: 24VDC

Base Mounted Wiring: 10 (Base Mounted Non Plug-in Individual Lead Wire Entry), Stations: 10 Stations, Passage: 1 [P and EA,EB: Common, Port A,B: Side (Type 31, Port A,B: Top)], Port Size: 03 (3/8), Thread: Rc, Control Unit: AP (Air Filter w/Auto Drain, Regulator, Air Release Valve,Pressure Switch), Release Valve Rated Voltage: 5 (24VDC)

Series AP500

to 1.0 MPa) Operating Parameters Delivery pressure Gas Source pressure Proof pressure (Inlet) Burst pressure Ambient and operating temperature Cv Vacuum to 3500 psig (24.1 MPa) 1) Vacuum to 300 psig (2.1MPa) 5000 psig (34.5 MPa) 10 psig (69 MPa) 40 to 160F (40 to 71C) (No freezing) 2) 0.09 2 x 10-11 Pam3/sec 2 x 10-10 Pam3/sec 3) 4 x 10-9 Pam3/sec 4) Ra max 15 in. (0.4 m) Option: 10 in.

Base Mounted Wiring: Base Mounted Plug-in w/D-sub Connector on U Side, Stations: 6 Stations, Passage: 1 [P and EA,EB: Common, Port A,B: Side (Type 31, Port A,B: Top)], Port Size: 3/8, Thread: Rc, Control Unit: Air Filter w/Auto Drain, Regulator, Air Release Valve,Pressure Switch, Release Valve Rated Voltage: 24VDC

Base Mounted Wiring: Base Mounted Plug-in w/Terminal Blocks, Stations: 6 Stations, Passage: 1 [P and EA,EB: Common, Port A,B: Side (Type 31, Port A,B: Top)], Port Size: 3/8, Thread: Rc, Control Unit: Air Filter w/Auto Drain, Regulator, Air Release Valve,Pressure Switch, Release Valve Rated Voltage: 24VDC

Base Mounted Wiring: Base Mounted Plug-in w/Terminal Blocks, Stations: 5 Stations, Passage: 1 [P and EA,EB: Common, Port A,B: Side (Type 31, Port A,B: Top)], Port Size: 3/8, Thread: Rc, Control Unit: Air Filter w/Auto Drain, Regulator, Air Release Valve,Pressure Switch, Release Valve Rated Voltage: 24VDC

MANIFOLD ASS'Y, VFS, 4/5 PORT SOLENOID VALVE, 0.00000 lb

Base Mounted Wiring: 01FU (Base Mounted Plug-in w/D-sub Connector on U Side), Stations: 6 Stations, Passage: 1 [P and EA,EB: Common, Port A,B: Side (Type 31, Port A,B: Top)], Port Size: 03 (3/8), Thread: Rc, Control Unit: AP (Air Filter w/Auto Drain, Regulator, Air Release Valve,Pressure Switch), Release Valve Rated Voltage: 5 (24VDC)