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VV5FS3-01T-061-03-CD VFS3100-5FZ VFS3200-5FZ VVFS3000-10A AMC610-10 1 3 2 1 1 (Manifold base) (2 position single) (2 position double) (Blanking plate) (Exhaust cleaner) VV5FS3-10-061-03-CU VFS3110-5E VFS3210-5E VVFS3000-10A AMC610-10 1 3 2 1 1 For details about exhaust cleaners, refer to Best Pneumatic Vol. 5. 3-8-63 64 Series VFS3000 Plug-in type, Non plug-in type Manifold with Exhaust Cleaner

5 Port Pilot Operated Solenoid Valve VFS1000/2000/3000/4000/5000/6000 Series

(Manifold base) (2 position single) Option VV5FS3-10-061-03-A VFS3110-5D 1 4 The asterisk denotes the symbol for assembly.

VFS

VV5FS3-01T-061-03-CD VFS3100-5FZ VFS3200-5FZ VVFS3000-10A AMC610-10 1 3 2 1 1 (Manifold base) (2 position single) (2 position double) (Blanking plate) (Exhaust cleaner) VV5FS3-10-061-03-CU VFS3110-5E VFS3210-5E VVFS3000-10A AMC610-10 1 3 2 1 1 For details about exhaust cleaners, refer to Best Pneumatic Vol. 5. 3-8-63 64 Series VFS3000 Plug-in type, Non plug-in type Manifold with Exhaust Cleaner

1

x 0.8 12 10 12 10 1 (P) 3 (R) 1 (P) XT34 Poppet VM200 2 port 3 port (A) 2 (A) 2 Side ported 1/4 Page 337 12 12 10 10 1 (P) 3 (R) 1 (P) VM400 3 port (OUT) 2 3 10 12 1 (N.C.)

Compact Hydraulic Cylinder

H G A B C D E F I Size Tolerance AD-FI-20 AD-FI-25 AD-FI-32 AD-CHN-40 +0.027 0 +0.027 0 +0.027 0 +0.027 0 20 25 32 40 46 46 56 64 60 60 80 88 22 22 30 30 16 16 16 24 10 10 12 16 30 30 36 44 28 30 40 43 10 10 13 13 6.5 6.5 10 10 5.5 5.5 9 9 CHQ Y-type double knuckle joint M R J K L CHKm Note Part no. 20: Y-02 25: Y-03 32: Y-04C 40: YHN-04 AD-FI-20 AD-FI-25 AD-FI-32 AD-CHN-40 M4 M4 M5 M5 12

AC Servo Motor Driver (Network card type ）

20 40 70 100 200 Bend radius [mm] 10 7 10.

5

Applicable mounting bracket T2 V M W Type A mounting bracket Type B mounting bracket Joint 32, 40 YU-03 YA-03 YB-03 50, 63 YU-05 YA-05 YB-05 T1 80 YU-08 YA-08 YB-08 2 x O counterbore 2 x D through B J 100 YU-10 YA-10 YB-10 E K (Width across flats ) H (With locking) Material: Stainless steel (mm) Part no.

Smooth Cylinder/Low Speed Cylinder

B J Type A mounting bracket Type B mounting bracket 32, 40 YU-03 YA-03 YB-03 CY 50, 63 YU-05 YA-05 YB-05 Material: Stainless steel CX CX 80 YU-08 YA-08 YB-08 (mm) 100 YU-10 YA-10 YB-10 Bore size (mm) B D E J M O Part no.

AC Servo Motor Driver (Pulse input type/Positioning type ）

OUTLINE DRAWINGS 91 to 9-5 9.1 Driver . 92 9.2 Connector. 95 10. CHARACTERISTICS 101 to 10-7 10.

AC Servo Motor Driver (CC-Link Type ）

4 10.

MB

(mm) Auto switch model Bore size 32 40 50 63 80 100 125 D-A3/A44 BMB2-032 BMB2-040 BMB1-050 BMB1-063 BMB1-080 BMB1-100 BS1-125 D-G39/K39 D-A5/A6 D-A59W D-F5/J5 D-F5W/J59W D-F59F D-F5BAL D-F5NTL BT-03 BT-03 BT-05 BT-05 BT-06 BT-06 BT-08 D-P5DWL D-Z7/Z80 D-Y59/Y69 D-Y7P/Y7PV D-Y7W D-Y7WV D-Y7BAL BMB3T-040 BMB3T-040 BMB3T-050 BMB3T-050 BMB3T-080 BMB3T-080 BAP2T-080 BMB4-032 BMB4-032 BMB4-050

AC Servo Motor Driver ( ＳＳＣＮＥＴⅢ/H Type ）

[pulse] 10 [pulse] 0 0 10 [pulse] 10 [pulse] -10 [V] -10 [V] CW direction CW direction App. 20 APPENDIX Setting value Output item Description Setting value Output item Description 0A Feedback position (Note 1, 2, 3) (10 V/1 Mpulse) 0B Feedback position (Note 1, 2, 3) (10 V/10 Mpulse) CCW direction CCW direction 10 [V] 10 [V] 1 [Mpulse] 10 [Mpulse] 0 0 1 [Mpulse] 10 [Mpulse] -10 [V] -10 [V

Air Cylinder Series CM2

Series 10-/11-/21-/22-CDG1 Series 10-/11-REC Series 10-/11-CDM2X Series Perpendicular entry is unavailable.

Air Cylinder Series MB

CM2 CG1 Auto switch model Bore size (mm) 32 40 50 63 80 100 125 MB D-A9/A9V D-M9/M9V D-M9W/M9WV D-M9AL/M9AVL BMB5-032 BMB5-032 BA7-040 BA7-040 BA7-063 BA7-063 BA7-080 MB1 D-A3/A44 D-G39/K39 CA2 BMB2-040 BMB1-050 BMB1-063 BMB1-080 BMB1-100 BMB2-032 BS1-125 D-A5/A6 D-A59W D-F5/J5 D-F5W/J59W D-F59F D-F5BAL D-F5NTL CS1 CS2 BT-03 BT-03 BT-05 BT-05 BT-06 BT-06 BT-08 The figure shows the mounting

NCG/CG1

TB TN Td TE TF TH TT TR 3.2 3.2 4.5 4.5 6 8 11 12 8 10 12 14 16 18 18 22 CG-020-24A CG-025-24A CG-032-24A CG-040-24A CG-050-24A CG-063-24A CG-080-24A CG-100-24A 20 25 32 40 50 63 80 100 25 30 35 40 50 60 55 65 36 43 50 58 70 82 73 90 (29.3) (33.1) (40.4) (49.2) (60.4) (74.6) 28 01 13 15 17 21 24 26 36 50 10 10 10 10 20 20 5.5 5.5 6.6 6.6 9 11 11 13.5 CR CN CD SLOT CC(20mm-40mm) 03 32 01

Compact Cylinder

Bore size (mm) YA 03 D E F M T1 T2 B Applicable air cylinder bore size YA-03 YA-05 YA-08 YA-10 32, 40 50, 63 80 100 18 6.8 16 6 42 6.5 10 20 9 20 8 50 6.5 12 03 05 08 10 For 32, 40 For 50, 63 For 80 For 100 26 11 25 10 62 8.5 16 31 14 30 12 76 10.5 18 Part no.

CATALOG

KM12-06-02-6 6 99 47 84 6 14 17 10 19.5 31.5 21.5 31 13 13.5 17 7.5 KM12-06-02-10 10 125 73 96 KM12-08-03-6 6 108 55 100 8 38 19 11.5 22.5 35.5 24 34.5 15.5 14.7 18.5 9 KM12-08-03-10 10 139 86 117 L5 T N H L3 L4 L6 P Q1 Q2 M L1 F L2 B Port Min Weight Model NPT Hex Inside Dia (g) (Inch Size) 19.5 6 16 16 18 29.5 29 40 12 1/4 87 5/32 10 6 67 KM12-03-35-6 19.5 10 16 16 18 29.5 29 61.5 12 1/

ISO Cylinder ISO Standard (15552) C96 Series ø32, ø40, ø50, ø63, ø80, ø100, ø125 Lightweight 17% Up C85 An adjustable position trunnion has been added. to C85W Weight reduced C85-S/T C85K * Compared with the previous C96 series (ø40, 100 mm stroke) C

Auto switch model Bore size [mm] 32 40 50 63 80 100 125 D-M9m/M9mV D-M9mW/M9mWV D-M9mA/M9mAV D-A9m/A9mV C85 C85W C85-S/T C75-S/T C85K-S/T C75K-S/T C85K C75K C75R CP96 CP96K C96 C96K C96Y C55 C85R C75 C75W Auto Switch BMB5-032 BMB5-032 BA7-040 BA7-040 BA7-063 BA7-063 BA7-080 D-F5m/F5mW D-J59/J59W D-F5BAL D-F59F/F5NTL D-A5m/A6m D-A59W BT-03 BT-03 BT-05 BT-05 BT-06 BT-06 BT-08 D-Y59m/Y69m D-Y7P