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Table of Contents

01 02 01 02 01 02 01 02 01 02 Light/Surge voltage suppressor (At TZ) Applicable cable O.D. 6 to 8 Applicable cable O.D. 2.3 to 2.8 Light/Surge voltage suppressor (At EZ) Light Light Max. 10 Max. 10 Other dimensions are the same as the grommet type.

VFS

Non plug-in type VV5FS3-10 VFS310-D VFS310-E Plug-in type with terminal block: 6 stations (Manifold base) VV5FS3-01T-061-02 1 (2 position single) VFS3100-5FZ 3 (2 position double) VFS3200-5FZ 2 (Blanking plate) VVFS3000-10A 1 Non plug-in type: 6 stations (Manifold base) VV5FS3-10-061-03 1 (2 position single) VFS3110-5D 5 (3 position exhaust center) VFS3410-5D

VFR

01 02 01 02 01 02 01 02 01 02 Light/Surge voltage suppressor (At TZ) Applicable cable O.D. 6 to 8 Applicable cable O.D. 2.3 to 2.8 Light/Surge voltage suppressor (At EZ) Light Light Max. 10 Max. 10 Other dimensions are the same as the grommet type.

Table of Contents

535 1 5 10 20 50 1 5 10 20 50 16-11-13 10 For details about certified products conforming to international standards, visit us at www.smcworld.com.

Series AP500

Single Stage Compact Regulator for Ultra High Purity Series AP500 For UHP gas delivery Flow capacity Standard: to 15 slpm HF (option): to 30 slpm Body material: 316L SS secondary remelt Hastelloy internals available for corrosion resistance Sub-atmospheric pressure delivery option How to Order Port Number q w e AP5 S FV4 FV4 02 2PW Delivery pressure Code 0.5 to 10 psig (0.0034 to 0.07 MPa

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

-02-08/AN200-2 Speed controller/Silencer 800 700 600 500 400 300 200 100 Perpendicular, upward actuation Horizontal actuation VZ514--02 (Piping: 10 x 1 m) Speed controller/Silencer AS3301F-02-10/AN200-2 800 700 600 500 400 300 200 100 Perpendicular, upward actuation Horizontal actuation VZ514--02 (Piping: 12 x 1 m) Speed controller/Silencer AS4001F-02-12/AN200-2 It is when the cylinder is

3 Port Air Operated Valve Series SYJA300 1

Rc 1/8 Body side VZA414-1P-01 VZA414-1P-02 VZA414-2P-01 VZA414-2P-02 VZA424-1P-01 VZA424-1P-02 VZA424-2P-01 VZA424-2P-02 Rc 1/8 Rc 1/4 Rc 1/8 Rc 1/4 Rc 1/8 Rc 1/4 Rc 1/8 Rc 1/4 M5 x 0.8 0.49 0.11 2.2 0.57 0.19 2.4 N.C. Sub-plate side M5 x 0.8 0.49 0.11 2.2 0.57 0.19 2.4 N.C. Body side M5 x 0.8 0.45 0.32 1.9 0.57 0.19 2.4 N.O. Sub-plate side M5 x 0.8 0.45 0.32 1.9 0.57 0.19 2.4 N.O.

CATALOG

KM12-06-02-6 6 99 47 84 6 14 17 10 19.5 31.5 21.5 31 13 13.5 17 7.5 KM12-06-02-10 10 125 73 96 KM12-08-03-6 6 108 55 100 8 38 19 11.5 22.5 35.5 24 34.5 15.5 14.7 18.5 9 KM12-08-03-10 10 139 86 117 L5 T N H L3 L4 L6 P Q1 Q2 M L1 F L2 B Port Min Weight Model NPT Hex Inside Dia (g) (Inch Size) 19.5 6 16 16 18 29.5 29 40 12 1/4 87 5/32 10 6 67 KM12-03-35-6 19.5 10 16 16 18 29.5 29 61.5 12 1/

V100

Nil Applicable blanking plate assembly SYJ300-10-2A 02 2 stations Pilot valve is on the A port side.

VZ100/300/500

Air Fluid Operating pressure range (MPa) 0.15 to 0.7 Internal pilot Ambient and fluid temperature (C) Response time (ms) (at the pressure of 0.5 MPa) (1) 10 to 50 (No freezing. Refer to page 4-18-4.) 20 or less Max. operating frequency (Hz) 10 Flow characteristics Refer to the table below.

SYJA3000

-M3 X 0.5 (Piping port) 33 36 (Non-locking) Manual override B P R R 7 7 SlA 36 2 35 7 13.5 28.5 15 A 21 R2 P R1 VlA 13 1 (Bleed port) 11 10 4 15 10 10 5-M5 X 0.8 (Piping port) 8.2 14 14 15 Bracket VM/VR VH 2 position double: SYJA3220-M3(-F) 2 position double: SYJA3240-M5 10 9 36 7.1 2-M3 X 0.5 (Pilot port) 10 1.8 4 A B (Mounting holes) 3.2 21.5 1.5 22 7 8.2 2.5 (Mounting holes for manifold

Series SYJA300 3 Port Air Operated Valve

SS3YJA5-40-031-01 SS3YJA7-41-031-01 SYJA714 1 pc. 2 pcs. 1 pc. 1 pc. 2 pcs. 1 pc. SYJA514 SYJ500-10-3A . SYJ700-10-2A .. Pilot Pressure Range 0.6 Pilot pressure (MPa) Pilot pressure range 0.5 0.4 Caution 0.3 Be sure to read before handing.

AC

Y60 Interface G36-10-01 G36-10-01G46-10-02 G46-10-02 G46-10-02 G46-10-02 G46-10-02 G36-10-01 1.0MPa G27-10-R1 Pressure gauge (G27-10-R1)(4) G36-2-01 G36-2-01 G46-2-02 G46-2-02 G46-2-02 G46-2-02 G46-2-02 G36-2-01 0.2MPa AD43 AD43 AD44 AD44 AD44 AD44 AD44 N.O.

5 Port Air Operated Valve Series SYA3000/5000/7000 1

VV5FR4-10-1-, VV5FR4-10-2 VV5FRA4-10-061-031 pc. VFRA41115 pcs. VVFS4000-10A1 pc.

I

from the VY Valve. 02 14 2.0 3 03 38 3.3 body Ported Type 04 12 3.9 Terminal Designations are as follows: 04 12 7.2 5 06 34 8.9 1 = 24v Power Supply 2 = Control Signal 3 = Common Negative for both power and signal. 10 1 10 5% 2% + -2% 7 10 1 114 17 12 114 18 9 14 112 2 33 20 2 37 Courtesy of Steven Engineering, Inc. !

A

6 10 21.5 8-32UNC 12 0~0.002 -0.4 ~ -0.2 5 3/16 16 7 6.3 RCS-01 6 10 21.5 8-32UNC 12 0~0.002 6.4 -0.3 ~ -0.1 3/16 16.6 21 10 12 RCD-015 12 6 12 28 8-32UNC 16 0~0.002 6.4 -0.3 ~ -0.1 3/16 25 14 12 RCS-015 6 12 32 8-32UNC 16 0~0.002 8 -0.4 ~ -0.2 5/16 21 25 11.5 10.3 RCD-02 16 6 16 34 10-32UNF 20 0~0.002 8 -0.4 ~ -0.2 5/16 25 11.5 10.3 RCS-02 6 16 34 10-32UNF 20 0~0.002 10 -0.4 ~ -0.2 3/8

VFRA3000

VV5FR4-10-1-, VV5FR4-10-2 VV5FRA4-10-061-031 pc. VFRA41115 pcs. VVFS4000-10A1 pc.

ITV

(Maximum 10 stations) Example) IITV00-05-07 02 03 2 stations 3 stations Indicate part numbers in order starting from the first station on the D side. 10 10 stations Note) Combination with having different pressure ranges is not available due to common supply/exhaust features. Note) A DIN rail with the length specified by the number of stations is attached to the manifold.