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-01T-081-03-AP5 1 set (Manifold base part no.)

5 Port Pilot Operated Solenoid Valve VFS1000/2000/3000/4000/5000/6000 Series

(Manifold base) (2 position single) (2 position double) (Blanking plate) VV5FS2-20-061-03 VFS2120-1D-02 VFS2220-1D-02 VVFS2000-10A-1 1 3 2 1 The asterisk denotes the symbol for assembly.

VFS

VFN Station Port size Station Port size Plug-in type with D-sub connector: VV5FS2-01FD11, VV5FS2-01FU11U side 2(B), 4(A) port 2n-Rc 1 8 Stations 2n-Rc , 1 8 1 4 D side 2(B), 4(A) port Bottom ported: Station Port size VV5FS2-01FD1 FU12Plug assembly: VVZS3000-21A(Option: Refer to page 3-8-8.)

5 Port Solenoid Valve Series VFR2000/3000/4000/5000/6000

-01T-081-03-AP5 1 set (Manifold base part no.)

VFR

-01T-081-03-AP5 1 set (Manifold base part no.)

Base Mounted Wiring: 01FD (Plug-in w/D-sub Connector on D Side), Pilot Type: Internal Pilot or None, Junction Cover: 1 (One-piece Junction Cover), Stations: 8 Stations, Passage: 1 [P and EA,EB: Common, Port A,B: Side (Type 20/30, Port A,B: Top)], Port Size: 02 (1/4)

Base Mounted Wiring: Plug-in w/D-sub Connector on D Side, Pilot Type: Internal Pilot or None, Junction Cover: One-piece Junction Cover, Stations: 8 Stations, Passage: 1 [P and EA,EB: Common, Port A,B: Side (Type 20/30, Port A,B: Top)], Port Size: 1/4, Thread: -, Control Unit: -, Voltage of Air Release Valve: -, Q: -

Base Mounted Wiring: 01T (Plug-in w/Terminal Block), Pilot Type: Internal Pilot or None, Junction Cover: 1 (One-piece Junction Cover), Stations: 8 Stations, Passage: 1 [P and EA,EB: Common, Port A,B: Side (Type 20/30, Port A,B: Top)], Port Size: 02 (1/4), Thread: Rc, Control Unit: AP (Air Filter w/Auto Drain, Regulator, Air Release Valve,Pressure Switch), Voltage of Air Release Valve: 5 (

Base Mounted Wiring: Plug-in w/Terminal Block, Pilot Type: Internal Pilot or None, Junction Cover: One-piece Junction Cover, Stations: 8 Stations, Passage: 1 [P and EA,EB: Common, Port A,B: Side (Type 20/30, Port A,B: Top)], Port Size: 1/4, Thread: Rc, Control Unit: Air Filter w/Auto Drain, Regulator, Air Release Valve,Pressure Switch, Voltage of Air Release Valve: 24VDC, Q: -

Base Mounted Wiring: 01FD (Plug-in w/D-sub Connector on D Side), Pilot Type: Internal Pilot or None, Junction Cover: 1 (One-piece Junction Cover), Stations: 8 Stations, Passage: 1 [P and EA,EB: Common, Port A,B: Side (Type 20/30, Port A,B: Top)], Port Size: 02 (1/4), Thread: Rc, Control Unit: MP (Air Filter w/Manual Drain, Regulator, Air Release Valve, Pressure Switch), Voltage of Air Release

Base Mounted Wiring: Plug-in w/D-sub Connector on D Side, Pilot Type: Internal Pilot or None, Junction Cover: One-piece Junction Cover, Stations: 8 Stations, Passage: 1 [P and EA,EB: Common, Port A,B: Side (Type 20/30, Port A,B: Top)], Port Size: 1/4, Thread: Rc, Control Unit: Air Filter w/Manual Drain, Regulator, Air Release Valve, Pressure Switch, Voltage of Air Release Valve: 24VDC, Q:

Series AP500

Single Stage Compact Regulator for Ultra High Purity Series AP500 For UHP gas delivery Flow capacity Standard: to 15 slpm HF (option): to 30 slpm Body material: 316L SS secondary remelt Hastelloy internals available for corrosion resistance Sub-atmospheric pressure delivery option How to Order Port Number q w e AP5 S FV4 FV4 02 2PW Delivery pressure Code 0.5 to 10 psig (0.0034 to 0.07 MPa

1

VM230U-02-08A VM-08A 110 g Red VM220-02-30RA VM230-02-30RA VM220U-02-30RA VM230U-02-30RA VM-30AR 58 g Black VM220-02-30BA VM230-02-30BA VM220U-02-30BA VM230U-02-30BA VM-30AB Green VM220-02-30GA VM230-02-30GA VM220U-02-30GA VM230U-02-30GA VM-30AG Yellow VM220-02-30YA VM230-02-30YA VM220U-02-30YA VM230U-02-30YA VM-30AY Push button (Mushroom) Red VM220-02-32RA VM230-02-32RA VM220U-02-32RA VM230U

V100

VT/O317-G(-02) VT/O317-GS(-02) VT/O317-H(-02) VT/O317-HS(-02) VT/O317-C(-02) VT/O317-CS(-02) VT/O317-T(-02) VT/O317-TS(-02) VT/O317-TZ(-02) VT/O317-D(-02) VT/O317-DS(-02) VT/O317-DZ(-02) Coil no. PVT317-001GBPVT317-G PVT317-001GB-L06 PVT317-G-06 PVT317-001CBPVT317-C Coil assembly with terminal part no.

3 Port Solenoid Valve Metal Seal Series VZ200 1

BG-VZ402 BG-VZ403 VQ VKF BG-VZ405 VQZ How to Order Manifold Base VZ 1 06 30 VV3Z4 VS VFN A port size on base side Series VZ400 Manifold Model Symbol VV3Z4-S50 VV3Z4-50 Symbol Stations Symbol Porting specifications 2(A) Passage Specifications Without 2(A) port (Body ported type 20, 30) Nil Applicable base 02 2 stations 3(R) 1(P) 01 02 Rc 1/8 1 Common Common Top, Side Type 20, 30 and 50

Base Mounted Wiring: 01FD (Plug-in w/D-sub Connector on D Side), Pilot Type: Internal Pilot or None, Junction Cover: 1 (One-piece Junction Cover), Stations: 8 Stations, Passage: 1 [P and EA,EB: Common, Port A,B: Side (Type 20/30, Port A,B: Top)], Port Size: 01 (1/8)

Base Mounted Wiring: 01FD (Plug-in w/D-sub Connector on D Side), Pilot Type: Internal Pilot or None, Junction Cover: 1 (One-piece Junction Cover), Stations: 8 Stations, Passage: 1 [P and EA,EB: Common, Port A,B: Side (Type 20/30, Port A,B: Top)], Port Size: 02 (1/4), Thread: N (NPT)

Base Mounted Wiring: 01FD (Plug-in w/D-sub Connector on D Side), Pilot Type: Internal Pilot or None, Junction Cover: 1 (One-piece Junction Cover), Stations: 8 Stations, Passage: 1 [P and EA,EB: Common, Port A,B: Side (Type 20/30, Port A,B: Top)], Port Size: 02 (1/4), Thread: T (NPTF)