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Table of Contents -01T-081-03-AP5 1 set (Manifold base part no.)
VFN Station Port size Station Port size Plug-in type with D-sub connector: VV5FS2-01FD11, VV5FS2-01FU11U side 2(B), 4(A) port 2n-Rc 1 8 Stations 2n-Rc , 1 8 1 4 D side 2(B), 4(A) port Bottom ported: Station Port size VV5FS2-01FD1 FU12Plug assembly: VVZS3000-21A(Option: Refer to page 3-8-8.)
-01T-081-03-AP5 1 set (Manifold base part no.)
Base Mounted Wiring: Plug-in w/D-sub Connector on D Side, Pilot Type: Internal Pilot or None, Junction Cover: One-piece Junction Cover, Stations: 8 Stations, Passage: 1 [P and EA,EB: Common, Port A,B: Side (Type 20/30, Port A,B: Top)], Port Size: 1/4, Thread: -, Control Unit: -, Voltage of Air Release Valve: -, Q: -
Base Mounted Wiring: 01FD (Plug-in w/D-sub Connector on D Side), Pilot Type: Internal Pilot or None, Junction Cover: 1 (One-piece Junction Cover), Stations: 8 Stations, Passage: 1 [P and EA,EB: Common, Port A,B: Side (Type 20/30, Port A,B: Top)], Port Size: 02 (1/4)
Base Mounted Wiring: Plug-in w/Terminal Block, Pilot Type: Internal Pilot or None, Junction Cover: One-piece Junction Cover, Stations: 8 Stations, Passage: 1 [P and EA,EB: Common, Port A,B: Side (Type 20/30, Port A,B: Top)], Port Size: 1/4, Thread: Rc, Control Unit: Air Filter w/Auto Drain, Regulator, Air Release Valve,Pressure Switch, Voltage of Air Release Valve: 24VDC, Q: -
Base Mounted Wiring: 01T (Plug-in w/Terminal Block), Pilot Type: Internal Pilot or None, Junction Cover: 1 (One-piece Junction Cover), Stations: 8 Stations, Passage: 1 [P and EA,EB: Common, Port A,B: Side (Type 20/30, Port A,B: Top)], Port Size: 02 (1/4), Thread: Rc, Control Unit: AP (Air Filter w/Auto Drain, Regulator, Air Release Valve,Pressure Switch), Voltage of Air Release Valve: 5 (
Base Mounted Wiring: Plug-in w/D-sub Connector on D Side, Pilot Type: Internal Pilot or None, Junction Cover: One-piece Junction Cover, Stations: 8 Stations, Passage: 1 [P and EA,EB: Common, Port A,B: Side (Type 20/30, Port A,B: Top)], Port Size: 1/4, Thread: Rc, Control Unit: Air Filter w/Manual Drain, Regulator, Air Release Valve, Pressure Switch, Voltage of Air Release Valve: 24VDC, Q:
Base Mounted Wiring: 01FD (Plug-in w/D-sub Connector on D Side), Pilot Type: Internal Pilot or None, Junction Cover: 1 (One-piece Junction Cover), Stations: 8 Stations, Passage: 1 [P and EA,EB: Common, Port A,B: Side (Type 20/30, Port A,B: Top)], Port Size: 02 (1/4), Thread: Rc, Control Unit: MP (Air Filter w/Manual Drain, Regulator, Air Release Valve, Pressure Switch), Voltage of Air Release
Single Stage Compact Regulator for Ultra High Purity Series AP500 For UHP gas delivery Flow capacity Standard: to 15 slpm HF (option): to 30 slpm Body material: 316L SS secondary remelt Hastelloy internals available for corrosion resistance Sub-atmospheric pressure delivery option How to Order Port Number q w e AP5 S FV4 FV4 02 2PW Delivery pressure Code 0.5 to 10 psig (0.0034 to 0.07 MPa
Base Mounted Wiring: Plug-in w/D-sub Connector on D Side, Pilot Type: Internal Pilot or None, Junction Cover: One-piece Junction Cover, Stations: 8 Stations, Passage: 1 [P and EA,EB: Common, Port A,B: Side (Type 20/30, Port A,B: Top)], Port Size: 1/8, Thread: -, Control Unit: -, Voltage of Air Release Valve: -, Q: -
Base Mounted Wiring: Plug-in w/D-sub Connector on D Side, Pilot Type: Internal Pilot or None, Junction Cover: One-piece Junction Cover, Stations: 8 Stations, Passage: 1 [P and EA,EB: Common, Port A,B: Side (Type 20/30, Port A,B: Top)], Port Size: 1/4, Thread: NPT, Control Unit: -, Voltage of Air Release Valve: -, Q: -
Base Mounted Wiring: Plug-in w/D-sub Connector on D Side, Pilot Type: Internal Pilot or None, Junction Cover: One-piece Junction Cover, Stations: 8 Stations, Passage: 1 [P and EA,EB: Common, Port A,B: Side (Type 20/30, Port A,B: Top)], Port Size: 1/4, Thread: NPTF, Control Unit: -, Voltage of Air Release Valve: -, Q: -
Base Mounted Wiring: Plug-in w/D-sub Connector on D Side, Pilot Type: Internal Pilot or None, Junction Cover: One-piece Junction Cover, Stations: 8 Stations, Passage: 1 [P and EA,EB: Common, Port A,B: Side (Type 20/30, Port A,B: Top)], Port Size: 1/8, Thread: NPTF, Control Unit: -, Voltage of Air Release Valve: -, Q: -
Base Mounted Wiring: 01FD (Plug-in w/D-sub Connector on D Side), Pilot Type: Internal Pilot or None, Junction Cover: 1 (One-piece Junction Cover), Stations: 8 Stations, Passage: 1 [P and EA,EB: Common, Port A,B: Side (Type 20/30, Port A,B: Top)], Port Size: 01 (1/8)
Base Mounted Wiring: 01FD (Plug-in w/D-sub Connector on D Side), Pilot Type: Internal Pilot or None, Junction Cover: 1 (One-piece Junction Cover), Stations: 8 Stations, Passage: 1 [P and EA,EB: Common, Port A,B: Side (Type 20/30, Port A,B: Top)], Port Size: 02 (1/4), Thread: N (NPT)
Base Mounted Wiring: 01FD (Plug-in w/D-sub Connector on D Side), Pilot Type: Internal Pilot or None, Junction Cover: 1 (One-piece Junction Cover), Stations: 8 Stations, Passage: 1 [P and EA,EB: Common, Port A,B: Side (Type 20/30, Port A,B: Top)], Port Size: 02 (1/4), Thread: T (NPTF)
Base Mounted Wiring: 01FD (Plug-in w/D-sub Connector on D Side), Pilot Type: Internal Pilot or None, Junction Cover: 1 (One-piece Junction Cover), Stations: 8 Stations, Passage: 1 [P and EA,EB: Common, Port A,B: Side (Type 20/30, Port A,B: Top)], Port Size: 01 (1/8), Thread: T (NPTF)