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Plug-in type with terminal block: 6 stations Non plug-in type: 6 stations VV5FR5-01T-061-04-CD 1 set (Manifold part no.) VFR5100-5FZ3 sets (2 position single part no.) VFR5200-5FZ2 sets (2 position double part no.) VVFS5000-10A 1 set (Blanking plate assembly part no.) AMC810-141 set (Exhaust cleaner part no.) VV5FR5-10-061-04-CU 1 set (Manifold part no.)

VFR

Plug-in type with terminal block: 6 stations Non plug-in type: 6 stations VV5FR5-01T-061-04-CD 1 set (Manifold part no.) VFR5100-5FZ3 sets (2 position single part no.) VFR5200-5FZ2 sets (2 position double part no.) VVFS5000-10A 1 set (Blanking plate assembly part no.) AMC810-141 set (Exhaust cleaner part no.) VV5FR5-10-061-04-CU 1 set (Manifold part no.)

Base Mounted Wiring: Plug-in w/D-sub Connector on D Side, Stations: 02 Stations, Passage: P: Common, EA,EB: Common, Port A,B: Side, Port Size: 3/4, Thread: NPT, Exhaust Cleaner Mounting Direction: -

Base Mounted Wiring: Plug-in w/D-sub Connector on D Side, Stations: 02 Stations, Passage: P: Common, EA,EB: Common, Port A,B: Side, Port Size: 3/4, Thread: NPTF, Exhaust Cleaner Mounting Direction: -

Base Mounted Wiring: 01FD (Plug-in w/D-sub Connector on D Side), Stations: 02 Stations, Passage: 1 (P: Common, EA,EB: Common, Port A,B: Side), Port Size: 06 (3/4), Thread: N (NPT)

Base Mounted Wiring: 01FD (Plug-in w/D-sub Connector on D Side), Stations: 02 Stations, Passage: 1 (P: Common, EA,EB: Common, Port A,B: Side), Port Size: 06 (3/4), Thread: T (NPTF)

Table of Contents

type: White color L type: Black color (Mounting hole) B C D E F G H Model A 3 8 Rc3 8 Rc3 8 Rc3 8 ZH18DS-03-03-03 ZH18DL-03-03-03 ZH20DS-03-04-04 ZH20DL-03-04-04 Rc 133 52.45 42 19 3.5 19 20.95 20.95 133 52.45 42 19 3.5 19 151.1 60.95 47.7 19 3.5 24 26.75 151.1 60.95 47.7 19 3.5 24 26.75 I J K L M N O Model 3 8 Rc3 8 Rc3 8 Rc1 2 Rc1 2 ZH18DS-03-03-03 ZH18DL-03-03-03 ZH20DS-03-04-04 ZH20DL

5 Port Air Operated Valve

VFA3230-021 set (Double part no.) VFA3330-021 set (Closed center part no.) The asterisk denotes the symbol for assembly. Prefix it to the part no. of the valve etc. The valve arrangement is numbered as the 1st station from D side.

How to Order Series ZM Vacuum Ejector With Valve and Switch For details about certified products conforming to international standards, visit us at www.smcworld.com. 1

ZM-FCB-0 ZM0-0 ZM-SF ZM-SA VJ114ZM-PV-0 Filter cover assembly Diffuser assembly Suction filter Silencer assembly Pilot valve Poppet valve assembly ZSE1-00ZSM1-015 ZSM1-021 !3 Vacuum pressure switch NBR ZM-CV !

Base Mounted Wiring: Plug-in w/D-sub Connector on D Side, Stations: 04 Stations, Passage: P: Common, EA,EB: Common, Port A,B: Side, Port Size: 1/2, Thread: -, Exhaust Cleaner Mounting Direction: -

Base Mounted Wiring: Plug-in w/D-sub Connector on D Side, Stations: 06 Stations, Passage: P: Common, EA,EB: Common, Port A,B: Side, Port Size: 1/2, Thread: -, Exhaust Cleaner Mounting Direction: -

Base Mounted Wiring: Plug-in w/D-sub Connector on D Side, Stations: 08 Stations, Passage: P: Common, EA,EB: Common, Port A,B: Side, Port Size: 1/2, Thread: -, Exhaust Cleaner Mounting Direction: -

Base Mounted Wiring: 01FD (Plug-in w/D-sub Connector on D Side), Stations: 04 Stations, Passage: 1 (P: Common, EA,EB: Common, Port A,B: Side), Port Size: 04 (1/2)

Base Mounted Wiring: 01FD (Plug-in w/D-sub Connector on D Side), Stations: 06 Stations, Passage: 1 (P: Common, EA,EB: Common, Port A,B: Side), Port Size: 04 (1/2)

Base Mounted Wiring: 01FD (Plug-in w/D-sub Connector on D Side), Stations: 08 Stations, Passage: 1 (P: Common, EA,EB: Common, Port A,B: Side), Port Size: 04 (1/2)

Base Mounted Wiring: Plug-in w/Terminal Block, Stations: 02 Stations, Passage: P: Common, EA,EB: Common, Port A,B: Side, Port Size: 1/2, Thread: -, Exhaust Cleaner Mounting Direction: -

Base Mounted Wiring: Non Plug-in Individual Lead Wire Entry, Stations: 02 Stations, Passage: P: Common, EA,EB: Common, Port A,B: Side, Port Size: 1/2, Thread: -, Exhaust Cleaner Mounting Direction: -

Base Mounted Wiring: 10 (Non Plug-in Individual Lead Wire Entry), Stations: 02 Stations, Passage: 1 (P: Common, EA,EB: Common, Port A,B: Side), Port Size: 04 (1/2)