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Table of Contents

How to Order Manifold Assembly Plug-in type with terminal block Non plug-in type VV5FR2-01T1-091-02-MP5 1 set (Manifold base part no.) VFR2100-5FZ 5 sets (2 position single part no.) VFR2200-5FZ 2 sets (2 position double part no.) VV5FR2-10-071-01-M5 1 set (Manifold base part no.) VFR2110-5D 5 sets (2 position single part no.)

VFR

How to Order Manifold Assembly Plug-in type with terminal block Non plug-in type VV5FR2-01T1-091-02-MP5 1 set (Manifold base part no.) VFR2100-5FZ 5 sets (2 position single part no.) VFR2200-5FZ 2 sets (2 position double part no.) VV5FR2-10-071-01-M5 1 set (Manifold base part no.) VFR2110-5D 5 sets (2 position single part no.)

5 Port Pilot Operated Solenoid Valve VFS1000/2000/3000/4000/5000/6000 Series

Grommet terminal: Double VFS2210-E-01 02 Closed center VFS2310-E-01 02 Exhaust center VFS2410-E-01 02 Pressure center VFS2510-E-01 02 DIN terminal: Double VFS2210-D Y-01 02 Closed center VFS2310-D Y-01 02 Exhaust center VFS2410-D Y-01 02 Pressure center VFS2510-D Y-01 02 With light/surge voltage suppressor 151 (3 position: 159) Lead wire O.D.

VFS

02 Pressure center VFS2510-E-01 02 DIN terminal: Double VFS2210-D Y-01 02 Closed center VFS2310-D Y-01 02 Exhaust center VFS2410-D Y-01 02 Pressure center VFS2510-D Y-01 02 EVS VFN With light/surge voltage suppressor Lead wire O.D.

-fl Seies

O-ring O, @, O Non plug-in type ME263LR-o2-1 Plug-in type Conneclor lead wires With terminal block. o @ End plate (kit) asJY ME272LR-02-1 End Plate (U) lD, End plate (D) (D ,Clamp O ' O o-rins G), O, O, O. Non plug-in type 1!

4 Way, 5 Port / Solenoid/Pilot Operated NVFR Series

O-ring O, @, O Non plug-in type ME263LR-o2-1 Plug-in type Conneclor lead wires With terminal block. o @ End plate (kit) asJY ME272LR-02-1 End Plate (U) lD, End plate (D) (D ,Clamp O ' O o-rins G), O, O, O. Non plug-in type 1!

Base Mounted Wiring: 01T1 (Plug-in w/Terminal Block, One-piece Junction Cover), Stations: 3 Stations, Passage: 1 [P(SUP): Common, E(EXH): Common, Port A,B(CYL): Side], Port Size: 01 (1/8), Thread: T (NPTF), Control Unit: AP (Air Filter w/Auto Drain, Regulator, Air Release Valve,Pressure Switch), Voltage Air Release Valve: 5 (24VDC)

Base Mounted Wiring: Plug-in w/Terminal Block, One-piece Junction Cover, Stations: 3 Stations, Passage: 1 [P(SUP): Common, E(EXH): Common, Port A,B(CYL): Side], Port Size: 1/8, Thread: NPTF, Control Unit: Air Filter w/Auto Drain, Regulator, Air Release Valve,Pressure Switch, Voltage Air Release Valve: 24VDC

This is a legacy product, and replaced byVV5FS2-01T1-031-02T

Base Mounted Wiring: 01T1 (Plug-in w/Terminal Block, One-piece Junction Cover), Stations: 3 Stations, Passage: 1 [P(SUP): Common, E(EXH): Common, Port A,B(CYL): Side], Port Size: 02 (1/4)

Base Mounted Wiring: Plug-in w/Terminal Block, One-piece Junction Cover, Stations: 3 Stations, Passage: 1 [P(SUP): Common, E(EXH): Common, Port A,B(CYL): Side], Port Size: 1/4, Thread: -, Control Unit: -, Voltage Air Release Valve: -

Table of Contents

ISG121-030 ISG221-030 Stainless steel 316 None 0.02 to 0.35 Cable gland ISA2 ISG121-031 ISG221-031 Stainless steel 316 Yes 0.02 to 0.45 Type A IS ISG130-030 ISG230-030 Brass, Phosphor bronze None 0.03 to 0.4 20a ISG130-031 ISG230-031 Brass, Phosphor bronze Yes 0.03 to 0.6 20b ZSM 0.1 to 1.0 1.5 0.02 ISG131-030 ISG231-030 Stainless steel 316 None 0.03 to 0.4 20c PF2 ISG131-031 ISG231-031

ISG

ISG121-030 ISG221-030 Stainless steel 316 None 0.02 to 0.35 Cable gland ISA2 ISG121-031 ISG221-031 Stainless steel 316 Yes 0.02 to 0.45 Type A IS ISG130-030 ISG230-030 Brass, Phosphor bronze None 0.03 to 0.4 20a ISG130-031 ISG230-031 Brass, Phosphor bronze Yes 0.03 to 0.6 20b ZSM 0.1 to 1.0 1.5 0.02 ISG131-030 ISG231-030 Stainless steel 316 None 0.03 to 0.4 20c PF2 ISG131-031 ISG231-031

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

-02-08/AN200-2 Speed controller/Silencer 800 700 600 500 400 300 200 100 Perpendicular, upward actuation Horizontal actuation VZ514--02 (Piping: 10 x 1 m) Speed controller/Silencer AS3301F-02-10/AN200-2 800 700 600 500 400 300 200 100 Perpendicular, upward actuation Horizontal actuation VZ514--02 (Piping: 12 x 1 m) Speed controller/Silencer AS4001F-02-12/AN200-2 It is when the cylinder is

3 Port Air Operated Valve Series SYJA300 1

Rc 1/8 Body side VZA414-1P-01 VZA414-1P-02 VZA414-2P-01 VZA414-2P-02 VZA424-1P-01 VZA424-1P-02 VZA424-2P-01 VZA424-2P-02 Rc 1/8 Rc 1/4 Rc 1/8 Rc 1/4 Rc 1/8 Rc 1/4 Rc 1/8 Rc 1/4 M5 x 0.8 0.49 0.11 2.2 0.57 0.19 2.4 N.C. Sub-plate side M5 x 0.8 0.49 0.11 2.2 0.57 0.19 2.4 N.C. Body side M5 x 0.8 0.45 0.32 1.9 0.57 0.19 2.4 N.O. Sub-plate side M5 x 0.8 0.45 0.32 1.9 0.57 0.19 2.4 N.O.

Series AP500

Single Stage Compact Regulator for Ultra High Purity Series AP500 For UHP gas delivery Flow capacity Standard: to 15 slpm HF (option): to 30 slpm Body material: 316L SS secondary remelt Hastelloy internals available for corrosion resistance Sub-atmospheric pressure delivery option How to Order Port Number q w e AP5 S FV4 FV4 02 2PW Delivery pressure Code 0.5 to 10 psig (0.0034 to 0.07 MPa

VZA200/400

Rc 1/8 Body side VZA414-1P-01 VZA414-1P-02 VZA414-2P-01 VZA414-2P-02 VZA424-1P-01 VZA424-1P-02 VZA424-2P-01 VZA424-2P-02 Rc 1/8 Rc 1/4 Rc 1/8 Rc 1/4 Rc 1/8 Rc 1/4 Rc 1/8 Rc 1/4 M5 x 0.8 0.49 0.11 2.2 0.57 0.19 2.4 N.C. Sub-plate side M5 x 0.8 0.49 0.11 2.2 0.57 0.19 2.4 N.C. Body side M5 x 0.8 0.45 0.32 1.9 0.57 0.19 2.4 N.O. Sub-plate side M5 x 0.8 0.45 0.32 1.9 0.57 0.19 2.4 N.O.