2

AS32l1F-U03-06A 6 10.4 21.8 32.1 36.4 50 48.4 43.6 42 Flow Control Equipment 1/4 19 16.6 13.3 39 AS32l1F-U03-08A 8 13.2 22.7 33 14.2 AS32l1F-U03-10A 10 15.9 26.7 37 28 15.6 40 AS32l1F-U03-12A 12 18.5 29.7 40 26.8 17 42 AS42l1F-U04-10A 10 1/2 24 15.9 18.8 27.4 40.3 36.2 50.8 49.2 42.2 40.6 15.6 52 AS42l1F-U04-12A 12 18.5 30.8 43.7 35.1 17 54 AS42l1F-U04-16A 16 23.8 34.8 47.7 32.7 20.6 58

5 Port Solenoid Valve Series VFR2000/3000/4000/5000/6000

Material Description Pilot valve assembly AXT627-42-1 (M5 x 50) AXT627-10-1 VFR51 AXT627-10-1 VFR52 AXT627-42-1 (M5 x 50) AXT627-10-1 VFR53/54/55 8 NBR Hexagon socket head screw Gasket 9 10 AXT627-42-1 (M5 x 50) Refer to How to Order Pilot Valve Assembly on page 1298.

Table of Contents

How to Order AS500 AS420 JIS Symbol AS 42 0 02 Option Body size Nil None Caution 42 50 60 80 90 1/2 standard 3/4 standard 1 standard 1 1/4 standard 1 1/2 standard H (1) High temperature (5 to 80C) Low temperature (30 to 60C) Bore size L (2) Be sure to read before handling.

VQ5000

(Refer to the table below) U D U D Cylinder port size Kit designation/Electrical entry/Cable length 3/8 NPTF 1/2 NPTF Bottom ported 1/2 NPTF Rc3/8 Rc1/2 Bottom ported Rc1/2 Mixed sizes Note) 03T 04T BT 03 04 B CM F L Kit (D sub connector kit) Kit (Lead wire kit) Note) Indicate on a manifold specification sheet in case of mixed sizes.

Aluminum High Vacuum Angle Valve

Power/Voltage At the Rated Voltage Model Starting Power (W) Current (A) Power (W) Current (A) Holding G/C/D/T, P5G 1.5 36 4.8 14.8 10 4.9 2.3 5.3 20 13.5 6.7 3.0 0.38 0.35 0.27 0.11 0.10 0.5 0.46 0.36 0.15 0.12 50 Hz 60 Hz 50 Hz 60 Hz P1G 0.47 30.5 XLS-16P2G 0.24 30 G/C/D/T, P5G 2.0 47 50 Hz 60 Hz 50 Hz 60 Hz P1G 0.62 42 XLS-25P2G 45 0.35 XLA Construction/Operation XL XL Internal control

Base Mounted Type, VQ5000 Series, 5 Port Metal Seal/Rubber Seal Solenoid Valve

(Refer to the table below) U D U D Cylinder port size Kit designation/Electrical entry/Cable length 3/8 NPTF 1/2 NPTF Bottom ported 1/2 NPTF Rc3/8 Rc1/2 Bottom ported Rc1/2 Mixed sizes Note) 03T 04T BT 03 04 B CM F L Kit (D sub connector kit) Kit (Lead wire kit) Note) Indicate on a manifold specification sheet in case of mixed sizes.

AS

4 9.3 39.2 5.2 26.6 10 4.5 0.7 9.3 39.2 5.2 26.6 9 9 10 4.5 0.7 AS1001F-05T 3/16" AS1001F-06T 6 11.4 48.7 16.5 11.6 40.7 6.2 27.7 13.5 10 14 6.2 27.7 AS1001F-07T 1/4" AS2001F-04T 4 12 40.7 13.7 9.3 40.7 5.2 31.9 12.7 15 11 11.8 7 1.5 AS2001F-06T 6 AS2001F-03T 5/32" 11.6 44.8 6.3 33 13.5 16 9.3 40.7 5.2 31.9 12.7 15 AS2051F-06T 6 AS2001F-05T 3/16" 12.8 53.2 6.7 35.2 17 33 11.8 7 1.5 11.4

Tamper Proof Speed Controller with One-touch Fitting Elbow Type/Universal Type Series AS  1F-T

17.7 42 40.2 AS221F-02-10ST AS221F-N02-07ST 18.3 17 NPT1/4 17.5 18.5 7 1.5 34.7 1/4" 13.2 25.2 34.5 35.3 44.5 10 21 18.5 44 AS321F-02-06ST AS221F-N02-09ST 18.5 5/16" 15.2 27.2 36.4 27.8 39.3 6 17 12.8 73 44 18.3 AS321F-02-08ST AS221F-N02-11ST 21 18.5 35.3 44.5 3/8" 29.5 41 8 18.5 15.2 76 R1/4 19 23 9.5 1.5 49.3 21.3 54.8 73 AS321F-02-10ST AS321F-N02-07ST 17 1/4" 13.2 27.8 39.3 31.8 43.3

CATALOG

58 45 125 199 42 1-1/4-12 58 45 M30x1.5 140 199 42 58 40 140 199 42 1-1/4-12 58 45 M36x1.5 160 219 47 64 50 160 219 47 1-3/8-12 64 50 Note) Dimensions are the same for Standard and Switch Capable Courtesy of Steven Engineering, Inc. !

Air Pilot Operated

(mm) 0.1n {4.5) o.1n (4.5)0.30a 00) 0.391 (10) o.177 (.1.5) o197 (5) ot97 (5) 043.{ (11) ) 434 fir) 0.197 G) 0.360 (9.8) 0.3& p.E) u61610.646 116.4)106..) 0.388 pa) PSIG (Kgt/cm,) 1.To$.n spool!

Air Pilot Operated Series NVSA

(mm) 0.1n {4.5) o.1n (4.5)0.30a 00) 0.391 (10) o.177 (.1.5) o197 (5) ot97 (5) 043.{ (11) ) 434 fir) 0.197 G) 0.360 (9.8) 0.3& p.E) u61610.646 116.4)106..) 0.388 pa) PSIG (Kgt/cm,) 1.To$.n spool!

V

A N I F O L D W/ I N D I V I D U A L L E A D W I R E SY3/5/7000 SS5Y 4 A, B P O R T S I Z E M A N I F O L D S E R I E S Metric (mm) M5 M5x0.8 (SY3000 Type 41 Only) 01 Rc(PT)1/8 (SY5000 Type 41 & SY3000 Type 42 Only) 02 RC(PT)1/4 (SY5000 Type 42 Only) C4 One Touch Fittings for 4 (SY3000 Only) C6 One Touch Fittings for 6 (SY3000 & SY5000 Only) C8 One Touch Fittings for 8 (SY5000 Only) C10

Series: 7 (VP700), Exhaust Type: 42 (Individual Exhaust), Pilot Type: Internal Pilot, Stations: 4 Stations, Symbol: 3, Port Size: 04 (1/2), Thread Type: N (NPT)

Series: 7 (VP700), Exhaust Type: 42 (Individual Exhaust), Pilot Type: Internal Pilot, Stations: 4 Stations, Symbol: 3, Port Size: 04 (1/2)

Series: VP700, Exhaust Type: Individual Exhaust, Pilot Type: Internal Pilot, Stations: 4 Stations, Symbol: 3, Port Size: 1/2, Thread Type: NPT

Series: VP700, Exhaust Type: Individual Exhaust, Pilot Type: Internal Pilot, Stations: 4 Stations, Symbol: 3, Port Size: 1/2, Thread Type: -

Series: 7 (VP700), Exhaust Type: 42 (Individual Exhaust), Pilot Type: R (External Pilot), Stations: 4 Stations, Symbol: 3, Port Size: 04 (1/2), Thread Type: T (NPTF)

Series: VP700, Exhaust Type: Individual Exhaust, Pilot Type: External Pilot, Stations: 4 Stations, Symbol: 3, Port Size: 1/2, Thread Type: NPTF

5 Port Pilot Operated Solenoid Valve VFS1000/2000/3000/4000/5000/6000 Series

With light/surge voltage suppressor: 115 (117)) (With light/surge voltage suppressor: 102.5) (With light/surge voltage suppressor: 107.5) (With light/surge voltage suppressor: 124 (126)) (With light/surge voltage suppressor: 112.5) ( ): Y, YZ Stations n: Station 2 62 92 3 87 117 4 112 142 5 137 167 6 162 192 7 187 217 8 212 242 9 237 267 10 262 292 Formula L1 = 25 x n + 12 L2 = 25 x n + 42

XL-OMY0002

.1349-80XLD25-30-1-XN1 4) S / 25 40 50 AS568-030V AS568-035V AS568-039V AS568-030 ** AS568-035 ** AS568-039 ** B2401-V24V B2401-P42V AS568-227V B2401-V24 ** B2401-P42 ** AS568-227 ** S XLD40-2-9-1A XLD50-2-9-1A XLD40-2-9-1A ** XLD50-2-9-1A ** AS568-009V AS568-016V AS568-016V AS468-009 ** AS568-016 ** AS568-016 ** 63 80 100 160 AS568-043V AS568-045V AS568-050V AS568-167V AS568-043