XL-OMY0002

relating to systems ISO 4413: Hydraulic fluid power -General rules relating to systems IEC 60204-1: Safety of machinery -Electrical equipment of machines (Part 1: General requirements) ISO 10218: Manipulating industrial robots-Safety JIS B 8370: JIS B 8361: JIS B 9960-1: -1 ) JIS B 8433: *2) 1. 2. 3. 1. 2. 3. 4. 2 XL-OMY0002 / 1 1.5 *3) 3)1 1 () 3 XL-OMY0002 1 &/ 1.52 2 ( ) 5 5 P-01

5 Port Pilot Operated Solenoid Valve VFS1000/2000/3000/4000/5000/6000 Series

voltage suppressor (External pilot port) Electrical entry Pilot EXH port ( ): Rc 1 8 3 position double check: VFS2600-F-01 02 2 position double: VFS2200-F-01 02 3 position closed center: VFS2300-F-01 02 3 position exhaust center: VFS2400-F-01 02 3 position pressure center: VFS2500-F-01 02 Manual override (Non-locking) 2 x 5 mounting hole 150.5 (3 position: 158) 2 x 5 mounting hole Manual

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brnE al 0frli&/.bs,irfor Port size :Non-locking push type (Flush) rf> I l F l B-Lock type (Screw type) > | | ' l xA-l\tonlockng Push type (Extended) . C-b"kt/p. (Lever) Body type.-[-c"*'f ] sf;1 i qo3j, {Botlom pofted 1/8 NPTF oniy.

4 Way, 5 Port / Solenoid/Pilot Operated NVFR Series

brnE al 0frli&/.bs,irfor Port size :Non-locking push type (Flush) rf> I l F l B-Lock type (Screw type) > | | ' l xA-l\tonlockng Push type (Extended) . C-b"kt/p. (Lever) Body type.-[-c"*'f ] sf;1 i qo3j, {Botlom pofted 1/8 NPTF oniy.

Stations: 4 Stations, Exhaust Style: 3 (Individual Exhaust), A Port Size: 01 (1/8 Common Exhaust/Individual Exhaust), Thread: Rc

Stations: 4 Stations, Exhaust Style: Individual Exhaust, A Port Size: 1/8 Common Exhaust/Individual Exhaust, Thread: Rc

VS 8-2/VS 8-4

(T) (F) (T) VV802-P-01 (Size 18 mm) 18 9 1/8" VV801-P-03 (Size 26 mm) By mounting individual SUP spacers on a manifold block, it is possible to provide individual SUP ports for each valve. 22.5 11 Size 18 mm 1(P) 4(A) 129.5 61 2(B) 1(P') 19 26 13 3/8" 3(R2) 5(R1) Circuit diagram 28.6 14.3 Size 26 mm 112 Individual EXH spacer 49 12.5 (F) (T) (F) (T) VV802-R-01 (Size 18 mm) 18 9 1/8" VV801

Stations: 4 Stations, Exhaust Style: 3 (Individual Exhaust), A Port Size: 02 (1/4 Individual Exhaust), Thread: F (G)

Stations: 4 Stations, Exhaust Style: 3 (Individual Exhaust), A Port Size: 01 (1/8 Common Exhaust/Individual Exhaust), Thread: N (NPT)

Stations: 4 Stations, Exhaust Style: 3 (Individual Exhaust), A Port Size: 02 (1/4 Individual Exhaust), Thread: N (NPT)

Stations: 4 Stations, Exhaust Style: 3 (Individual Exhaust), A Port Size: 02 (1/4 Individual Exhaust), Thread: Rc

Stations: 4 Stations, Exhaust Style: Individual Exhaust, A Port Size: 1/4 Individual Exhaust, Thread: G

Stations: 4 Stations, Exhaust Style: Individual Exhaust, A Port Size: 1/8 Common Exhaust/Individual Exhaust, Thread: NPT

Stations: 4 Stations, Exhaust Style: Individual Exhaust, A Port Size: 1/4 Individual Exhaust, Thread: NPT

Stations: 4 Stations, Exhaust Style: Individual Exhaust, A Port Size: 1/4 Individual Exhaust, Thread: Rc

High Vacuum Angle Valve

Bellows seal C Double acting Bellows seal F Single acting (N.C.)

3M/SMseries

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Serial Transmission System Series EX250 Series EX500

(Fill out for I/O unit only) 01 1 station Nil PNP (+) or without SI unit/input block(SD0) NPN () N The maximum number of stations differs depending on the electrical entry.

Aluminum High Vacuum Angle Valve

Indicator: Dimensions (b) E C D E C XLA F A (a) XL XL XLQ E (c) XM XY H DXSA XVD B G XGT CYV A (mm) A B C D E Note 1) F G H Model XLH-16 XLH-25 XLH-40 XLH-50 40 100.5 38 1 30 17 35 50 114 48 1 12 40 26 41 65 162.5 66 2 11 55 41 57 70 179.5 79 2 11 75 52 70 Note 1) Dimension E applies when heater option is included.

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