Table of Contents

D-F9BAL Bore size (mm) D 18.5 16 9 6 4 3.5 B 2 9 12 14 14.5 C 0.5 10.5 16.5 24 25 34 A 18.5 28.5 34.5 42 43 52 D6 10 15 20 25 32 A C Electrical entry direction: Inward Electrical entry direction: Outward -X 20Auto Switch Mounting Dimensions CXSJ6/10 Data C3 Bore size (mm) 6, 10 0.4 0.4 7.2 4.8 7.2 4.8 B1 Symbol Auto switch model C2 D2 D1 A1 B1 C1 C2, C3 D1 D2 D-A9 D-F9 W, D-M9 C1 A1 D-A9V

Electric Actuators

Toothed lock washer (included) Phillips countersunk head screw (included) M3 x 6l Binding band (included) Holding plate (included) Refer to page 299 for mounting.

smcmaintenancepartslist

Grease Relief valve body holder Relief valve C1 chamfer (Pay attention to the direction) C1 chamfer (Pay attention to the direction) body Assembly Picture 8: Installation of piston seal 365 Series RHC Replacement Procedure of Seal 3 1-22.

Tie-rod Type Hydraulic Cylinder

C1 B E 4 x 22l SWRM 80 80 all types Polished round 18SPCC 71.5 4 16 61.5 5 A 100, 125 all types 160 all types 5 x 30l SWRM 100 Polished round 20SPCC 82 5 20 72 5 5 x 30l SWRM 160 Polished round 22SPCC 94 5 20 79 7.5 Note) Does not come with other accessories.

Valve Stations: 08 (8 Stations), Port Size: 40 (Barb Fitting), Voltage: 6 (12VDC), Coil Specifications: Standard (w/Light Surge Voltage Suppressor)(+COM), Operating Pressure Range: L [High Flow Type (0 to 0.3 MPa)]

Valve Stations: 8 Stations, Port Size: Barb Fitting, Voltage: 12VDC, Coil Specifications: Standard (w/Light Surge Voltage Suppressor)(+COM), Operating Pressure Range: L [High Flow Type (0 to 0.3 MPa)], Connector Cable: -, Bracket: -

2

New Products Guide 2 Air Preparation Equipment, Modular F. R. L., Air Tanks Fittings and Tubing Flow Control Equipment, Exhaust Filters Switches/Sensors Process Valves High Vacuum Equipment Temperature Control Equipment Pneumatic Instrumentation Process Gas Equipment Equipment CAT.E00-7A INDEX New Products Guide 2 Air Preparation Equipment/ Modular F. R. L./Air Tanks Refrigerated Air Dryer

5

Applicable bore size B1 C1 d H1 Part no. Applicable bore size B2 C2 d H2 SNJ-010C 10 11 12.7 M8 x 1.0 4 NTJ-010C 10 7 8.1 M4 x 0.7 3.2 Y-J016C 16 11 16.6 21 M5 x 0.8 SNJ-016C 16 14 16.2 M10 x 1.0 4 Part no.

Hydraulic

Chamfer RR1 C NDH10 NDH10 MM C1 Chamfer A B E1 E1 NX NZ NZ NX U1 A1 A1 U1 L1 L1 Part no.

CXS

D-F9BAL Bore size (mm) D 18.5 16 9 6 4 3.5 B 2 9 12 14 14.5 C 0.5 10.5 16.5 24 25 34 A 18.5 28.5 34.5 42 43 52 D6 10 15 20 25 32 A C Electrical entry direction: Inward Electrical entry direction: Outward -X 20Auto Switch Mounting Dimensions CXSJ6/10 Data C3 Bore size (mm) 6, 10 0.4 0.4 7.2 4.8 7.2 4.8 B1 Symbol Auto switch model C2 D2 D1 A1 B1 C1 C2, C3 D1 D2 D-A9 D-F9 W, D-M9 C1 A1 D-A9V

CXS

D-F9BAL Bore size (mm) D 18.5 16 9 6 4 3.5 B 2 9 12 14 14.5 C 0.5 10.5 16.5 24 25 34 A 18.5 28.5 34.5 42 43 52 D6 10 15 20 25 32 A C Electrical entry direction: Inward Electrical entry direction: Outward -X 20Auto Switch Mounting Dimensions CXSJ6/10 Data C3 Bore size (mm) 6, 10 0.4 0.4 7.2 4.8 7.2 4.8 B1 Symbol Auto switch model C2 D2 D1 A1 B1 C1 C2, C3 D1 D2 D-A9 D-F9 W, D-M9 C1 A1 D-A9V

Aluminum High Vacuum Angle Valve

K V 1 10 XLA S P1P2 XL XL Conductances combined When each of the separate conductances are given as C1, C2 and Cn, the composite conductance C is expressed as: C=1/(1/C1+1/C2++1/Cn) when in series, and C=C1+C2++Cn, when in parallel.

High Vacuum Angle Valve

K V 1 10 XLA S P1P2 XL XL Conductances combined When each of the separate conductances are given as C1, C2 and Cn, the composite conductance C is expressed as: C=1/(1/C1+1/C2++1/Cn) when in series, and C=C1+C2++Cn, when in parallel.

High Vacuum Angle Valve, XL Series

Actuating solenoid valve electric signal Valve opening O After a few seconds at 10-6Torr 90% 100% 90% Valve closing Operation time Responce time Conductances combined When each of the separate conductances are given as C1, C2 and Cn, the composite conductance C is expressed as: C=1/(1/C1+1/C2+...1/Cn) when in series, and C=C1+C2+...Cn, when in parallel. 39 Series XL Technical Data 5 He leakage

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

Conductances combined When each of the separate conductances are given as C1, C2 and Cn, the composite conductance C is expressed as: C=1/(1/C1+1/C2+...1/Cn) when in series, and C=C1+C2+...Cn, when in parallel.

XL

Actuating solenoid valve electric signal Valve opening O After a few seconds at 10-6Torr 90% 100% 90% Valve closing Operation time Responce time Conductances combined When each of the separate conductances are given as C1, C2 and Cn, the composite conductance C is expressed as: C=1/(1/C1+1/C2+...1/Cn) when in series, and C=C1+C2+...Cn, when in parallel. 39 Series XL Technical Data 5 He leakage

Type: Manifold Valve, Type: Unit Manifold Valve, Connector: With Connector Cable, Number of Stations: Octuple, Port pipe connection port diameter: Barbed Fitting (Applicable Tube: ø4 / ø2.5), Rated Voltage: 24 DC, Specification: Positive Common, Standard (with Lamp and Surge voltage suppressor), Operating Pressure Range: Standard (0 to 0.7 MPa), Dimension: Cable length

Valve Stations: 08 (8 Stations), Port Size: 40 (Barb Fitting), Voltage: 5 (24VDC), Coil Specifications: Standard (w/Light Surge Voltage Suppressor)(+COM), Operating Pressure Range: L [High Flow Type (0 to 0.3 MPa)], Connector Cable: C1 (Length 300mm)

Valve Stations: 08 (8 Stations), Port Size: 40 (Barb Fitting), Voltage: 5 (24VDC), Coil Specifications: T [w/Power-Saving Circuit (Continuous Duty Type)(+COM)], Operating Pressure Range: H [Standard (0 to 0.7 MPa)], Connector Cable: C1 (Length 300mm)

Valve Stations: 08 (8 Stations), Port Size: 40 (Barb Fitting), Voltage: 5 (24VDC), Coil Specifications: Standard (w/Light Surge Voltage Suppressor)(+COM), Operating Pressure Range: H [Standard (0 to 0.7 MPa)], Connector Cable: C1 (Length 300mm)