VQ7-6/7-8

type VQ7-6-FG-SVQ7-6-FG-S-R VQ7-6-FG-DVQ7-6-FG-D-R FHG FJG FIG FHG FJG FIG VQ7-6-DVQ7-6-D-R VQ7-6-FPG-DValve replacement parts FHG FJG FIG FHG FJG FIG Description Material VQ7-6-FG-SVQ7-6-FG-DVQ7-6-FPG-DVQ7-6-FG-S-R VQ7-6-FG-D-R VQ7-6-D-R VQ7-6-DNo.

Series VQ Base Mounted Metal Seal/Rubber Seal

Description Note q w e Material Note q w e Material Body Body Aluminum die cast Aluminum die cast Spool valve Spool/Sleeve Aluminum/NBR Stainless steel Piston Piston Resin Resin Replacement Parts Replacement Parts (1) (1) VQ111 --1 (H) (Y) Voltage1 to 6 VQ111 --1 (H) (Y) Voltage1 to 6 Pilot valve assembly Single Pilot valve assembly Single r r (1) (1) Double/ 3 position Double/ 3 position

Series VQ Metal Seal/Rubber Seal Body Ported

Description Body Material Body Zinc die-cast Zinc die-cast q q Spool valve Spool/Sleeve Aluminum/NBR Stainless steel w w Piston Piston Resin Resin e e rPilot Valve Assembly rPilot Valve Assembly (1) (1) L M G L M G VQ111P (H) (Y) VQ111P (H) (Y) 2 2 Single Single Voltage 1 to 6 Voltage 1 to 6 L M L M VQ110L VQ110L 2 2 Double (latching) Double (latching) Voltage 1 to 6 Voltage 1 to 6 The

VER2000/4000

VS7-8-FG-D-3M 1 pc. (Third station of manifold where 1 piece of VS7-8-FG-D-3M is added to the basic unit of VER2000-A and VS7-8-FG-S-3N.) AL Dimensions DXT334-X72-04R-04U L side U side D side Exhaust port R side Rc 1/2 supply port (L side) 2-Rc 1/2, Output port 14-9-23

Flow Control Equipment

2.5 to 6 6 to 20 20 to 40 40 to 63 63 to 100 AS13l1F AS13l1F AS23l1F AS33l1F AS43l1F / 1 8, / 1 4 / 1 4, / 3 8 / 1 2 Elbow (Metal Body) M5 6 to 20 20 to 32 20 to 40 40 to 63 63 to 100 AS12l1 AS22l1 AS22l1 AS32l1 AS42l1 / 1 8 4.1-7 / 1 4 / 3 8 / 1 2 In-line 6 to 20 20 to 32 20 to 40 40 to 63 63 to 100 AS1001F AS2001F AS2051F AS3001F AS4001F 4.1-9 Dual Speed Controller 6 to 20 20 to 32 20

Conforming to ISO Standard Solenoid Valve (with M12 Connector) Series EVS7-6/7-8/7-10 (Size 1) (Size 2) (Size 3) 1

(A) Rubber seal 2 4 FPG 3 5 1 (R2) (R1)(P) Available for 7-6 and 7-8 only A02 VS7 1 Sub-plate Size 1 2 3 Specifications Size 1 Size 2 Piping specifications Weight (kg) Model Size 3 Piping direction Port size for 3(R2), 5(R1) Port size for 1(P), 2(B), 4(A) Port size VS7-1-A02 VS7-1-A03 VS7-1-B02 VS7-1-B03 VS7-2-A03 VS7-2-A04 VS7-2-A06 VS7-2-B03 VS7-2-B04 VS7-2-B06 VS7-3-A04 VS7-3-A06 VS7

15

FP (Mounting distance) Actuator Motor plate details q w FC Motor mounting surface FD FH FF FE 4 x FA, thread depth FB FG Dimensions [mm] Size Motor type FA FB FC FD FE FF FG FH M1 T1 M2 T2 PD FP 40 NY M3 x 0.5 6 45 30 3.5 6 99 49 M4 x 12 2.7 M2.5 x 10 0.65 8 12.5 NX M2.5 x 10 0.65 8 7 NY M4 x 0.7 6 70 50 3.5 6 123 68 M4 x 12 2.7 M4 x 12 2.7 11 18 NX M5 x 0.8 6 63 40 3.5 6 123 68 M4 x 12 2.7

2

6 7 3/8 KQ2T11-00A 15.4 20.4 28.1 15.6 9.9 8 4.2 28.8 23.8 7 10.2 1/2 KQ2T13-00A 19.3 23.4 33 17 11.8 8 4.2 64.6 50.6 9.6 16.9 Q Q 2 x O 2 x N M Q L1 L2 Q D D L1 M L1 M Note) D is maximum diameter.

Table of Contents

6 !7 @1 !0 !9 !6 !7 AQ i ASV ASQ530F-02 type ASQ630F-03 type ASQ530F-02 type ASQ630F-03 type y !5 !3 y u AK !5 !7 !7 ASS !4 !1 !2 !4 !1 !8 !8 ASR !6 !6 ASF t q t q @0 r @0 r @1 !0 !9 !6 !7 @1 !0 !9 !6 !7 Component Parts Note Material Note Description Description Material No. q w e r t y u i o !0 !1 !2 !3 No. !4 !5 !6 !7 !8 !

Series SV

D D D D D D 3 2 1 Stations D side How to Order Solenoid Valves SV 1 1 0 0 F 5 Note) Available with manifold block for station additions. Refer to pages 77 and 81.

SQ1000/2000

-10A-3 (1 set) Stations 1 2 3 4 5 6 7 8 9 U side 3m SQ1000-10A-3 SQ1230-5-C6 SQ1230-5-C6 SQ1230-5-C6 SQ1230-5-C6 SQ1130-5-C6 SQ1130-5-C6 SQ1130-5-C6 SQ1130-5-C6 D-sub connector cable AXT100-DS25-030 Cylinder port fitting C6: 6 One-touch fitting D side Manifold base (9 stations) SS5Q13-09FD2-D F kit (D-sub connector kit) SS5Q13-09FD2-D . 1 set: F kit 9 station manifold base SQ1130-5-C6 .

Table of Contents

9 @0 @8 #4 $2 $3 $9 %2 ^0 ^7 Qty. 1 1 1 1 2 2 2 2 2 4 2 1 1 2 2 4 2 2 6 4 8 2 6 2 1 2 4 4 3 4 4 1 1 4 1 4 2 1 1 1 2 2 1 1 1 2 1 1 1 8 4 2 1 6 No. q w e r t y u i o !0 !1 !2 !3 !

VS 8-2/VS 8-4

EVS1002-13-11H Gasket 1 AXT632-17-7 (M3 x 30, with washer, nickel plated) Hexagon bolt 2 EVS1001-9-1 Light cover 3 29.5 x 1.2 O-ring 4 OR-0500-130-H O-ring 5 29 Series VS 8-4 S R Construction Construction Metal seal Rubber seal VSS8-4-FG-SVSR8-4-FG-Sr e r e w t q t q w VSS8-4-FG-DVSR8-4-FG-De r r e w q t t q w VSR8-4-DFHG FIG FJG VSS8-4-DFHG FIG FJG e r r e t q w t q w VSR8-4-DFDAG FDBG FDCG

SY

DIP.SW B RATE ADDRESS STATION NO. 0 0 0 1 1 1 PW LRUN 9 9 9 ON POWER ALARM COMM 1 2 2 2 ON 8 8 8 O N 3 3 3 7 7 7 0 4 4 4 6 6 6 SD RD LERR. 5 5 5 POWER SEND X10 X1 1 2 3 4 5 6 7 8 OFF Terminal block LED description Note Cable wiring 24V 24V 0V D G D G 0V 24V 24V 0V A B SG FG 0V 24V 0V +24V 24G DA DB FG DG Detail LED description POWER COMM Lights up with power input to SI unit Lights up when

SV

Core wire colors 7 1 8 1 7 3 2 8 7 1 8 3 2 8 White Brown Green Yellow Gray Pink Blue Shield 1 2 3 4 5 6 7 8 1 2 3 4 5 6 7 8 2 3 1 7 2 3 White Brown Green Yellow Gray Pink Blue Shield 1 2 3 4 5 6 7 8 1 2 3 4 5 6 7 8 6 5 4 4 5 6 4 5 6 6 5 4 Socket connector pin arrangement Plug connector pin arrangement Socket connector pin arrangement Plug connector pin arrangement Connections Connections

Proposals for Energy Saving

type (without silencer) 10/Rc 1/4 8/Rc 1/8 Threaded Threaded 6/Rc 1/8 6/Rc 1/8 6/Rc 1/8 6/Rc 1/8 10/Rc 1/4 6/Rc 1/8 8/Rc 1/8 10/Rc 1/4 12/Rc 3/8 12/Rc 3/8 8/Rc 1/8 10/Rc 1/4 12/Rc 3/8 12/Rc 3/8 16/Rc 1/2 16/Rc 1/2 Refer to page 3.4-1 of No. 3 for details.

SZ3000

Note Mounting position Without power supply terminals With power supply terminals 1: Vertical connector 2: Horizontal connector P: Positive common N: Negative common 1 2 1 2 P N D side SZ3000-40-2A-D For D-sub connector SZ3000-40-1A-D 1 2 1 2 P N D side SZ3000-40-4A-D For flat cable 26 pins SZ3000-40-3A-D Note) The assembly part numbers with power supply terminals are 24VDC specifications

SX

ADDRESS 4632 4632 4632 1 1 1 9 9 9 PW LRUN ON POWER ALARM COMM Name of terminal block, LED Note Cable wiring 2 2 2 1 ON 8 8 8 O N 3 3 3 7 7 7 4632 4 4 4 6 6 6 SD RD LERR. 5 5 5 POWER SEND x 10 x 1 1 2 3 4 5 6 7 8 OFF DG 24 V 0 V D G D G 0 V 24 V 24 V 0 V A B SG FG 0 V 24 V 24 V 0 V +24V 24G DA DB FG Description LED ON for SI unit power supply input Description LED Description LED POWER COMM

Controller/Driver LEC/JXC Series <Single Axis Controllers> Step Data Input Type Page 560 Gateway Unit Page 572 Programless Type Page 576 Step Motor LEC-G Series Step Motor Servo Motor (Servo/24 VDC)/ (Servo/24 VDC)/ (24 VDC)/ LECP6 Series LE

1 !2 w e !3 !4 r t y u i !5 !6 No.

SZ3000

1 i q w t y e 5(R) SOL.a SOL.b 3(R) 1(P) SZ3C60K/With back pressure check valve 4(A) 2(B) SOL.b 5(R) SOL.a 3(R) 1(P) o 5 (R) 1 (P) 3 (R) Component Parts SZ3A60K/With back pressure check valve Material Note For N.C. (Normally closed) Description No. q w e r t y u i o Resin/HNBR Spool valve assembly e r t !0 !1 i q q u y For N.O.