VQD1000 series 4 port, direct operated, poppet solenoid valve offers large flow capacity in a compact, lightweight body. Vacuum applications (up to -100kPa) are possible. Components of the VQD1000 valves that are in contact with fluid are all copper free. The VQD series offers a remarkably quick and stable response time.

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

U side D side Stations 1 2 3 4 5 VQD1151-5L Port size (Body ported only) M5 thread M5 VQD1000-10A-5 2B 4A 3R 1P 2B 4A VV4QD15-05M5 2-8-8 9 4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 Manifold Option Blanking plate assembly/Body ported VVQD1000-10A-2 VQC Blanking plate assembly includes 2 screws and gasket SQ VQ0 VQ4 Blanking plate assembly/Base mounted VVQD1000-10A-5 VQ5 Courtesy

CATALOG

3 0 1.3 1.06 2.19 3/8-18 1 3/8 2.13 3 3/4 2.48 5 1/4 1 1 1/4 2 3/8 2 5/16 3/4-16 7/8 3/8 3/8 19/32 325 (3.25) 1 5/8 3.9 2 1 1/2 5/8 1 1/4 3/8-24 3 3/4 0 1.57 1.18 2.76 1/2-13 1 5/8 2.59 4 1/4 2.72 6 5/64 1 3/8 1 1/2 2 5/8 2 11/16 1-14 1/2 5/8 5/8 400 (4) 1 3/8 1 5/8 4.7 2 1 1/2 5/8 1 1/4 3/8-24 4 1/2 0 1.57 1.18 3.32 1/2-13 1 5/8 2.59 4 1/4 2.72 6 5/64 2 1/10 2 5/8 2 11/16 1-14 1/2 5/8 5/

V

Model A L D Applicable Fitting Size d KQP-04 16 32 6 4mm KQP-03 16 32 6 5/32 KQP-06 18 35 8 6mm KQP-07 18 35 8 1/4 KQP-08 20.5 39 10 8mm KQP-09 20.5 39 10 5/16 KQP-10 22 43 12 10mm KQP-11 22 43 12 3/8 BRACKET ASSEMBLY NUMBER (IF ORDERED SEPARATELY) F1 Type SX3/5/7000-16-2A (With Mounting Screw) F2 Type SX3/5/7000-16-1A (With Mounting Screw) Courtesy of Steven Engineering, Inc. !

2

08, 09, 10, 11 Flow rate L/min (ANR) Flow rate L/min (ANR) Flow rate L/min (ANR) 03, 04 400 200 06, 07 02 01, 23 300 50 03, 04 200 100 01, 23 100 0 0 0 5 0 10 5 0 10 5 0 10 Number of needle rotations Number of needle rotations Number of needle rotations Note) -U10/32 has the same specification as M5.

Table of Contents

08 67 15.5 34 17.5 14 22 15.6 23.1 27 24 35 1/4" ZFC201-07 AMJ 5/16" ZFC201-09 Misc.

AC Servo Motor Driver (Network card type ）

5 5.

5 Port Solenoid Valve

S0710-5 S0710-5 S0720-5 S0720-5 S0720-5 S07A0-5 S07A0-5 3 66 62 4 72 2 1 3 39 12 12 12 12 12 5 2 x M4 mounting hole 4 x M4 mounting hole Input block SI unit Stations D side 1 2 3 4 5 6 7 8 n U side 3(R) port C8: 8 (For A, B port metric size) N9: 5/16" (For A, B port inch size) Input connector M8 socket Input connector M12 socket Communication connector M12 plug DIN rail clamping screw Plug-in

Compact

ao . , , , , t o o 3 . , , . , 05 stePping a ''.a: ' , . a , : a : l r : : i : l ::: I iob' ' ', ' t99;:9i1':i1:t t: llli,2.gtepping O8: 12mm lead , , . , , 1 ( } . u 5 asbinriea,i : r iri llliqq'i'' o5 stepoinq 30 08; zmm lead o2 stepping 80 08; 5mm lead 10.03 30 08; 2mm lead s5 stepping 80 08; 5mm lead a I a a a 100 O8; 6mm lead o2 stepping 200 08; 12mm lead 10.05 I M <-iD;;,;; uo100 08

Vacuum Ejector Series ZM

Maximum Ejector Stations (Max. operable nos. simultaneously) Ejector model ZMA053 ZMA054 ZMA073 ZMA074 ZMA103 ZMA104 ZMA133 ZMA134 ZMA153 ZMA154 Manifold model R L 10 8 5 4 3 ZZMA Stations 06 10 10 8 6 5 ZZMA Stations 06B R L 10 8 5 4 3 ZZMA Stations 04 10 10 8 6 5 ZZMA Stations 04B Effective area of external silencer is 160 mm2.

AC Servo Motor Driver

6 7 7 7 8 8 8 1 2 3 4 5 6 7 8 1 2 3 4 5 6 7 8 1 2 3 4 5 6 7 8 (Note 5) (Note 5) 1 2 3 4 5 6 1 2 3 4 5 6 1 2 3 4 5 6 1 2 3 4 5 6 1 2 3 4 5 6 1 2 3 4 5 6 RDP (Note 8) (Note 2) 150 RDN 8 7 7 8 7 7 8 7 7 8 8 8 (Note 6) Branch connector (Note 6) Branch connector (Note 6) Branch connector Note 1.

C95Series

DFSIIWDJ59W> lmm) DA59W DF5BA:DE5NT (mm) DF5BA A B A B A .B A B A B , 32 0.5 0 4.5 2 7 4.5 11 8.5 12 9.5 , 40 0.5 0 4.5 2 7 4.5 11 8 .5 12 9.5 , SO 1 0 5 2.5 7.5 5 11 .5 9 12.5 10 Ht H~ HI Hs 32 24.S 35 25 32.5 t 40 27.S 38.5 27.5 36.5 I SO 34.5 43.5 34 41 ; 80 4 2.5 6 6 .5 10.5 9 14.5 13 15.5 14 , 100 4 2.5 8 6.5 10.5 9 14.5 13 15.5 14 J 63 39.5 46.5 39 46 '. 63 1 0 5 2.5 7.5 5 11 .5 9 12.5

Volume of Release Air Tank: V2: L [3.2 cm³ (See Catalog for Calculation)], Stations: 1 Station, Voltage: 5 (24 VDC)

Volume of Release Air Tank: V2: L [3.2 cm³ (See Catalog for Calculation)], Stations: 4 Stations, Voltage: 5 (24 VDC)

Volume of Release Air Tank: V2: L [3.2 cm³ (See Catalog for Calculation)], Stations: 7 Stations, Voltage: 5 (24 VDC)

Volume of Release Air Tank: V2: L [3.2 cm³ (See Catalog for Calculation)], Stations: 2 Stations, Voltage: 5 (24 VDC)

Volume of Release Air Tank: V2: L [3.2 cm³ (See Catalog for Calculation)], Stations: 7 Stations, Voltage: 24 VDC, Electrical Entry: -, Blanking Plate: -, CE-compliant: -

Volume of Release Air Tank: V2: L [3.2 cm³ (See Catalog for Calculation)], Stations: 2 Stations, Voltage: 24 VDC, Electrical Entry: -, Blanking Plate: -, CE-compliant: -

Main Body Shape: Unit, Additional Function: Valves for Vacuum Generation / Vacuum Destructive Valve, Vacuum Port Connecting Port Shape: M5, Air Supply Port Connecting Shape: M5, Application: Manifolds, Suction Flow(l/min): 16, Electrical entry: L-type plug connector, Light/surge voltage suppressor: With light/surge voltage suppressor, Solenoid valve rated voltage: 24 V DC, Valve Type: N.O

Main Body Shape: Unit, Additional Function: Valves for Vacuum Generation / Vacuum Destructive Valve, Vacuum Port Connecting Port Shape: M5, Air Supply Port Connecting Shape: M5, Application: Manifolds, Suction Flow(l/min): 16, Electrical entry: L-type plug connector, Light/surge voltage suppressor: With light/surge voltage suppressor, Solenoid valve rated voltage: 24 V DC, Valve Type: N.O