V

1/4 E X H A U S T P O R T Metric 00 Built-in Silencer 04 4mm 06 6mm Imperial 00 Built-in Silencer 07 1/4 Models O.D size d D1 D2 L1 L2 L3 L4 M1 Weight AQ240F-04-04 4 9.5 8.9 39.3 5 13.7 23.4 13 5.7 AQ240F-06-06 6 11.5 11 43.9 6 14.7 26.5 14 7.3 AQ340F-06-06 6 11.5 11 45.2 6.3 19.6 31.7 14 12.5 Courtesy of Steven Engineering, Inc. !

2

6 (For mounting) Plug side 50 Panel mounting hole Component Parts t q No.

New

q VXF2 A<6 VXFA2 A<6 t t y r r w w e e q q Component Parts Component Parts No.

Table of Contents

P Q R 6 6 8 24.3 26.2 16.8 18.7 S 12.8 15.2 8 Applicable tubing O.D.

Vacuum Ejector Series ZM

(-Q) ZM071H-K5LZ (-Q) ZM131M-K5LZ (-Q) ZM071H-K5LZ-E15 (-Q) ZM131M-K5LZ-E15 (-Q) ZM101H-K5LZ (-Q) ZM101H-K5LZ-E15 (-Q) 987 Series ZM Model Nozzle dia.

5 Port Solenoid Valve

Refer to How to Order Manifold. q !5 !4 @4 !3 !2 @3 @2 !1 !0 o i !6 !7 w e r !8 @1 @6 @5 Cable 0.3 mm2 x 25 pins O.D. 1.4 !9 y t @0 u 10 Seal (Length) Polarity Terminal 015 no.

AC Servo Motor Driver (Network card type ）

4 6.

AC Servo Motor Driver

6 7 7 7 8 8 8 1 2 3 4 5 6 7 8 1 2 3 4 5 6 7 8 1 2 3 4 5 6 7 8 (Note 5) (Note 5) 1 2 3 4 5 6 1 2 3 4 5 6 1 2 3 4 5 6 1 2 3 4 5 6 1 2 3 4 5 6 1 2 3 4 5 6 RDP (Note 8) (Note 2) 150 RDN 8 7 7 8 7 7 8 7 7 8 8 8 (Note 6) Branch connector (Note 6) Branch connector (Note 6) Branch connector Note 1.

•

(Same sunace) (n =2, 4. 6, S .. ) (I = 4 , 8, 12. 1 6'~"),--,-_ "-=,-4" '::J ~".-, ..,( ", = S. 12 ' =-6._) -1 R. Different surfaces 35 110 1 ~ ~N~_~s.

ZMA

10 8 5 4 ZZMA Stations 04 ZQ 10 10 8 6 ZZMA Stations 04B Effective area of external silencer is 160 mm2.

Air Pilot Operated

Cntering l2l AXT 334-14 Cushion-Pilot Cover "8" Enc AXT 334-12-2 Spool & Sleve 440F S.S. 6 O.Rino.S & S {6) 6una N ARP 568,014 7 Soacer. B End AXT 334-16-2 Q *-r iN I Gasket . Pilot Cover & Spacers (4) Buna N AXT 334.7N-1 9 Soacer.

Air Pilot Operated Series NVSA

Cntering l2l AXT 334-14 Cushion-Pilot Cover "8" Enc AXT 334-12-2 Spool & Sleve 440F S.S. 6 O.Rino.S & S {6) 6una N ARP 568,014 7 Soacer. B End AXT 334-16-2 Q *-r iN I Gasket . Pilot Cover & Spacers (4) Buna N AXT 334.7N-1 9 Soacer.

Series 10-VQD1000 4 Port Direct Operated Poppet Solenoid Valve

Series 10-VQD1000 [Option] 4 Port Direct Operated Poppet Solenoid Valve How to Order Valve Clean series Valve option Nil Standard (2 W) V Vacuum (2 W) U For large flow (3.2 W) W For large flow, Vacuum (3.2 W) Energy saving type Rated voltage 5 24 VDC 6 12 VDC Body type 2 Body ported (Single unit) 3 Body ported (Manifold) 5 Base mounted 10 V Q D 1 1 5 1 U 5 L M5 Electrical entry

4 Port Direct Operated Poppet Solenoid Valve Series VQ D1000

Note 2) 1 (P) 3 (R) Note 3) 1.13-4 Series VQD1000 Construction JIS Symbol (A) 4 (B) 2 Part name Component Parts Note Material No. q w e r t y u i o !0 Solenoid coil assembly Sub-plate Body Spool valve Poppet Guide ring Return spring Manual override Gasket Round head screw VQD1000-S-M5(Base mounted only) Aluminum ZDC 1 (P) 3 (R) q u e !

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

9 q r !5 y i !8 o !6 e u @4 @0 @1 @2 w !4 !2 !0!1 !3 !

Rotary Actuator

6 y !5 !2 o r q w @6 @7 @5 CRQ2 MSQ MSZ CRQ2X MSQX MRQ !9 @3 @4 Component Parts No. Description Material Note 1 Body Aluminum alloy Anodized No.

IZx-OMT0049

Bar 40 16 D 1 6H R F IZTB (1) (2) (3) (4) (5) (6) (7) (8) (6) Plug location (1) Model (5) One-touch Fitting Symbol Metric size Symbol Plug location Symbol Model 4H 4 straight Nil Without plug 40 Standard, AC type 42 Dual AC type Q High voltage cable side 6H 6 straight 8H 8 straight R The opposite side of the high voltage cable (2) Bar length AH 10 straight (7) Bracket for bar Symbol Type

Series 10-VQD1000 [Option] 4 Port Direct Operated Poppet Solenoid Valve

Series 10-VQD1000 [Option] 4 Port Direct Operated Poppet Solenoid Valve How to Order Valve Clean series Valve option Nil Standard (2 W) V Vacuum (2 W) U For large flow (3.2 W) W For large flow, Vacuum (3.2 W) Energy saving type Rated voltage 5 24 VDC 6 12 VDC Body type 2 Body ported (Single unit) 3 Body ported (Manifold) 5 Base mounted 10 V Q D 1 1 5 1 U 5 L M5 Electrical entry CE-compliant

IZx-OMX0087

Balance control selection mode . 4-4-6. Maintenance detection level selection mode . 4-4-7. Key-lock setting mode . 4-4-8. Ion generation stop mode . 4-5. Alarm functionIZT43 . 4-5-1. Alarms for IZT43 . 4-5-2. Details of the alarmsIZT43 . 4-6.Replacement of the assembly . 4-6-1. Replacement of the emitter cartridge . 4-6-2.

o

(H) < In Caee ot B:lT) 0 18 (4.5) Oia 6 6 i=o.ar (ro.5i0a5(115) TUpe 532,r Side Ported L Type Plug Connector (L) M Type Plug Connector(M) NVVsJ3-532staiions -M5, B3T \ | s l ATTI T \i.1 J_ 19 1 e : 9 6 t ' ' i 5 _ 3 ^i :n l ' g r018 (4 5) oLa 11.81 {300) Stationsn) 2 3 5 6 7 a 9 1 0 l1 12 13 a4 '15 16 17 1a 't9 20 L1 1.63 2.05 (41.5) (b2) 2.45 (62.5) 2.47 (731 3.29 3.70 (835) (s4) (104 5)