Actuation Type: 1 (2 Position Single), Sealant: 0 (Metal Seal), Function: Standard (1W), Voltage: 5 (24VDC), Light & Surge Suppressor: Yes, Manual Override: Non-locking Push Style (Tool Required), Protection: Dust Proof, 1: 1, Piping Specification: Side Ported, Port Size: 04 (Rc1/2), Thread: T (NPTF)

Actuation Type: 2 Position Single, Sealant: Metal Seal, Function: Standard (1W), Voltage: 24VDC, Light & Surge Suppressor: Yes, Manual Override: Non-locking Push Style (Tool Required), Protection: Dust Proof, 1: 1, Piping Specification: Side Ported, Port Size: Rc1/2, Thread: NPT, Composite Symbol: -

Actuation Type: 2 Position Single, Sealant: Metal Seal, Function: Standard (1W), Voltage: 24VDC, Light & Surge Suppressor: Yes, Manual Override: Non-locking Push Style (Tool Required), Protection: Dust Proof, 1: 1, Piping Specification: Side Ported, Port Size: Rc1/2, Thread: NPTF, Composite Symbol: -

VQ valves are ideal for applications requiring high speed, frequent operation, stable response time and long service life. Innovative mounting methods allow valves to be changed without entirely disassembling the manifold. Built-in one-touch fittings save piping time and labor. Fluid: air/inert gas, Operating pressure range: 0.10 - 1.0MPa, Effective area mm 2 (Cv): 2 position metal seal

VQ valves are ideal for applications requiring high speed, frequent operation, stable response time and long service life. Innovative mounting methods allow valves to be changed without entirely disassembling the manifold. Built-in one-touch fittings save piping time and labor. Fluid: air/inert gas, Operating pressure range: 0.10 - 1.0MPa, Effective area mm 2 (Cv): 2 position metal seal

VQ valves are ideal for applications requiring high speed, frequent operation, stable response time and long service life. Innovative mounting methods allow valves to be changed without entirely disassembling the manifold. Built-in one-touch fittings save piping time and labor. Fluid: air/inert gas, Operating pressure range: 0.10 - 1.0MPa, Effective area mm 2 (Cv): 2 position metal seal

42

*VQ5100-51(-Q)2 setsValve part no. (Stations 1 and 2) *VQ5200-51(-Q)2 setsValve part no. (Stations 3 and 4) *VQ5300-51(-Q)1 setValve part no.

VQ5000

How to order single valves (example) T 5 04 VQ5100 Thread type (ports P, R and A, B ) Cylinder port size How to order valves (example) Nil N T F Rc NPT NPTF G VQ5100 R 5 04 External pilot specification How to order manifolds (example) VV5Q51 T 08 03 FU1 Thread type (ports P, R and A, B) Cylinder port size Nil N T F Rc NPT NPTF G External pilot port 2-Rc1/8 External pilot port Rc1/8

Base Mounted Type, VQ5000 Series, 5 Port Metal Seal/Rubber Seal Solenoid Valve

How to order single valves (example) T 5 04 VQ5100 Thread type (ports P, R and A, B ) Cylinder port size How to order valves (example) Nil N T F Rc NPT NPTF G VQ5100 R 5 04 External pilot specification How to order manifolds (example) VV5Q51 T 08 03 FU1 Thread type (ports P, R and A, B) Cylinder port size Nil N T F Rc NPT NPTF G External pilot port 2-Rc1/8 External pilot port Rc1/8

VQ5000

In addition, 3 of the wiring types are available with IP65 enclosures. 50 63 80 100 125 140 160 180 200 250 1100 1000 900 800 700 600 500 400 300 200 100 0 Perpendicular, upward actuation Horizontal actuation VQ5100--04 VQ5101--04 IP65 compatible Enclosure Individual wiring type kit (Connector) C It is when the cylinder is extending that is meter-out controlled by speed

Plug-in/Plug Lead: Single Unit

How to Order Single Valves (Example) VQC VQ5100 5 04 SQ Cylinder port Port size Thread type 1(P), 5(R1), 3(R2) and 4(A), 2(B) port How to Order Manifold VQ0 VQ5100 R 5 04 VQ4 Nil N T F Rc NPT NPTF G External pilot specifications VQ5 VQZ How to Order Manifold VQD VV5Q51 08 03 FU1 Cylinder port Port size Thread type 1(P), 5(R1), 3(R2) and 4(A), 2(B) port External pilot port Rc 1/8 External

ZP

A r Buffer stroke t Vacuum inlet y Width across flats M Connection thread S 10 91 57 23 20 129 67 51 30 139 77 40 175 87 77 50 185 97 10 13 46 29.9 21 P 10 8 M5 x 04 06 2.5 10 91.5 57.5 0.8 23 20 129.5 67.5 51 30 139.5 77.5 40 175.5 87.5 77 50 185.5 97.5 Applicable tubing O.D.

CATALOG

04 4mm 06 6mm Imperial 00 Built-in Silencer 07 1/4 Models O.D size d D1 D2 L1 L2 L3 L4 M1 Weight AQ240F-04-04 4 9.5 8.9 39.3 5 13.7 23.4 13 5.7 AQ240F-06-06 6 11.5 11 43.9 6 14.7 26.5 14 7.3 AQ340F-06-06 6 11.5 11 45.2 6.3 19.6 31.7 14 12.5 Courtesy of Steven Engineering, Inc. !

Table of Contents

O.D. 1 8 1 4 1 8 1 4 3 8 1 8 1 4 3 8 1 8 1 4 3 8 1 4 3 8 1 2 1 4 3 8 1 2 1 4 3 8 1 2 1 4 3 8 1 2 KFY04-01 KFY04-02 KFY06-01 KFY06-02 KFY06-03 KFY08U-01 KFY08U-02 KFY08U-03 KFY08N-01 KFY08N-02 KFY08N-03 KFY10U-02 KFY10U-03 KFY10U-04 KFY10N-02 KFY10N-03 KFY10N-04 KFY12U-02 KFY12U-03 KFY12U-04 KFY12N-02 KFY12N-03 KFY12N-04 28 32 31 37 51 48 50 55 47 48 53 58 63 89 57 62 88 79 79 93 76 78 92

1

Manifold Metal Base Plug-in Page 40 Type 50/ Side ported Type 51/ Bottom ported Type 52/ Top ported Type 50/Side Ported, Type 51/Bottom Ported, Type 52/Top Ported Page 41 Metal Base Plug-in D-sub connector D-sub Connector, Flat Ribbon Cable, PC Wiring System [IP40] Flat ribbon cable Page 43 Type 50/Side Ported Page 43 Type 51/Bottom Ported PC wiring Page 63 Type 52/Top Ported Page 68 Wiring

ZP

Note 3) ZP3B-T2B(JB/K)20-B5 ZP3-(04/06/08)UM; ZP3-(04/06/08)B; ZP3-(04/06/08)UM; ZP3-(04/06/08)B; ZP3-(04/06/08)UM; ZP3-(04/06/08)B; ZP3-(04/06/08)UM; ZP3-(04/06/08)B; ZP3-(04/06/08)UM; ZP3-(04/06/08)B; ZP3-T(04/06/08)UM;(J/K)3-@ ZP3-T(04/06/08)B;(J/K)3-@ ZP3-T(04/06/08)UM;(J/K)6-@ ZP3-T(04/06/08)B;(J/K)6-@ ZP3-T(04/06/08)UM;(J/K)10-@ ZP3-T(04/06/08)B;(J/K)10-@ ZP3-T(04/06/08)UM;(JB/K)15-

Table of Contents

03 04 q Description No.

Table of Contents

Silencer (AN203-KM81 pc) 51 26 16 2.

SY

/location) SUP/EXH block assembly (standard): SX3000-51-2A SUP/EXH block assembly (R type): SX3000-51-6A SUP/EXH block assembly (S type): SX3000-51-7A SUP/EXH block assembly (RS type): SX3000-51-8A 6 5 4 C4 3 2 1 Stations or layout 2 position Single solenoid a C 6 Double solenoid For mixed port sizes For SMC use only Enter ordered part numbers. Order no. Part no. Qty. Part no.

2

)-A Y610-(03)-A 04-A 02A VHS40-03A 04A VHS40-06A VHS50-06A 10A Pressure relief 3 port valve Note 6) VHS20-01A 02A VHS30-02A 03A Attachment 02-A E400-03-A 04-A 06-A Piping adapter Note 6) E100-M5-A 01-A E200-02-A 03-A 02-A E300-03-A 04-A E500-06-A E600-06 10 02-A IS10E-4003-A 04-A 06-A Pressure switch with piping adapter Note 6) 01-A IS10E-2002-A 03-A 02-A IS10E-3003-A 04-A Cross spacer