SMC Corporation of America
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(The standard valve has an individual exhaust for the pilot valve.) 4-14-40 41 Series VQZ Replacement Parts Base Mounted One-touch Fitting Assembly (For cylinder port) C3 C4 C6 C8 C10 Fitting size M5 (VQZ100 only) Model VQZ100 VVQ1000-50A-C3 VVQ1000-50A-C4 VVQ1000-50A-C6 VVQ1000-50A-M5 V100 VQZ200 VVQ1000-51A-C4 VVQ1000-51A-C6 VVQ1000-51A-C8 VQZ300 VVQ2000-51A-C6 VVQ2000-51A-C8 VVQ2000-51A-C10

, C8 C6: One-touch fitting assembly for 6 B B B 4 2-Rc 1/8, 1/4, C6, C8 C6: One-touch fitting assembly for 6 C8: One-touch fitting assembly for 8 VQD 2 A C8: One-touch fitting assembly for 8 B 23 P = 22 L1 L2 L3 (For C6, C8) ( 9.5) DIN rail clamp screw 80 ( 9.5) 2-M4 mounting hole (For C6, C8) (For C6, C8) 4.5 2-M6 mounting hole IN IN IN IN 5.5 80 6.5 (40) 69.5 58 37.5 39.5 Residual pressure

): VQZ1 2 wGwC3, C4, C6, M5 0 1 300 (Lead wire length) 103.5 47.5 5.5 (M5: 6) 5.5 (M5: 6) 22.2 Mounting holes 0.8 SY 4 8.6 10 SMC SMC 2 Cover diameter 1.6 Cross section 0.34mm2 R2 25.8 2-C3, C4, C6, M5 SYJ 60.3 C3: One-touch fittings for 3.2 Manual override SX C4: One-touch fittings for 4 C6: One-touch fittings for 6 VK M5: M5 thread VZ 9.5 (C3,C4,C6) VF (47.5) VFR VP7 25.5 (M5) 26.5 5.4

(M): VQZ115-lMl-C3, C4, C6, M5-PR (Lead wire) Cover dia 1.5 Cross section 0.23mm2 300 60.5 65.5 300 55.5 59 (Lead wire) Indicator light Indicator light 40.5 41.5 Cover dia 1.5 Cross section 0.23mm2 : AC : AC 2.10-8 VQZ100/200/300 Body Ported VQZ200 Valve single unit 2-C4, C6, M5 Grommet (G): VQZ2l2(R)-lGl-C4, C6, M5 C4: One-touch fittings for 4 C6: One-touch fittings for 6 2-3.5 Mounting

light 37 <42> < >: AC 4-14-9 Body Ported 10 Series VQZ100/200/300 Dimensions: VQZ300 Single unit Grommet (G): VQZ32(R)-G-C6/C8/C10/02 C6, C8, C10, 02 C6: One-touch fitting for 6 C8: One-touch fitting for 8 75.5 300 (Lead wire length) C10: One-touch fitting for 10 60.5 2-4.5 mounting hole 02: Rc 1/4 41.8 22 23.4 mounting hole 28.5 20 A 4 13 18 SMC 38 2 Cover dia.1.6 Cross section 0.34 mm2

fitting ass'y for 6 C8: One-touch fitting ass'y for 8 DIN rail clamp screw 23 P=22 L1 L2 L3 (C6, C8) (C6, C8) 9.5 9.5 (C6, C8) (C6, C8) Mounting hole for 2-M4 9.5 9.5 4.5 Mounting hole for 2-M6 IN IN IN IN 5.5 80 6.5 (40) 69.5 58 80 37.5 39.5 Residual pressure release manual override U side D side Stations (5) 10.5 1 2 3 n 22 7 (59.5) 58 20.5 2-Rc(PT)1/8, 1/4, C6, C8 C6: One-touch fitting

(The standard valve has an individual exhaust for the pilot valve.) 4-14-40 41 Series VQZ Replacement Parts Base Mounted One-touch Fitting Assembly (For cylinder port) C3 C4 C6 C8 C10 Fitting size M5 (VQZ100 only) Model VQZ100 VVQ1000-50A-C3 VVQ1000-50A-C4 VVQ1000-50A-C6 VVQ1000-50A-M5 V100 VQZ200 VVQ1000-51A-C4 VVQ1000-51A-C6 VVQ1000-51A-C8 VQZ300 VVQ2000-51A-C6 VVQ2000-51A-C8 VVQ2000-51A-C10

(The standerd valve has an individual exhaust for the pilot valve.) 2.10-38 Series VQZ Replacement Parts Base Mounted One-touch Fitting Assembly (For cylinder port) C3 C4 C6 C8 C10 Fitting size Series M5 (VQZ100 only) VQZ100 VVQ1000-50A-C3 VVQ1000-50A-C4 VVQ1000-50A-C6 VVQ1000-50A-M5 VQZ200 VVQ1000-51A-C4 VVQ1000-51A-C6 VVQ1000-51A-C8 SY VQZ300 VVQ2000-51A-C6 VVQ2000-51A-C8 VVQ2000-51A-C10

M5 N1 N3 N7 C3 C4 C6 M5 N1 N3 N7 A S S E M B LY VVQ1000-R-1-C6 VVQ1000-52A-C8 (VQ1000) O F B A C K P R E S S U R E A S S E M B LY [-B] VVQ1000-57A DIN R A I L M O U N T E D B R A C K E T [-D] VA C U U M E J E C T O R U N I T C H E C K VA LV E F O R P R E V E N T I O N O F S I L E N C E R (EXH P O R T) VVQ1000-JA BM (VQ1000) VVQ1000-18A Courtesy of Steven Engineering, Inc. !

Part No WX Y S d D R Gasket No MY1M16G 30 6.5 9 4 8.4 1.1 C6 MY1M20G 32 8 6.5 4 8.4 1.1 C6 MY1M25G 38 9 4 6 11.4 1.1 C9 MY1M32G 48 11 6 6 11.4 1.1 C9 MY1M40G 54 14 9 8 13.4 1.1 C11.2 MY1M50G 74 18 8 10 17.5 1.1 C15 MY1M63G 92 18 9 10 17.5 1.1 C15 16,20,25,32,40,50,63 bottom piping D I M E N S I O N S C E N T R A L I Z E D P I P I N G T Y P E: 25 ~63 T A B L E O F D I M E N S I O N S S E E

O Full circuit system lO 3 port selector system Excessive leakage from adsorption area lf workDiece has a vent hole or if air leaks from batween the pad and work, ejector with large nozzle diameter and large suction flow rate will be best. lf possible, make a leakage estimation by effective oritice area on the leakage side beforehand.

O Full circuit system lO 3 port selector system Excessive leakage from adsorption area lf workDiece has a vent hole or if air leaks from batween the pad and work, ejector with large nozzle diameter and large suction flow rate will be best. lf possible, make a leakage estimation by effective oritice area on the leakage side beforehand.

Series: 2 (VQ21), Body Style: A (Single Unit), Coil Voltage: 3 (110VAC 50/60HZ), Lead Wire: Y (DIN Terminal), Voltage Protection: None (Or w/Surge Suppressor in Case of AC Volts), Manual Override: None, Port Size: C6 (ø6 One-touch Fitting), Option: LF [L Type (VQ21 Only) + Bracket]

Series: 2 (VQ21), Body Style: A (Single Unit), Coil Voltage: 5 (24VDC), Lead Wire: Y (DIN Terminal), Voltage Protection: None (Or w/Surge Suppressor in Case of AC Volts), Manual Override: None, Port Size: C6 (ø6 One-touch Fitting), Option: LF [L Type (VQ21 Only) + Bracket]

Series: 2 (VQ21), Body Style: A (Single Unit), Coil Voltage: 5 (24VDC), Lead Wire: Y (DIN Terminal), Voltage Protection: Z (DC: Light & Surge Suppressor; AC: w/Full Wave Rectifier), Manual Override: None, Port Size: C6 (ø6 One-touch Fitting), Option: LF [L Type (VQ21 Only) + Bracket]

Series: VQ21, Body Style: Single Unit, Coil Voltage: 110VAC 50/60HZ, Lead Wire: DIN Terminal, Voltage Protection: None (Or w/Surge Suppressor in Case of AC Volts), Manual Override: None, Port Size: ø6 One-touch Fitting, Option: LF [L Type (VQ21 Only) + Bracket]

Series: VQ21, Body Style: Single Unit, Coil Voltage: 24VDC, Lead Wire: DIN Terminal, Voltage Protection: None (Or w/Surge Suppressor in Case of AC Volts), Manual Override: None, Port Size: ø6 One-touch Fitting, Option: LF [L Type (VQ21 Only) + Bracket]

Type: Solenoid Valves, Application: Single Unit, Mounting Orientation: Direct, Voltage: DC24V, Specification: Standard / Drip-Proof / Lubrication Free, Valve Type: 2-Port Valve, Actuation: [Single] Single, Status at Power Off: Self-Recovery (Spring Return), Valve Positions: 2-Position Normally Closed, Pipe Port Type: One-Touch Plumbing, Connecting Tube Diameter: Ø6, Pressure Rating(MPa):

Series: VQ21, Body Style: Single Unit, Coil Voltage: 24VDC, Lead Wire: DIN Terminal, Voltage Protection: S [Surge Suppressor (DC Voltage)], Manual Override: None, Port Size: ø6 One-touch Fitting, Option: LF [L Type (VQ21 Only) + Bracket]