Size: 3 [ø20(ø14)], Valve Type: 2 [NO (Operating Pressure 1MPa)], Sealant: B (FPM seal), Thread: Rc(PT), Port Size: 20A (3/4), Voltage: 1 (100VAC 50/60HZ), Lead Wire: DZ (DIN Terminal w/Light & Surge Voltage Suppressor), Manual Override: Non-locking Push Style, Bracket: None, CE Compliant: Q (CE Compliant)

Size: 3 [ø20(ø14)], Valve Type: 2 [NO (Operating Pressure 1MPa)], Sealant: FPM seal, Thread: Rc(PT), Port Size: 3/4, Voltage: 24VDC, Lead Wire: DIN Terminal w/Light & Surge Voltage Suppressor, Manual Override: Non-locking Push Style, Bracket: None, CE Compliant: CE Compliant

Size: 3 [ø20(ø14)], Valve Type: 2 [NO (Operating Pressure 1MPa)], Sealant: FPM seal, Thread: Rc(PT), Port Size: 3/4, Voltage: 100VAC 50/60HZ, Lead Wire: DIN Terminal w/Light & Surge Voltage Suppressor, Manual Override: Non-locking Push Style, Bracket: None, CE Compliant: CE Compliant

2

M Q Q Note) D is maximum diameter.

Table of Contents

In the case of liquid: P Q = 1.9 x 106Av (9) G Q : Flow rate [l/min] Av : Flow coefficient [m2] P : Pressure difference [MPa] G : Relative density [water = 1] In the case of saturated aqueous vapor: Q = 8.3 x 106Av P(P2 + 0.1) (10) Q : Flow rate [m3/s] Av : Flow coefficient [m2] P : Pressure difference [Pa] P1 : Relative density [MPa]: P = P1 P2 P2 : Relative density [MPa] Front matter 4

Table of Contents

0 t t r i w e r i u w y e q Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com q VQ7-8-FG-DVQ7-8-FG-D-R !0 !0 t t r i w y e q r i w e q VQ7-8-D-R FHG FJG FIG VQ7-8-DFHG FJG FIG !0 !0 t t r i w y e q r i w e q VQ7-8-FPG-D!

2/3 Port Valve

-6A VNA1-8A VNA1-10A EZ, TZ, DZ: 9mm longer 4.2-7 VNA 10A, 15A, 20A, 25A Port size EZ, TZ, DZ: 9mm longer Main Port Rc(PT) A H I J K R F G L M B S N C T P D U Q E Model 3 8 1 2 3 4 VNA2-10A VNA2-15A VNA3-20A VNA4-25A 72.5 80.5 74.5 79.5 82.5 125.5 142.5 24.3 63 124 2.3 52 42 25 26 28 34 4.5 14 55 60.5 73 1 84 100 92 108 135.5 137 153 154 170 83.5 89.5 88.5 94.5 91.5 97.5 28.3 33.3 80 90

5 Port Solenoid Valve Series VFR2000/3000/4000/5000/6000

_r __ _ M ;; Interface Regulator NARBF2000-00-P-1 (Plug-in type) NARBF2000-00-P-2 (Non plug-in type) Interface Speed Control VVFS2000-20A-1 (Plug-In type) VVFS2DOO-20A-2 (Non plug-in type) 0:,0 ~ *ga 5. ~ Interface speed control / Q[Q ,-,.28 (32.5>', ' w ---i';; ,0.89 1<22.5l1 I I~ : .~~ U N i ~ -!

Air Slide Table

ZZ MXQ 20A-mm2 With end lock (20) Q Pilot port 2 x M5 x 0.8 Dimensions [mm] 5 J 3 7 Model J Q MXQ20A-10Zm2 91.5 MXQ20A-20Zm2 MXQ20A-30Zm2 101.5 MXQ20A-40Zm2 111.5 MXQ20A-50Zm2 127.5 MXQ20A-75Zm2 161.5 MXQ20A-100Zm2 234.5 38 0.5 9.5 3 72 16.2 10 53 61 MXQ20A-125Zm2 259.5 MXQ20A-150Zm2 284.5 3 MXQ20A-10Z2 7 5 J * Dimensions other than those listed above are the same as those for the standard

1

SY 3 5 1 0 0 1 q w r e t y u i o !0 !1 Base mounted q Series !

New

Body material: Aluminum, C37, Stainless steel Body material: Resin q q t t w w y u i y u i e e r r o o IN OUT IN OUT !0 !0 Component Parts Component Parts No.

7

3 IN(P1) r OUT(P2) VXB B A OUT(P2) A B VXE IN(P1) C C IN(P1) e e q w VXP q w VXD2A VXD2B VXR !4 i VXH !4 u u !0 VXF A B !1 i VX3 !2 !0 !2 VXA o !1 t !3 o OUT (P2) w IN(P1) !3 B r OUT(P2) A r IN (P1) e C e IN(P1) C q w q VXD2E, 2F, 2G VXD2C, 2D Component Parts Operation When coil !

VFR

1, Metal joint q, w End plate (D) !2, Connection bracket q, w, Gasket e, r, O-ring y, u End plate (D) !2, Connection bracket q, w, Gasket e, t, O-ring y, u Non plug-in type Plug-in type VVF4000-3A-2 !

5 Port Solenoid Valve Series SY3000/5000/7000/9000

SY3000 SY3000-26-9A(-Q) SY5000 SY5000-26-20A(-Q) SY7000 SY7000-26-22A(-Q) SY9000 SY9000-26-2A(-Q) Series Gasket assembly part no. SY3000-GS-2 SY5000-GS-2(-Q) SY7000-GS-2(-Q) Series Assembly part no.

SY

How to Find the Flow Rate (at air temperature of 20C) Subsonic flow when P1 + 0.1013 < 1.89 (P2 + 0.1013) Q = 226S P(P2 + 0.1013) Sonic flow when P1 +0.1013 1.89 (P2 + 0.1013) Q = 113S (P1 + 0.1013) Q : Air flow rate [l/min (ANR)] S : Effective area (mm) P : Pressure drop (P1 P2) [MPa] P1: Upstream pressure [MPa] P2: Downstream pressure [MPa] Correction for different air temperatures Multiply

VFS

0, Terminal i, Metal joint q, w, Gasket r, Receptacle assembly Manifold block !0, Metal joint q, w, Gasket r End plate (U) !1, Metal joint q, w End plate (U) !1, Metal joint q, w End plate (D) !2, Metal joint q, w, Gasket e, t, O-ring y, u End plate (D) !2, Metal joint q, w, Gasket e, t, O-ring t, y 03 04 VVF4000-1A-1Plug-in type Manifold block assembly !

5 Port Pilot Operated Solenoid Valve VFS1000/2000/3000/4000/5000/6000 Series

Body type Plug-in type VVFS2000-20A-1 Non plug-in type VVFS2000-20A-2 Part no.

HRS100/150

Right Left Rear Front w q Parts List e Part no. Applicable model No.

Thermo-chiller

/Japanese 1 pc.), Y-strainer 20A 1 pc., Barrel nipple 20A 1 pc., Drain pan for the pump Weight (dry state) 333 lbs (151 Kg) 339 lbs (154 kg) Note 4) q Facility water temperature: 90F (32C), w Circulating fluid: Tap water, e Circulating fluid flow rate: Rated flow, r Power supply: 200 VAC Note 5) q Facility water temperature: 90F (32C), w Circulating fluid: Tap water, e Circulating fluid temperature

42

2 Valve + Restrictor spacer (VVQ5000-20A-1 5) q AXT632-25-5 (M4 x 82) 4 q w w AXT632-25-10 (M4 x 34) 2 Not necessary when mounting the sub-plate.