1

SY 3 5 1 0 0 1 q w r e t y u i o !0 !1 Base mounted q Series !

Process Valve

Note 3) Vacuum pilot type CE-compliant pilot solenoid valves will become VO307VD DZ-Q. 2 1 1 2 569 A VNB Series How to Order Pilot Solenoid Valves Valve size 1/2/3/4 Valve size 5/6/7 and vacuum pilot type VO307 Q 1 5 D SF4 5 D 23 Q Body option CE-compliant CE-compliant Coil rated voltage CE-compliant Nil Q Standard Vacuum pilot Nil V CE-compliant Nil Q 1 2 3 Note 1) 100 VAC 50/60 Hz 200

VFR

1, Metal joint q, w End plate (D) !2, Connection bracket q, w, Gasket e, r, O-ring y, u End plate (D) !2, Connection bracket q, w, Gasket e, t, O-ring y, u Non plug-in type Plug-in type VVF4000-3A-2 !

Smooth Cylinder/Low Speed Cylinder

CDQSXB20-30D CDQSXB12-5D 60 CQ-M5 x 60 L 30 CQ-M3 x 30 L 35D 10D 65 x 65 L 35 x 35 L 40D 15D 70 x 70 L 40 x 40 L 6.5 Example) CQ-M3x30 L 4 pcs. 6.5 45D 20D 75 x 75 L 45 x 45 L REA 50D 25D 80 x 80 L 50 x 50 L CDQSXB25-5D 30D Mounting bolt 40 55 x 55 L CQ-M5 x 40 L REB 10D CDQSXB16-5D 45 30 x 45 L CQ-M3 x 30 L 15D 10D 50 35 x 50 L x 35 L REC 20D 15D 55 40 x 55 L x 40 L 6.5 CY 25D 20D 60 45

Free Mount Cylinder

Note 1) In the case of ZCUKR16-5D: 14.5 mm.

Thermo-chiller

Q: Heat generation amount I: Current Users equipment q Derive the heat generation amount from the power consumption.

Refrigerated Air Dryers Series IDF/IDU

IDF120D to IDF240D Construction Principle (Air/Refrigerant Circuit) w Air cooler q Air re-heater Compressed air inlet High temperature humid air from the air compressor passes through the air re-heater q and is pre-cooled by dehumified cool air. Then it is cooled to the specified temperature by the air cooler w using the evaporation heat of refrigerant.

Compact Hydraulic Cylinder

0 q !1 w !

Coolant Valve

d2 (Symbol) v: flow velocity (m/s) Q: flow rate (L/min) d: piping inner diameter (mm) 626

Hydraulic

Q: Required fluid volume for extension (l/min) Q: Required fluid volume for retraction (l/min) D: Bore size (cm) d: Piston rod diameter (cm) : Piston speed (mm/s) Q = D __ 4 6 _ 1000 Formula (1) Q = (D d) __ 4 6 _ 1000 ..

42

VQ 5 0 0 5 1 1 Terminal block box kit CE-compliant Type of actuation Nil Q CE-compliant VV5Q51-0603TU(-Q)1 setManifold base part no. *VQ5100-51(-Q)2 setsValve part no. (Stations 1 and 2) *VQ5200-51(-Q)2 setsValve part no. (Stations 3 and 4) *VQ5300-51(-Q)1 setValve part no.

Thermo-con

(C) HEC012 Circulating fluid: Clear water Circulating fluid: FC-3283 50 70 90 110 130 150 F 50 70 90 110 130 150 F 3000 3000 Facility water: 68F (20C) Facility water: 50F (10C) 2500 2500 Facility water: 50F (10C) Cooling capacity (W) Cooling capacity (W) Facility water: 68F (20C) 2000 2000 Facility water: 95F (35C) 1500 1500 Facility water: 95F (35C) 1000 1000 500 500 Facility water flow

Refrigerated Air Dryer

Refrigerant AFF AM UL certified product Improved corrosion resistance with the use of stainless steel, plate type heat exchanger (IDFB4E to 75E) AMD Power supply voltage: Single-phase 115 VAC (60 Hz) 230 VAC (60 Hz) Three-phase 460 VAC (60 Hz) AMH AME Air flow capacity SCFM (m3/h [ANR]) Series Rated inlet condition Port size Outlet air pressure dew point Note) AMF 37F(2.8C) 45F(7.2C) 50F(

Free Mount Cylinder Series CU

: 10 or more The mean q Non-unidirectional airflow: at least two locations NL = A x 64/(10M) 0.5 q Number of sampling locations: 2 to 9 95% UCL of the mean and the mean of the averages w Number of sampling locations: 1, or 10 or more The mean Derive it from the area of the cleanroom or clean air controlled space.

VNB

VNB1 -6A, 8A, 10A VNB2 -10A, 15A VNB3 -20A VNB5 -32A, 32F VNB6 -40A, 40F VNB7 -50A, 50F VNB4 -25A VNB54 -32A, 32F VNB64 -40A, -40F VNB74 -50A, 50F No.

Compact Hydraulic Cylinder

0 i q y !3 !2 !1 u !4 t w e !5 Rod end male thread CHQB32 to CHQB100 r o !0 y q !2 !1 !4 u t !3 e w !5 Rod end male thread Description Material Note Parts List Replacement Parts: Seal Kit No. Bore size (mm) Seal kit no.

ChemicalThermo-con

Heat generation amount Q : Unknown : 1.0C (1.0 K) : 20C (293.15 K) : 21C (294.15 K) : 7 L/min :Water : Density : 1 x 103 kg/m3 Circulating fluid temperature difference T (= T2 T1) Circulating fluid outlet temperature T1 Circulating fluid inlet temperature T2 Circulating fluid flow rate L Circulating fluid : Specific heat C: 4.2 x 103 J/(kgK) T1: Outlet temperature Q = T x L x x C 60 x 1000

Series CQS 10-/21- 11-/22- ø12, ø16, ø20, ø25 Compact Cylinder

Rod side mounting/Without auto switch Head side mounting/Without auto switch C D Mounting bolt Model C D Mounting bolt Model CQSB12-5D -10D -15D -20D -25D -30D CQSB16-5D -10D -15D -20D -25D -30D CQSB20-5D -10D -15D -20D -25D -30D -35D -40D -45D -50D CQSB25-5D -10D -15D -20D -25D -30D -35D -40D -45D -50D CQSB12-5D -10D -15D -20D -25D -30D CQSB16-5D -10D -15D -20D -25D -30D CQSB20-5D -10D -

Electromagnetic Digital Flow Switch

Fluid Passage Structure q r r No.

CLQ

Component Parts No. q w e r t No. !7 !8 !