NCQ2/CQ2

L F K M E J L Q Q A + Stroke B + Stroke A + Stroke B + Stroke W End Lock Mechanism Dimensions (mm) HN (Max.)

3 Port Solenoid Valve/

M12 connector pin number Wiring specification w r q e w w q e e r q r VG342(R)-X87 Internal pilot External pilot External pilot/With check valve 2(A) 2(A) 2(A) w r w r w r q e q e q e 3(R) 3(R) 3(R) w r w r w r q e q e q e 3(R) 3(R) 3(R) 1(P) X X Safety limit switch terminal [N.C.]

3 Port Solenoid Valve/

M12 connector pin number Wiring specication w r q e w w q e e r q r VG342(R)-X87 Internal pilot External pilot External pilot/With check valve 2(A) 2(A) 2(A) w r w r w r q e q e q e 3(R) 3(R) 3(R) w r w r w r q e q e q e 3(R) 3(R) 3(R) 1(P) X X Safety limit switch terminal [N.C.]

Table of Contents

When P2 + 0.1 b, choked flow P1 + 0.1 293 Q = 600 x C (P1 + 0.1) (1) 273 + t When P2 + 0.1 > b, subsonic flow P1 + 0.1 2 P2 + 0.1 b P1 + 0.1 Q = 600 x C (P1 + 0.1) 1 (2) 1 b 293 273 + t Q : Air flow rate [dm3/min (ANR)], dm3 (Cubic decimeter) of SI unit are also allowed to described by l (liter). 1 dm3 = 1 l .

1

2 t t q e w r e q w r 2-position single 5 (EA) 3 (EB) 1 (P) 2 (B) 3 (EB) 4 (A) 5 (EA) 1 (P) (A)4 2(B) 1 (P) (EA)5 3(EB) 2-position double t e q w r 2-position double 1 (P) 2 (B) 3 (EB) 4 (A) 5 (EA) 2(B) (A)4 (EA)5 1 (P) 3(EB) 3-position closed center/exhaust center/pressure center t e q w r 3-position closed center 3-position exhaust center 2(B) (A)4 2(B) (A)4 (EA)5 1 (P) 3(EB) (EA)5 1 (

SY

Scale: 25% For external pilot specification (Pitch) P = 24 24.3 22.2 11 18.3 18.8 40.1 39.3 18.8 3/5 R 3/5 R A 4 A 4 A 4 A 4 18 A 4 A 4 3/5 R 3/5 R A 4 A 4 A 4 A 4 A 4 A 4 39.3 63.3 79.8 4-One-touch fitting 1 P 1 P B 2 B 2 B 2 B 2 B 2 B 2 1 P 1 P B 2 B 2 B 2 B 2 B 2 B 2 [1 (P), 3/5 (R) port] Applicable tube O.D.: 12 2n1-One-touch fitting One-touch fitting [4 (A), 2 (B) port] Applicable tube

2/3 Port Valve

steel body Aluminium body S B Refer to table q for application.

Air Slide Table

the MXQ6(A, B).

5-Port Solenoid Valve

4 2 t t q e w r e q w r 2-position single 5 (EA) 3 (EB) 1 (P) 2 (B) 3 (EB) 4 (A) 5 (EA) 1 (P) (A)4 2(B) 1 (P) (EA)5 3(EB) 2-position double t e q w r 2-position double 1 (P) 2 (B) 3 (EB) 4 (A) 5 (EA) 2(B) (A)4 (EA)5 1 (P) 3(EB) 3-position closed center/exhaust center/pressure center t e q w r 3-position closed center 3-position exhaust center 2(B) (A)4 2(B) (A)4 (EA)5 1 (P) 3(EB) (EA)5 1

5 Port Solenoid Valve Series SY3000/5000/7000/9000

Flow Characteristics Model 1, 5, 3 (P, EA, EB) 4, 2 (A, B) 1 4/2 (P A/B) 4/2 5/3 (A/B EA/EB) Port size Flow characteristics C (dm3/ (sbar) ) b Cv C (dm3/ (sbar) ) b Cv SS5Y3-41(-Q) SS5Y3-42(-Q) SS5Y5-41(-Q) C8 1 4 SS5Y5-42(-Q) C10 1 8 1 8 C6 C6 C8 1 4 0.20 0.20 0.45 0.43 0.66 1 4 SS5Y7-42(-Q) 0.23 0.20 0.16 0.12 0.12 0.81 0.82 1.9 1.9 3.0 0.18 0.18 0.44 0.46 0.75 0.19 0.20 0.23 0.20 0.25

Table of Contents

2, Metal joint q, w, Gasket B r, Guard !3, Steel ball End plate (D) !2, Metal joint q, w, Gasket B r, Guard !

VDW

Model Port size P B B1 E F C D J K M Grommet Q R 20 VDW1 VDW2 M5 42.5 15 4 11 15.5 30 20 10 6 11 M2.5 M5, 1/8 52 5 15 17 36.5 22 11 8 13.5 M3 Body material Stainless Steel Grommet D 300 Q F Full wave rectifier (AC type) R E C A 2 x P Port size B B1 M 2 x J thread depth K (mm) Mounting method Electrical entry Model Port size P A B D E F B1 C J K M Grommet Q R 52 VDW1 VDW2 12 20 15 6 11 M2.5

42

) 1 (P) 5 (R1) 3 (R2) e q w q w (A) 4 (B) 2 (A) 4 (B) 2 VQ5200 VQ5201 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) e r q w e r q w (A) 4 (B) 2 (A) 4 (B) 2 VQ5301 VQ5401 (A) 4 (B) 2 (A) 4 (B) 2 VQ5300 VQ5400 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) (A) 4 (B) 2 VQ5500 (A) 4 (B) 2 VQ5501 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) Component Parts Component Parts

Series SY 5 Port Rubber Seal Solenoid Valve High Capacity & Simple Choices

VF VFR Q> D 5 Q> D 5 VP7 Individual SUP block assembly Individual EXH block assembly U side D side U side D side VQC B A B A B A B A B A B A B A B A SQ VQ P P R R P R VQ4 [When supplying different pressure only to an intermediate valve] Indicate the arrangement of the individual SUP block assembly and SUP blocking disk on a manifold

0.4

w e q w VQC1100 VQC1101 (B) 2 (A) 4 (B) 2 (A) 4 r r 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) e q w e w q VQC1200 VQC1201 (B) 2 (A) 4 (B) 2 (A) 4 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) r r e q w e q w VQC1301 VQC1401 VQC1300 VQC1400 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) VQC1500 VQC1501 r r (B) 2 (A) 4

5 Port Solenoid Valve

4 (B) 2 (A) 4 (B) 2 VQC4101 VQC4100 VQC4101 VQC4100 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) e q w e q w (A) 4 (B) 2 (A) 4 (B) 2 VQC4200 VQC4201 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) e q w r e q w r (A) 4 (B) 2 (A) 4 (B) 2 VQC4300 VQC4301 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) (A) 4 (B) 2 (A) 4 (B) 2 VQC4400 VQC4401 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) (A) 4 (B) 2 (A) 4 (B) 2 VQC4500

SQ1000/2000

R1) (P)(R2) (R1) (P)(R2) Double (double solenoid): SQ1230D Double (double solenoid): SQ1231D y e e q w y e e q w SQ1231D SQ1230D (A)(B) (A) (B) 4 2 4 2 5 13 5 1 3 (R1) (P)(R2) (R1)(P)(R2) u u 3 position: SQ1 30 3 4 5 3 position: SQ1 31 3 4 5 SQ1331 SQ1330 (A)(B) (A)(B) y e e q y e e q w w 4 2 4 2 5 1 3 5 1 3 (R1) (P)(R2) (R1) (P)(R2) SQ1431 SQ1430 (A)(B) (A)(B) 4 2 4 2 5 1 3 (R1) (P)(R2)

0.4

: SQ1230D r e e q w r e e q w SQ1230D SQ1231D 2 (B) (A) 4 2 (B) (A) 4 (R1) 5 1 (P) 3 (R2) (R1) 5 1 (P) 3 (R2) 3 position: SQ1 30 3 4 5 3 position: SQ1 31 3 4 5 r e e q w r e e q w SQ1331 SQ1431 SQ1531 SQ1330 SQ1430 SQ1530 2 (B) (A) 4 2 (B) (A) 4 2 (B) (A) 4 2 (B) (A) 4 2 (B) (A) 4 2 (B) (A) 4 (R1) 5 1 (P) 3 (R2) (R1) 5 1 (P) 3 (R2) (R1) 5 1 (P) 3 (R2) (R1) 5 1 (P) 3 (R2) (R1) 5 1 (P) 3 (R2

Vacuum System Peripherals:

R L B 01 1 Nil F G Rc 1 8 ... ...

VCL

Grommet: G Conduit: C (Q) Approx. 300 Approx. 280 Approx. 300 D D F Q F Q Width across flats H Class H coil Broken line section C C R G1/2 R E E A H A B B 2 x P Port size 2 x P Port size 2 x M, thread depth N 2 x M, thread depth N L L K K DIN terminal: D Conduit terminal: T Cable 6 to 12 F S Q 27.5 34 F (Q) 25 R C U C (44) R E R G1/2 E G1/2 A H D (S) B B A H D 2 x P Port size 2 x P Port size