1

Type M10/M11 manifold At 300 mm/s 4, 6, 8 fittings are connectable. 32 At 300 mm/s Existing 6, 8, 10, 12 fittings are connectable. Valve size Valve size 50 50 DOWN DOWN Existing At 300 mm/s Possible to drive cylinders Up to 50 Valve size Valve size 63 63 DOWN DOWN (80 at 100 mm/s) Existing Possible to drive cylinders Up to 63 80 Page 30 (125 at 100 mm/s) Sub-plate newly added!

Micro Mechanical Valve Series VM1000

VM131-01-02A VM121U-01-02A VM131U-01-02A VM123-M5-02A VM133-M5-02A 15 g Hard steel roller VM121-01-02SA VM131-01-02SA VM121U-01-02SA VM131U-01-02SA VM123-M5-02SA VM133-M5-02SA 20 g Straight plunger VM120-01-05A VM130-01-05A VM120U-01-05A VM130U-01-05A VM122-M5-05A VM132-M5-05A VM-05B 43 g Roller plunger Polyacetal roller VM120-01-06A VM130-01-06A VM120U-01-06A VM130U-01-06A VM122-M5-06A

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03(S)A 5/32" 8.2 AS221F-02-07(S)A 1/4" 11.2 23.4 32.7 (32.8) 19 (19) AS221F-02-09(S)A 5/16" 13.2 23.9 33.2 (33.3) 14.2 19 (20) AS221F-02-11(S)A 3/8" 15.5 26.4 35.7 (35.8) 15.6 20 (21) AS321F-02-07(S)A 1/4" 1/4 19 11.2 16.6 21.8 32.1 36.4 50 48.4 44.5 42.9 13.3 40 (40) AS321F-02-09(S)A 5/16" 13.2 22.7 33 14.2 41 (41) AS321F-02-11(S)A 3/8" 15.5 26.7 37 35.9 15.6 AS321F-03-07(S)A 1/4" 3/8 19

Table of Contents

S L, Z S L, Z 1 1 1 1 4 1 2 PB AC 2 Ordering example (Example) Series VXR22, Rc 1 1/4, 200 VAC, Conduit terminal (Part no.)

One-touch Fittings

-01N, KQ2E06-02N KQ2E06-03N, KQ2LE06-00N KQ06-P01A KQ2E06-00A, KQ2E06-01A, KQ2E06-02A KQ2E06-03A, KQ2LE06-00A Pipe nut Pipe nut KQ08-P01N KQ2E08-00N, KQ2E08-01N, KQ2E08-02N KQ2E08-03N, KQ2LE08-00N KQ08-P01A KQ2E08-00A, KQ2E08-01A, KQ2E08-02A KQ2E08-03A, KQ2LE08-00A KQ10-P01N KQ2E10-00N, KQ2E10-02N, KQ2E10-03N KQ2LE10-00N KQ10-P01A KQ2E10-00A, KQ2E10-02A, KQ2E10-03A KQ2LE10-00A KQ12-P01N KQ2E12

VCL

Valve model Port size VCL2l VCW20-12-01A 1/8, 1/4 34 40 25 30 12.8 12.8 5 4.5 6 13 VCW30-12-02A 1/4, 3/8 42 52 30 40 19 19 6 5.5 7 19 VCL3l VCW30-12-04A 1/2 48 56 36 44 23 23 6 5.5 7 23 VCW40-12-02A 1/4, 3/8 42 52 30 40 23 23 6 5.5 7 19 VCL4l VCW30-12-04A 1/2 48 56 36 44 23 23 6 5.5 7 23 VCW40-12-06A 3/4 56 65 44 53 28.2 28.2 6 5.5 7 26 2 Mounting screws (for mounting bracket) are included

Modular F.R.L. Units

Lock button 12 B AC10-A Series AC20-B to AC60-B Series Dimensions AC10-A S N A F M J R B C V Q2 Q1 Q1 IN OUT 2 x P1 (Port size) U P2 G Clearance for maintenance (Pressure gauge port size) Drain AC20-B S N A F M J R B C Q2 V Q1 Q1 K IN OUT 2 x P1 (Port size) U P2 G Clearance for maintenance (Pressure gauge port size) Drain AC25-B to AC60-B N A F S J M R V Q1 Q1 B C K OUT IN 2 x P1 (Port size

Modular F.R.L. Units

Note 1) D Note 3) Option Attachment Semi-standard + r Nil G M b Without pressure gauge Round type pressure gauge (with limit indicator) Round type pressure gauge (with color zone) Pressure gauge Note 4) + Note 5) Nil K Check valve c Without attachment Mounting position: AF+AR+K+AL + Nil S Note 6) d Without attachment Mounting position: AF+AR+S+AL Pressure switch + t Nil T Note 6) T-interface

AIR COMBINATION

VHS40-03A VHS20-01A VHS30-02A Pressure relief 3 port valve Note5) VHS40-06A Attachment VHS20-02A VHS30-03A VHS40-04A E300-04-A E300-03-A E300-02-A E400-02-A E200-01-A E400-04-A E400-03-A Piping adapter Note5) E100-M5-A E200-02-A E500-06-A E200-03-A E400-06-A IS10E-4002-A IS10E-3002-A IS10E-2001-A IS10E-4003-A Pressure switch with Note5) IS10E-2002-A IS10E-3003-A piping adapter IS10E-4004

AIR COMBINATION

VHS20-01A VHS30-02A VHS50-06A Pressure relief 3 port valve Note6) VHS40-03A VHS40-06A Attachment VHS20-02A VHS30-03A VHS50-10A VHS40-04A E400-02-A E200-01-A E300-02-A E400-03-A E600-06-A Piping adapter Note6) E100-M5-A E200-02-A E300-03-A E500-06-A E400-04-A E600-10-A E200-03-A E300-04-A E400-06-A IS10E-4002-A IS10E-2001-A IS10E-3002-A Pressure switch with Note6) IS10E-4003-A IS10E-2002

Proposals for Energy Saving

S S Effective area ratio 3.2 : 1 Pressure loss: Small Filter regulator S coupler Coil tube 2 Nozzle 2 Upstream side S: 9 Nozzle side S: 2.8 Effective area (mm) Effective area ratio Nozzle size (mm) Number of nozzles Supply pressure S: S = 3.2 : 1 2 1 0.5MPa 0.35MPa 0.33MPa Regulator pressure Outlet pressure Effect of Energy Saving Improvement 50 to 75% Reduction 50 to 75% Reduction 100%

Speed Controller with One-touch Fitting Stainless Steel Type Elbow Type/Universal Type AS-FG Series Push-lock type

A 3.2 7.2 12 19.1 26.2 19.1 30.6 29.2 27.5 26.1 13.3 9 (9) AS22l1FG-01-04(S)A 4 8.2 AS22l1FG-01-06(S)A 6 10.4 10 (9) AS22l1FG-01-08(S)A 8 13.2 22.4 29.5 14.2 11 (10) AS22l1FG-01-10(S)A 10 15.9 25.3 32.4 15.6 12 (11) AS22l1FG-02-23(S)A 3.2 1/8 13 (12.7) 7.2 20.9 30.2 (30.3) 22.6 36.6 35 31.1 29.5 13.3 17 (18) AS22l1FG-02-04(S)A 4 8.2 AS22l1FG-02-06(S)A 6 10.4 23.4 32.7 (32.8) AS22l1FG-02-08

Speed Controller with One-touch Fitting

A 3.2 7.2 12 19.1 26.2 19.1 30.6 29.2 27.5 26.1 13.3 9 (9) AS221F-01-04(S)A 4 8.2 AS221F-01-06(S)A 6 10.4 10 (9) AS221F-01-08(S)A 8 13.2 22.4 29.5 14.2 11 (10) AS221F-01-10(S)A 10 15.9 25.3 32.4 15.6 12 (11) AS221F-02-23(S)A 3.2 1/8 13 (12.7) 7.2 20.9 30.2 (30.3) 22.6 36.6 35 31.1 29.5 13.3 18 (19) AS221F-02-04(S)A 4 8.2 AS221F-02-06(S)A 6 10.4 23.4 32.7 (32.8) AS221F-02-08(S)A 8 13.2 23.9

AS

A 3.2 7.2 9 (9) AS22;1F-01-04(S)A 4 8.2 19.1 26.1 (26) 13.3 13 AS22;1F-01-06(S)A 19.1 6 1/8 10.4 11.6 30.6 29.2 27.5 26.1 10 (9) (12.7) AS22;1F-01-08(S)A 8 13.2 22.4 29.4 (29.3) 14.2 11 (10) AS22;1F-01-10(S)A 10 15.9 25.3 32.3 (32.2) 15.6 12 (11) AS22;1F-02-23(S)A 3.2 7.2 20.9 30 (30.3) AS22;1F-02-04(S)A 4 8.2 13.3 18 (19) 17 AS22;1F-02-06(S)A 22.6 6 1/4 10.4 12.6 23.4 32.5 (32.8) 36.6 35

VM

(mm) Model Bracket mounting dimensions Weight (g) S Bracket assembly no.

Fieldbus system (CC-Link compliant)

01: 40 g/EX510-S 01A, B: 80 g/EX510-S 02: 50 g EX510-S 02A, B, C: 90 g (including accessories) : When conformity to UL is required, the product should be used with a UL1310 Class 2 power supply.

Fieldbus system (DeviceNet compliant)

01: 40 g/EX510-S 01A, B: 80 g/EX510-S 02: 50 g EX510-S 02A, B, C: 90 g (including accessories) : When conformity to UL is required, the product should be used with a UL1310 Class 2 power supply.

Fieldbus system (PROFIBUS DP compliant)

01: 40 g/EX510-S 01A, B: 80 g/EX510-S 02: 50 g EX510-S 02A, B, C: 90 g (including accessories) : When conformity to UL is required, the product should be used with a UL1310 Class 2 power supply.

VM

VR2110-01 Model Supply pressure 0.1 to 1.0 MPa Signal pressure 0.25 to 0.8 MPa SA 0.5 to 60 s Time delay Repeatability 10% F.S.

VM

(Except for push-pull) 3.5-40 VZM500 How to Order S 01 01 0 VZM55 Suffix of actuator Foot bracket Option F Actuator G B Red Hard steel roller R S Port size Basic Roller lever One way roller lever Straight plunger Roller plunger Toggle lever Push button (Mushroom) Push button (Extended) Push button (Flash) Twist selector (2 position) Key selector (2 position) 00 01 02 05 06 08 30 32 33 34