1

(mm) Auto Switch Mounting Height Auto switch model Band mounting D-H7l/H7lW D-H7NF D-H7BA D-C7l/C80 D-M9lV D-M9lWV D-M9lAV D-A9lV D-M9l D-M9lW D-M9lA D-A9l D-H7C D-C73C D-C80C Hs Hs Hs Hs Hs 6 15 16 15 18 17.5 10 17 18 17 20 19.5 16 20.5 21 20.5 23.5 23 Bore size (mm) Auto switch model Rail mounting D-M9l D-M9lV D-M9lW D-M9lWV D-M9lA D-M9lAV D-A9l D-A9lV D-F7l/J79 D-F7lW/J79W D-F7BA/F79F

Tamper Proof Speed Controller with One-touch Fitting Series AS


1F-T Elbow Type/Universal Type

-D Meter-out M5 type U10/32 port AS3200-02-D Meter-out M5 type U10/32 port AS2210-01-D AS3210-02-D Component Parts No.

Vacuum System Peripherals:

Ejector mounting position ZZYX3 45T U side D side U D J Mounting position of connector Number of ejectors 1 to 3 stations A, B port size (Valve only) U side D side U D C4 C6 4 One-touch fitting 6 One-touch fitting Mixed M SUP/EXH block assembly mounting position Total number of ejector/valve stations U D side D B U side When creating the mixed specifications, complete the stations table on

Body Size: 20 (Applicable AC Size: AC20), Handle Operation: W (Double Action), Thread Type: Rc, Port Size: 01 (1/8), Mounting: without Mounting Option, Silencer: without Silencer, Handle Color: K (Black), Handle Material: M (Metal), Flow Direction: Flow Direction: Left to Right), Unit: Unit of Product Label: MPa

Body Size: 20 (Applicable AC Size: AC20), Handle Operation: W (Double Action), Thread Type: Rc, Port Size: 02 (1/4), Mounting: without Mounting Option, Silencer: without Silencer, Handle Color: K (Black), Handle Material: M (Metal), Flow Direction: Flow Direction: Left to Right), Unit: Unit of Product Label: MPa

Body Size: 20 (Applicable AC Size: AC20), Handle Operation: W (Double Action), Thread Type: F (G), Port Size: 02 (1/4), Mounting: without Mounting Option, Silencer: without Silencer, Handle Color: K (Black), Handle Material: M (Metal), Flow Direction: Flow Direction: Left to Right), Unit: Unit of Product Label: MPa

Body Size: Applicable AC Size: AC20, Handle Operation: Double Action, Thread Type: Rc, Port Size: 1/8, Mounting: without Mounting Option, Silencer: without Silencer, Handle Color: Black, Handle Material: Metal, Flow Direction: Flow Direction: Left to Right), Unit: Unit of Product Label: MPa

Body Size: Applicable AC Size: AC20, Handle Operation: Double Action, Thread Type: Rc, Port Size: 1/4, Mounting: without Mounting Option, Silencer: without Silencer, Handle Color: Black, Handle Material: Metal, Flow Direction: Flow Direction: Left to Right), Unit: Unit of Product Label: MPa

Body Size: Applicable AC Size: AC20, Handle Operation: Double Action, Thread Type: G, Port Size: 1/4, Mounting: without Mounting Option, Silencer: without Silencer, Handle Color: Black, Handle Material: Metal, Flow Direction: Flow Direction: Left to Right), Unit: Unit of Product Label: MPa

Body Size: 20 (Applicable AC Size: AC20), Handle Operation: W (Double Action), Thread Type: F (G), Port Size: 01 (1/8), Mounting: without Mounting Option, Silencer: without Silencer, Handle Color: Red, Handle Material: Resin, Flow Direction: Flow Direction: Left to Right), Unit: Unit of Product Label: MPa

Body Size: Applicable AC Size: AC20, Handle Operation: Double Action, Thread Type: G, Port Size: 1/8, Mounting: without Mounting Option, Silencer: without Silencer, Handle Color: Red, Handle Material: Resin, Flow Direction: Flow Direction: Left to Right), Unit: Unit of Product Label: MPa

2-Color Display Digital Flow Switch Series PFM

Analog Voltage Output (1 to 5 V) Analog Current Output (4 to 20 mA) 5 20 Analog output [mA] Analog output [V] Model Max. rated flow value [l/min] Model Max. rated flow value [l/min] PFM710--C/E PFM725--C/E PFM750--C/E PFM711--C/E PFM710--D/F PFM725--D/F PFM750--D/F PFM711--D/F 10 10 (5) 1 4 25 25 (12.5) 50 50 (25) 00 0 0 100 100 (50) Max. rated flow value Max. rated flow value ( ): Fluid

VM

D.

VM

Output 1 Output 2 A B C Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Dimensions D3 D2 L5 M2 IN L3 L2 L4 OUT IN D1 M1 M1 Applicable tube dia. d L1 Metric Size Weight (g) Model d D1 D2 L3 L2 D3 L1 L4 L5 M1 M2 VR1211F-23 3.2 11.4 8.4 52 6.2 25.7 36.1 17.5 12.7 12.9

Body Size: 20 (Applicable AC Size: AC20), Handle Operation: W (Double Action), Thread Type: F (G), Port Size: 01 (1/8), Mounting: without Mounting Option, Silencer: without Silencer, Handle Color: K (Black), Handle Material: Resin, Flow Direction: Flow Direction: Left to Right), Unit: Unit of Product Label: MPa

Body Size: 20 (Applicable AC Size: AC20), Handle Operation: W (Double Action), Thread Type: F (G), Port Size: 01 (1/8), Mounting: without Mounting Option, Silencer: without Silencer, Handle Color: Red, Handle Material: M (Metal), Flow Direction: Flow Direction: Left to Right), Unit: Unit of Product Label: MPa

Body Size: Applicable AC Size: AC20, Handle Operation: Double Action, Thread Type: G, Port Size: 1/8, Mounting: without Mounting Option, Silencer: without Silencer, Handle Color: Black, Handle Material: Resin, Flow Direction: Flow Direction: Left to Right), Unit: Unit of Product Label: MPa

Body Size: Applicable AC Size: AC20, Handle Operation: Double Action, Thread Type: G, Port Size: 1/8, Mounting: without Mounting Option, Silencer: without Silencer, Handle Color: Red, Handle Material: Metal, Flow Direction: Flow Direction: Left to Right), Unit: Unit of Product Label: MPa

Table of Contents

-01-D Meter-out M5 type U10/32 port AS3200-02-D Meter-out M5 type U10/32 port AS2210-01-D AS3210-02-D Component Parts No.

Tamper Proof and Flat Head Screw

(mm) 1in=25.4mm L4 D3 H (width across flats) T2 A L2 D1 L3 D2 T1 L1 Dimensions A Model T2 H D1 T1 D2 D3 L3 L1 L4 L2 AS120-M5-D M5 x 0.8 8 9 M5 x 0.8 9 4.7 10 31 10.3 0.7 28.4 AS120-U10/32-D 10-32UNF 10-32UNF AS220-01-SD Rc 1/8 12 14.3 R 1/8 AS220-F01-SD PF1/8 14.6 7.2 18 35.6 14.1 1.2 32 AS220-N01-SD NPT1/8 12.7 NPT1/8 AS220-02-SD Rc 1/4 17 18 R 1/4 AS220-F02-SD PF1/4 19.5 7.2 27.2 40.7