VM

D.

Table of Contents

-01-D Meter-out M5 type U10/32 port AS3200-02-D Meter-out M5 type U10/32 port AS2210-01-D AS3210-02-D Component Parts No.

PFxx-OMJ0005CN

) PFM750--D/F 50(25) PFM711--C/E 100(50) PFM711--D/F 100(50) ( )CO2 ( ) CO2 () 25[L/min] 10[L/min] [L/min] [L/min] 50[L/min] 100[L/min] [L/min] [L/min] -57No.PF-OMJ0005CN-I (350[kPa]) 25[L/min] 10[L/min] [kPa] [kPa] [L/min] [L/min] 100[L/min] 50[L/min] [kPa] [kPa] [L/min] [L/min] -58No.PF-OMJ0005CN-I PFM7-(N)01/(N)02/F01 17 2 -59No.PF-OMJ0005CN-I PFM7-(N)01L/(N)02L/F01L 2 17 -60No.PF-OMJ0005CN-I

Table of Contents

DZ/Y/YZ VFS3320-D/DZ/Y/YZ VFS3420-D/DZ/Y/YZ VFS3520-D/DZ/Y/YZ Lead wire O.D.

IR1000/2000/3000

Description IRV1000 IRV2000 IRV3000 Bracket P53801018 P53802016 P53803013 Pressure gauge GZ33-K-01 GZ43-K-01 GZ43-K-01 Precision of pressure gauge within 3% (Full span) 14-5-17 17 Series IR1000/2000/3000 Construction !5 !5 t o o o !0 t !0 o !

1

5) 20 (15) Note 5) 20 + 15 (n 2) (n = 4, 6) Note 4) CY CX D-F7l D-J79 5 5 15 + 15 (n 2) (n = 4, 6) Note 4) Rail mounting D-F7lV D-J79C 5 5 10 + 10 (n 2) (n = 4, 6) Note 4) CK1 D-F7lW/J79W D-F7BA/F79F/F7NT 10 15 15 + 20 (n 2) (n = 4, 6) Note 4) C(L)K D-F7lWV D-F7BAV 10 15 10 + 15 (n 2) (n = 4, 6) Note 4) C(L)KU D-A7l/A80 D-A7lH/A80H D-A73C/A80C 5 10 15 + 10 (n 2) (n = 4,

Vacuum System Peripherals:

Ejector mounting position ZZYX3 45T U side D side U D J Mounting position of connector Number of ejectors 1 to 3 stations A, B port size (Valve only) U side D side U D C4 C6 4 One-touch fitting 6 One-touch fitting Mixed M SUP/EXH block assembly mounting position Total number of ejector/valve stations U D side D B U side When creating the mixed specifications, complete the stations table on

Cylinder

Circuit Diagram : D-90Type Bore Dimension A j Dimension B Dimension C ;t)-k.

Vacuum

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Vacuum

"orbrgpss (d+d., rpe) l Elccdcdl druy Nd 1)rrl ub4di2vDcmv M 2) srE eu'!. ldbF k pcd by 6 Edd h with integral with integral vacuumgauge digitalswitch 56 IllL $en ) Schematic Symbol NZLr12-EE NZLl12 NZLl12-Efl s1.2mm 100!

Body Size: Applicable AC Size: AC20, Handle Operation: Double Action, Thread Type: G, Port Size: 1/8, Mounting: without Mounting Option, Silencer: without Silencer, Handle Color: Red, Handle Material: Resin, Flow Direction: Flow Direction: Left to Right), Unit: Unit of Product Label: MPa

Body Size: 20 (Applicable AC Size: AC20), Handle Operation: W (Double Action), Thread Type: F (G), Port Size: 01 (1/8), Mounting: without Mounting Option, Silencer: without Silencer, Handle Color: Red, Handle Material: Resin, Flow Direction: Flow Direction: Left to Right), Unit: Unit of Product Label: MPa

VM

Output 1 Output 2 A B C Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Dimensions D3 D2 L5 M2 IN L3 L2 L4 OUT IN D1 M1 M1 Applicable tube dia. d L1 Metric Size Weight (g) Model d D1 D2 L3 L2 D3 L1 L4 L5 M1 M2 VR1211F-23 3.2 11.4 8.4 52 6.2 25.7 36.1 17.5 12.7 12.9

Tamper Proof and Flat Head Screw

(mm) 1in=25.4mm L4 D3 H (width across flats) T2 A L2 D1 L3 D2 T1 L1 Dimensions A Model T2 H D1 T1 D2 D3 L3 L1 L4 L2 AS120-M5-D M5 x 0.8 8 9 M5 x 0.8 9 4.7 10 31 10.3 0.7 28.4 AS120-U10/32-D 10-32UNF 10-32UNF AS220-01-SD Rc 1/8 12 14.3 R 1/8 AS220-F01-SD PF1/8 14.6 7.2 18 35.6 14.1 1.2 32 AS220-N01-SD NPT1/8 12.7 NPT1/8 AS220-02-SD Rc 1/4 17 18 R 1/4 AS220-F02-SD PF1/4 19.5 7.2 27.2 40.7

Speed Controller: Standard Type Elbow Type (Metal Body) Series AS

AS-T 2 x Port size ASP ASN AQ ASV 2 x D AK Dimensions Max.

Body Size: Applicable AC Size: AC20, Handle Operation: Double Action, Thread Type: G, Port Size: 1/8, Mounting: without Mounting Option, Silencer: without Silencer, Handle Color: Black, Handle Material: Metal, Flow Direction: Flow Direction: Left to Right), Unit: Unit of Product Label: MPa

Body Size: Applicable AC Size: AC20, Handle Operation: Double Action, Thread Type: G, Port Size: 1/8, Mounting: without Mounting Option, Silencer: without Silencer, Handle Color: Red, Handle Material: Metal, Flow Direction: Flow Direction: Left to Right), Unit: Unit of Product Label: MPa

Body Size: 20 (Applicable AC Size: AC20), Handle Operation: W (Double Action), Thread Type: F (G), Port Size: 01 (1/8), Mounting: without Mounting Option, Silencer: without Silencer, Handle Color: K (Black), Handle Material: M (Metal), Flow Direction: Flow Direction: Left to Right), Unit: Unit of Product Label: MPa

Body Size: 20 (Applicable AC Size: AC20), Handle Operation: W (Double Action), Thread Type: F (G), Port Size: 01 (1/8), Mounting: without Mounting Option, Silencer: without Silencer, Handle Color: Red, Handle Material: M (Metal), Flow Direction: Flow Direction: Left to Right), Unit: Unit of Product Label: MPa

VFR

U side mounting D U 1 2 8 stations Option D side 3 4 3 4 Max: 8 stations Refer to page 3-5-8.