2

Specifications Model Standard specifications P1 P2 A B C D E F G H I VHS20 1/8, 1/4 1/8 66.4 22.3 40 37.5 14 46.6 33.6 28 37.5 VHS30 1/4, 3/8 1/4 80.3 29.4 53 49 19 52 38 30 49 VHS40 1/4, 3/8, 1/2 3/8 104.9 38.5 70 63 22 58 44 36 63 VHS40-06 3/4 1/2 110.4 42 75 63 22 58 44 44 63 Model Port size Specifications IN, OUT EXH IN OUT OUT EXH C(dm3/sbar) b Cv C(dm3/sbar) b Cv VHS20 1/8 1/8 2.4

Conforming to OSHA Standard Pressure Relief 3 Port Valve With Locking Holes Series VHS20/30/40/50

AC20 AC25 AC30 AC40 AC50 VHS20 VHS30 VHS40 VHS50 1935 Conforming to OSHA Standard Pressure Relief 3 Port Valve With Locking Holes Series VHS20/30/40/50 How to Order 30 03 RZ VHS Made to Order Nil X1 X502 Standard Body: Red Built-in silencer (EXH port) Pressure relief 3 port valve Optional specifications Symbol B R Z Description Knob color: Black Body size Flow direction: Right to left Symbol

VM

VHS20/30 VHS40/40-06/50 2-10 I 10 I G H F E X H .

VS 8-2/VS 8-4

RD SD LRUN PW B RATE 131 8 115 80 x1 x10 STATION NO.

Conforming to OSHA Standard Pressure Relief 3 Port Valve With Locking Holes Series VHS20/30/40/50 How to Order 30 03 RZ VHS Made to Order Standard Nil Body: Red X1 Built-in silencer (EXH port) X502 Pressure relief Optional specifications 3 port valve Des

Conforming to OSHA Standard Pressure Relief 3 Port Valve With Locking Holes Series VHS20/30/40/50 How to Order 30 03 RZ VHS Made to Order Nil X1 X502 Standard Body: Red Built-in silencer (EXH port) Pressure relief 3 port valve Optional specifications Symbol B R Z Description Knob color: Black Body size Flow direction: Right to left Symbol 20 30 40 50 Standard port size 1/8 3/8 1/2 3/4 PSI

Series SV

For RIO For standard Input unit EX500-IB1-X1 EX500-IB1 1 PNP specifications ... : 1, NPN specifications ... : 2 Input block (M8 connector) EX500-IE-X1 EX500-IE 2 PNP specifications ... : 3, NPN specifications ... : 4 Input block (M12 connector) EX500-IE-X1 EX500-IE 3 PNP specifications ... : 5, NPN specifications ... : 6 8 input block (M8 connector) EX500-IE-X1 EX500-IE 4 EX500-EB1 End block

SV

For RIO For standard Input unit EX500-IB1-X1 EX500-IB1 q PNP specifications: 1, NPN specifications: 2 EX500-IE-X1 EX500-IE Input block (M8 connector) w PNP specifications: 3, NPN specifications: 4 EX500-IE-X1 EX500-IE Input block (M12 connector) e PNP specifications: 5, NPN specifications: 6 EX500-IE-X1 EX500-IE 8 input block (M8 connector) r EX500-EB1 End block t VZ1000-11-1: Length (Refer

ISO Interface

Type of seal Special Options R Rubber S Metal Standard X1 External Pilot Supply Size 6 Size 1 8 Size 2 10 Size 3 Pilot Exhaust Options Pilot Exh. through footprint V1 External Individual Pilot Exhaust Configuration FG 2-position Number of Solenoid Subplate (NPTF) FHG 3-position, Closed center FJG 3-position, Exhaust center Without Subplate A02T Side 1/4 For VSR/S8-6 S Single D Double FIG

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F '-1: M6 x1 M:U8xt25 y Model C 0 M G I.. G Deep type (mm) H:M5xO.8 H:t.(lXI25 "B H:MSxt y M_I F C 0 E "A G ...

Compact 5-Port Solenoid Valve

74 JSY3000/5000 Series Type 10/Side Ported Dimensions: JSY3000 Series EX245 JJ5SY3-10SAm U D B C6 C8 Stations Marker mounting hole D side U side L1 L3 L2 Light/surge voltage suppressor 5.5 Manual override Push-turn locking slotted type: ( Press, then rotate it. ) 1.5 85 54 54 90 Output connector Input connector 3 x M5 Mounting hole 4(A) port side: Blue 2(B) port side: Yellow SI unit X0 0 X1

Regulator Unit Combination: [Other FRL Combination Devices] Other FRL Combination Device, Port Size: Rc1/4, Compressed Air Quality: General Dry Air, Maximum Operating Pressure(MPa): 1, Case Material: [Resin] Polycarbonate Case, Case Guard: No, Exhaust Structure: Relief type, Flow Direction: [Standard Flow (Left to Right)] Left to right, Drain Cock: [Not Provided] No, Pressure Gauge: -, Size

Body Size: 20, Thread: Rc, Port Size: 02 (1/4), Handle/Bonnet Material: B (Aluminum), Options: BS (w/Bracket + Built-in Silencer, EXH Port)

Table of Contents

BS With shock absorber (1 pc. on port side) The adjusting bolt is installed even when B or BS is selected. (Except 10) Applicable Auto Switch/Refer to page 8-30-1 for further information on auto switches.

Air Cylinder NCY2 Series Magnetically Coupled Rodless Cylinder

ll9#x1'&l?3flrin c8-se of (6so)sr=13.6ks 1s) a=1366=6.6 catculation formuta tor cr (o<1) 3ff9i,3?

NCY2 series

ll9#x1'&l?3flrin c8-se of (6so)sr=13.6ks 1s) a=1366=6.6s catculation formuta tor cr (o<1) 3ff9i,3?

Regulator Unit Combination: [Other FRL Combination Devices] Other FRL Combination Device, Port Size: Rc1/4, Compressed Air Quality: General Dry Air, Maximum Operating Pressure(MPa): 1, Case Material: [Resin] Polycarbonate Case, Case Guard: No, Exhaust Structure: Relief type, Flow Direction: [Standard Flow (Left to Right)] Left to right, Drain Cock: [Not Provided] No, Pressure Gauge: -, Size

Body Size: 20, Thread: Rc, Port Size: 02 (1/4), Handle/Bonnet Material: B (Aluminum), Options: None, Semi-Standard: None, Made to Order: X1 (Body: Red)

Secondary Batteries

AMD250C to 550C, 650, 850 Micro Mist Separator Clean Air Filters : Available as standard Remarks Description Series 90SFD100 Compatible with standard models Clean Air Filter SFD200 AMP220, 320, 420 With element service indicator Exhaust Cleaner for Clean Rooms With element service indicator [1500 l/min (ANR)] AMP420-06-T-X1 Air Filters/Pressure Control Equipment : Available as standard :

Body Size: 20, Thread: G, Port Size: 1/4, Handle/Bonnet Material: Flame Resistant PBT, Options: w/Bracket + Built-in Silencer, EXH Port, Semi-Standard: None, Made to Order: Body: Red

Body Size: 20, Thread: Rc, Port Size: 1/8, Handle/Bonnet Material: Aluminum, Options: w/Bracket + Built-in Silencer, EXH Port, Semi-Standard: None, Made to Order: Body: Red