V

R 02 2 04 4 06 6 08 8 10 10 13 13 16 16 20 20 25 25 32 32 40 40 50 50 M O U N T I N G T H R E A D P A D T Y P E Symbol Thread Dia 2~8 10~16 40~50 20~32 U Flat C Flat with Rib (Not 2,4,6,8) D Deep (10,16,25,40) B Bellows (Not 2,4) A5 M5X0.8 Male Thread A6 M6X1 A8 M8X1 V A C U U M E N T R Y Symbol Port Size 2~8 10~16 40~50 20~32 P A D M AT E R I A L 04 4 tube OneTouch Tube Fitting N Nitrile

Vacuum System Peripherals:

H L Option Pressure gauge Combinations R: Rear pressure gauge mounting Standard specification Valid combination Invalid combination Pressure gauge VAC (Vacuum pump side) SET (Pad side) Applicable model Specifications Symbol L H O S C U K IRV2000 IRV3000 IRV1000 P SMC Connection Rc 1/8 01 Connection Rc 1/4 02 Standard specifications Connection Rc 3/8 03 Accessory Connection Rc 1/2 04

5 Port Solenoid Valve Series SY3000/5000/7000/9000

: SY9 40(R)-WO3 4 5 M8 connector (WO): VFR 3 4 5 3 4 5 3 4 5 D Y SY9 40(R)SY9 40(R)-M03 04 03 04 03 04 03 04 VQ7 Applicable cable O.D. 3.5 to 7 109.2 101.7 75.4 [82.4] Max. 10 202.3 64.9 90.4 (Lead wire length) 60 75.4 Approx. 300 79.9 M8 x 1 (Lead wire length) Approx. 300 86.5 [93.5] 62.4 Pg7 113.5 29.5 29.5 29.5 29.5 29.5 29.5 29.5 29.5 120 184.1 [188.5] 164.5 [168.9] 97.5 25 204.1 182.3

Series 10-SY3000/5000/7000/9000 5 Port Solenoid Valve

type> (Lead wire length) 75.4 [82.4] Air Preparation Equipment Pressure Control Equipment Flow Control Equipment Pressure Switches/ Pressure Sensors 73.6 34.5 15.5 17.5 29.5 29.5 44.5 [1(P), 5(EA), 3(EB) port] 3/8, 1/2 96.5 L plug connector (L): M plug connector (M): DIN terminal (D, Y): 10-SY9140(R)-WO03 04 M8 connector (WO): D Y 10-SY9140(R)10-SY9140(R)-M10-SY9140(R)-L03 04 03 04 03 04

SY

SY3140-5G . 2 sets (Single solenoid part no.) SY3240-5G . 2 sets (Double solenoid part no.)

Table of Contents

Series VCA30/40 y t r e q w Series VCA30 Series VCA40 Description No. Description No. Part no. AXT632-69-1 AXT632-69-2 VVCA30-3A-04-2 VVCA30-3A-04-1 OR-2200-200-H VCA35--VVCA30-6-n VVCA30-4A-04-2 VVCA30-4A-04-1 Material Part no.

SX

SX3240-5G 2 sets (Double solenoid part no.) SX3140-5G 2 sets (Single solenoid part no.) SY3000-26-9A 1 set (Blanking plate assembly part no.) One-touch fitting for 1/4" N7 One-touch fitting for 5/16" N9 SX5000 Type 42 (Common external pilot type) The asterisk denotes the symbol for assembly.

V100

Common exhaust: VV3P7-41Stations 1-04 (G) (E) (T) (D, Y) N.C.

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

: With light/surge voltage suppressor ( ): VF5144-G-04 Conduit terminal: VF5144-T02 03 04 DIN terminal: VF5144-D02 03 04 02 03 04 VF5144-Y(Mounting hole) (Mounting hole) Manual override (Non-locking) Manual override (Non-locking) Applicable cable O.D. 6 to 8 Applicable cable O.D.

Series 10-SYJ3000/5000/7000 Rubber Seal 4/5 Port Solenoid Valve

DC specifications of type D, Y, DO and YO are only available with 12 and 24 VDC.

VQ5000

03 04 SUP blocking plate VVQ5000-16A-1 P R1 EXH blocking plate VVQ5000-16A-2 R2 Rc3/8 03 Rc1/2 04 Bottom ported Rc1/2 04 Description/Model Stations 1 2 3 4 5 6 7 8 9 10 11 12 Notes Applicable valves and options Part No.

Base Mounted Type, VQ5000 Series, 5 Port Metal Seal/Rubber Seal Solenoid Valve

03 04 32 16 By mounting individual SUP spacers on a manifold block, it is possible to provide individual supply ports for each valve. 1 P 40.3 1(P) 4(A) 2(B) 03: 3/8 04: 1/2 1(P') 5(R1) 3(R2) Circuit diagram Plug-in type Plug lead type Individual EXH spacer 179 (plug-in type) 133 (plug lead type) VVQ5000-R-1T (Plug-in type) VVQ5000-R-5T (Plug lead type) 03 04 03 04 32 16 By mounting individual

Direct Operated Pilot Operated 2-Port Solenoid Valve Refer to pages 7, 9, 11, 25, 35, and 39 for details.

How to Order w y e r t u o !

7.4

(Stations 7 to 8) SS0752-08C S0712-5G-C4 S0722-5G-C4 S0732-5G-C4 S07A2-5G-C4 Body Ported Manifold Bar Base Voltage Symbol Type 5 24 VDC 6 12 VDC Note) The valve cannot be used as a standalone unit. Prefix the asterisk to the part numbers of the solenoid valve etc. Write sequentially from the 1st station on the D side.

SYJ3000/5000/7000

When exchanging the pilot valve assembly only, V115-D is interchangeable with V115-Y. Do not replace V114 (G, H, L, M, W) to V115-D/Y (DIN terminal), and vice versa. Electrical entry Y With connector DIN terminal YO Without connector 1-5-73 74 Series SYJ3000/5000/7000 Specific Product Precautions 1 Be sure to read before handling.

Rubber seal Series 10-SYJ3000/5000/7000 4/5 port solenoid valve

When exchanging the pilot valve assembly only, "10-V115-D" is interchangeable with "10-V115-Y". Do not replace 10-V114 (G, H, L, M, W) to 10-V115-D/Y (DIN terminal), and vice versa. Electrical entry DIN terminal Y With connector YO Without connector 557 Series 10-SYJ3000/5000/7000 Specific Product Precautions 1 Be sure to read before handling.

Table of Contents

0, Metal joint q, w, Terminal i, O-ring e, r, t, y, u, Receptacle assembly Plug-in type 04 06 VVFS5000-1A-1!0 Manifold block assembly 04 06 Manifold block !0, Metal joint q, w, O-ring e, r, t, y, u Non plug-in type End plate (U) !1, Metal joint q, w End plate (U) !1, Metal joint q, w End plate (D) !2, Metal joint q, w, O-ring e, r, t, y, u End plate (D) !

Series SYJ3000/5000/7000 4, 5 Port Solenoid Valve Rubber Seal

Body Piston plate End cover Piston Spool ass,y Spool spring VQ4 Description Description No. Note Parts No.

Series VQ Metal Seal/Rubber Seal Body Ported

Blank plug Dimensions 23 04 06 KQP-X19 A L D Model Fittings size d Color: White 3.2 4 6 16 16 18 3.2 6 8 31.5 32 35 KQP-23-X19 KQP-04-X19 KQP-06-X19 It is inserted into an unused cylinder port and SUP/ EXH ports. The minimum order quantity is 10 pcs.

Series 10-SYJ300/500/700 Rubber Seal 3 Port Solenoid Valve

N.O. 3(R) (P)1 3(R) (P)1 e t q r e t q r (A) (A) 2 2 u u 3 (R) 1 (P) 3 (R) 1 (P) w w y y Component Parts Replacement Parts Note Zinc die-casted Part no.