This is a legacy product, and replaced byVG342R-5DZ-10N, 3 port poppet type valve, 3 PORT SOLENOID VALVE

V100

r e w q r e w q VG VP S070 VQ VKF N.C.

Vacuum System Peripherals:

m t r e w q U side D side 13-14-26 26 e Valve Model SX340 is for internal pilot.

VM

Description Material Notes q Description Material Notes No.

V

P Q R S 4 4 20.6 15.6 10.4 6 6 21.6 16.6 12.8 F L AT T Y P E F L AT W I T H R I B Y Model A B C D E F G H I Flat Flat with Rib ZPR20 20 23 14 29 39.8 57.6 68.6 91.5 102.6 4 1.7 ZPR25 25 28 14 29 39.8 57.6 68.6 91.5 102.6 4 1.8 ZPR32 32 35 14.5 29.5 40.3 58.1 69.1 92 103.1 4.5 23 D E E P T Y P E Model A B C D E F G H I Y ZPR25D 25 28 20 35 45.8 63.6 74.6 97.6 108.6 10 A P P L I C A B L E T

3 Port Solenoid Valve Series VQ100 1

x 14 7 Manual override VZ 7 14 P E P E 37.4 16 VS 29 32 43.8 VFN 4-PT 1/8 P , E port 2-3.5 Mounting hole 300 300 15.5 P = 10 1 2 3 4 5 n U side D side 40.2 15.5 46.2 19.4 A A 9.5 16.7 P = 10 n-M5 x 0.8 A port Dimensions Formula: L1 = 10n + 21, L2 = 10n + 7, n: Station (Max. 20 stations) n L L1 L2 2 41 27 3 51 37 4 61 47 5 71 57 6 81 67 7 91 77 8 9 10 121 107 11 131 117 12 141 127 13 151

VQ

SY SYJ (L5) Plug assembly (L4) VK 2-4.5Mounting hole 1 2 3 VVQ100-12A(L3) 88 (8.5) L2 VZ 48.7 L1 VT VT (45) (35) 33 25 (5.5) VP 23.5 12.3 VG R11 Manual override 21.5 (Min. bending inner radius) (29.3) VP 104 VQ VQZ Stations 1 2 3 4 5 n Dside Uside VZ 2-M5 X 0.8(E port) VS 2-M5 X 0.8(P port) 42.9 A A 20 (8.5) 1.5 5 n-M5 X 0.8 (A port) 5 (7.5) 15 P=10 38 Equation: L1=10n+32 L2=10n+43

3 Port Solenoid Valve/

M12 connector pin number Wiring specication w r q e w w q e e r q r VG342(R)-X87 Internal pilot External pilot External pilot/With check valve 2(A) 2(A) 2(A) w r w r w r q e q e q e 3(R) 3(R) 3(R) w r w r w r q e q e q e 3(R) 3(R) 3(R) 1(P) X X Safety limit switch terminal [N.C.]

3 Port Solenoid Valve, VQ100 Series, Base Mounted Type

VV3Q11 (L5) (L4) (L3) (8.5) 88 L2 48.7 L1 Plug ass'y VVQ100-12A2 3 1 (35) (45) 33 (5.5) 23.5 12.3 E 3 2 R11(Min. bending inner radius) 21.5 Manual override (29.3) 104 D side U side Stations 1 2 3 4 5 n 2-M50.8(E port) 2-M50.8(P port) 42.9 A A (8.5) 20 5 15 (7.5) 5 (A port) n-M50.8 15 P=10 Dimensions n: Stations(Max.18 stations) Equation : L1=10n+32 L2=10n+43 n L 2 52 63 83 112.5 123 3 62

Table of Contents

w No. q w e r t y u i o !

KJ

w No. q w e r t y u i o !

A

T I O N A C C E S S O R I E S S E R I E S N C Q 2 / C Q 2 C O I L S C R A P E R X C 3 5 O P T I O N Air XC35 D (N)CQ2 Bore Size 32, 40, 50, 63, 80, 100 Fluid S T R O K E M O U N T I N G B O R E S I Z E Thread Pitch M3 0.5 A C C E S S O R I E S M O U N T I N G K I T S S E R I E S N C Q 2 / C Q 2 A C C E S S O R I E S M O U N T I N G B O L T F O R S E R I E S N C Q 2 / C Q 2 M5 0.8 M6 1 M8

Table of Contents

3 q !1 y r i e Component Parts Description Material Material Note Note Description No. q w e r t y u No. i o !0 !1 !2 !

Stopper Cylinder

0 w q e r t u !

MGP

M3 x 0.5 x 30l or more 40, 50, 63 10N 3 M5 x 0.8 x 40l or more 80, 100 24.5N 3 Remove the bolt for normal operation. It can cause lock malfunction or faulty release. 2. Locking type manual release While pushing the M/O knob turn it 90 counter clockwise. The lock is released (and remains in a released state) by aligning the mark on the cap with the OFF mark on the M/O knob.

MHZ

3 u q @3 @4 t r !4 y Single acting/Normally closed MHR !9 @0 @1 MHK MHS MHC Double acting/With fingers closed MHT MHY MHW MRHQ Component Parts Misc. Material No. Description Note Material No. Description Note Aluminum alloy Chloroprene rubber CR Hard anodized q Body DStainless steel Fluoro rubber FKM Dust cover w !

MHZ

Hard anodized Seal kit @2@3@4@5 MHZJ6-PS Body Aluminum alloy q CR MHZJ2-J6 Piston Stainless steel w Material FKM Heat treated Dust cover !

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL MLGC CNA CB CV/MVG Maintains the cylinder’s CXW original position even if the CXS air supply is interrupted. CXT MX

Description q Notes No.

MHF2

Double piston construction achieves compact design with strong holding force. q r Mounting is possible from 4 directions. e w Model Bore size Holding force (N) q w MHF2-8D MHZ2-10D 8 10 19 11 MHF2-12D MHZ2-20D 12 20 48 42 w e r MHF2-16D MHZ2-25D 16 25 90 65 MHF2-20D MHZ2-32D 20 32 141 158 Features 2 Series MHF2 Model Selection Model Selection Selection procedure Confirm gripping force Confirm

MHY2/MHW2

2 i q !1 !4 y !9 !0 u !2 i q !1 !4 y !9 !0 u !2 i q !1 !4 y !9 !3 Open Component Parts Component Parts Note No. q Description Material Aluminum alloy Description Material Note No. Body Bushing B Hard anodized Sintered alloy steel o !0 !1 !2 !3 !4 !5 !