Vacuum System Peripherals:

m t r e w q U side D side 13-14-26 26 e Valve Model SX340 is for internal pilot.

V

P Q R S 4 4 20.6 15.6 10.4 6 6 21.6 16.6 12.8 F L AT T Y P E F L AT W I T H R I B Y Model A B C D E F G H I Flat Flat with Rib ZPR20 20 23 14 29 39.8 57.6 68.6 91.5 102.6 4 1.7 ZPR25 25 28 14 29 39.8 57.6 68.6 91.5 102.6 4 1.8 ZPR32 32 35 14.5 29.5 40.3 58.1 69.1 92 103.1 4.5 23 D E E P T Y P E Model A B C D E F G H I Y ZPR25D 25 28 20 35 45.8 63.6 74.6 97.6 108.6 10 A P P L I C A B L E T

3 Port Solenoid Valve/

M12 connector pin number Wiring specication w r q e w w q e e r q r VG342(R)-X87 Internal pilot External pilot External pilot/With check valve 2(A) 2(A) 2(A) w r w r w r q e q e q e 3(R) 3(R) 3(R) w r w r w r q e q e q e 3(R) 3(R) 3(R) 1(P) X X Safety limit switch terminal [N.C.]

VM

(mm) Model Effective area (mm2) H L1 L2 L3 L4 L5 L6 L7 Q M1 M2 18 2(A) 4 1(P) 4 1(P) R 2(A) 2(A) R 3(R) VHK R-04F-04F 47.6 23.8 23.8 16.5 51.6 15.8 15.8 3.4 1.2 41 3.5 11 VHK R-06F-06F 18 6 6 41 48.6 24.3 24.3 16.5 3.5 52.6 11 16.8 16.8 7.2 1.2 VHK R-08F-08F 18 8 8 41 52.4 26.2 26.2 16.5 3.5 56.4 11 18.7 18.7 9.7 1.2 VHK R-10F-10F 22 10 10 46 61 30.5 30.5 21.5 4 65 14 20.8 20.8 16.1 3.2 VHK

VHK

Flame resistant style 1(P)/2(A): One-touch fitting Effective area Tube O.D (mm) Model (mm2) H L1 L2 L3 L4 L5 L6 L7 Q M1 M2 1(P)2(A) 2(A)3(R) 18 2(A) 4 1(P) 4 3.4 1.2 47.6 23.8 23.8 16.5 51.6 15.8 15.8 41 3.5 11 VHKlR-04F-04F VHKlR-06F-06F 18 6 6 41 48.6 24.3 24.3 16.5 3.5 52.6 11 16.8 16.8 7.2 1.2 VHKlR-08F-08F 18 8 8 41 52.4 26.2 26.2 16.5 3.5 56.4 11 18.7 18.7 9.7 1.2 VHKlR-10F-10F 22 10

VHK

(mm) Model Effective area (mm2) H L1 L2 L3 L4 L5 L6 L7 Q M1 M2 18 2(A) 4 1(P) 4 1(P) R 2(A) 2(A) R 3(R) VHK R-04F-04F 47.6 23.8 23.8 16.5 51.6 15.8 15.8 3.4 1.2 41 3.5 11 VHK R-06F-06F 18 6 6 41 48.6 24.3 24.3 16.5 3.5 52.6 11 16.8 16.8 7.2 1.2 VHK R-08F-08F 18 8 8 41 52.4 26.2 26.2 16.5 3.5 56.4 11 18.7 18.7 9.7 1.2 VHK R-10F-10F 22 10 10 46 61 30.5 30.5 21.5 4 65 14 20.8 20.8 16.1 3.2 VHK

Compact 5-Port Solenoid Valve

e r w q e r w 5 (EA) 4 (A) 3 (EB) 2 (B) 1 (P) 2-position single 2-position double (A)4 2(B) (A)4 2(B) 3(EB) (EA)5 1 3(EB) (EA)5 1 (P) (P) 4-position dual 3-port valve 3-position closed center/exhaust center/pressure center q e r w q e r w 3-position closed center 3-position exhaust center 4-position dual 3-port valve N.C. valve x 2 pcs.

1

SY 3 5 1 0 0 1 q w r e t y u i o !0 !1 Base mounted q Series !

Series SV

SV400 SV300 SV200 SV100 Die-cast aluminium See thread types on page 86 for . 3/8: SY9000-27-1 1/4: SY7000-27-1-Q SY5000-27-1-Q SY3000-27-1-Q Sub-plate 8 1/2: SY9000-27-2 3/8: SY7000-27-2-Q Gasket SY5000-11-18 SY9000-11-2 SY7000-11-14 SY3000-11-25 9 For valve mounting (flat nickel plated) Round head combination screw SV2000-21-1 (M3 x 30) SV2000-21-2 (M3 x 40) SV3000-21-1 (M4 x 35) SX3000-

Pilot: R (External Pilot), Voltage: 5 (24VDC), Lead Wire: D (DIN Connector), Surge Suppressor: Z (Light & Surge Suppressor), Port Size: 10 (1), Thread: F (G), Passage: External Pilot (N.O/N.C), Option: Y (Low Wattage 2WDC), CE Compliant: Q (CE Compliant)

Pilot: R (External Pilot), Voltage: 5 (24VDC), Lead Wire: D (DIN Connector), Surge Suppressor: Z (Light & Surge Suppressor), Port Size: 10 (1), Thread: F (G), Passage: External Pilot (N.O/N.C), Option: E (Continuous Duty), CE Compliant: Q (CE Compliant)

Pilot: External Pilot, Voltage: 24VDC, Lead Wire: DIN Connector, Surge Suppressor: Light & Surge Suppressor, Port Size: 1, Thread: G, Passage: External Pilot (N.O/N.C), Option: Continuous Duty, CE Compliant: CE Compliant

Type: Solenoid Valves, Application: Single Unit, Mounting Orientation: Direct, Voltage: DC24V, Specification: Standard / Low Vacuum Compatible / Lubrication Free / Low Current, Valve Type: 3-Port Valve, Actuation: [Single] Single, Status at Power Off: Self-Recovery (Spring Return), Valve Positions: [Others] 2 positions universal, Pipe Port Type: G, Port Size: 1, Pressure Rating(MPa): -0.1

Pilot: R (External Pilot), Voltage: 5 (24VDC), Lead Wire: D (DIN Connector), Surge Suppressor: Z (Light & Surge Suppressor), Port Size: 10 (1), Thread: F (G)

Type: Solenoid Valves, Application: Single Unit, Mounting Orientation: Direct, Voltage: DC24V, Specification: Standard / Low Vacuum Compatible / Lubrication Free, Valve Type: 3-Port Valve, Actuation: [Single] Single, Status at Power Off: Self-Recovery (Spring Return), Valve Positions: [Others] 2 positions universal, Pipe Port Type: G, Port Size: 1, Pressure Rating(MPa): -0.1 to 0.9, Driving

Series 10-SV1000/2000/3000/4000 5 Port Solenoid Valve

Stations 3 2 1 D D D D How to Order Valve 10-SV 1 1 0 0 F 5 Note) q w r e t y u i Air Preparation Equipment Pressure Control Equipment Flow Control Equipment Pressure Switches/ Pressure Sensors q Series r Back pressure check valve Note) Available with manifold block for station additions.

SV

T-LINK Mini System Type R1, R2 OMRON Corporation CompoBus/S Type Q DeviceNet 1 SETTINGS PWR MOD/NET STATION NO. 4632 ADDRESS NO. Name of terminal block, LED Note Cable wiring TERM.

This is a legacy product, and replaced byVFS6110-5DZ-Q VFS6000 SOL VALVE 4/5 PORT. VALVE, SOL. VALVE. VFS6000. 7.75336 lb. 2D.

This is a legacy product, and replaced byVK334-5DZ-01-Q VK300 SOL VALVE 3-PORT. VALVE, SGL SOL, BASE MT. VALVE. VK300 BASE MT 1/8. .64059 lb. NA.

This is a legacy product, and replaced byVFR5310-5DZ-04F-Q, Type of actuationModelPort sizeFlow characteristics (1)Max. (2)operating cycle(Hz)Response (3) time (ms)(4)(kg) Plug-inNon plug-in1 4/2 (P A/B)4/2 5/3 (A/B EA/EB) C [dm3/(s?bar)]bCvC [dm3/(s?bar)]bCv3 positionClosed centerVFR530VFR5313/8150.384.1160.314.3380 or less1.87(1.82)