NCQ2/CQ2

A Without auto switch B CQ2 P A B CQ2 P NCQ2 P Q Q With auto switch Bore size (mm) 5 st 10 st NCQ2 P 20 st 5 st 10 st 5 st 10 st 20 st 20 st 20 st Rc 1/8 5 st 10 st 20 st 5 st 10 st 5 st 10 st 20 st 5 st 10 st 20 st 32 40 50 M5 x 0.8 11.5 11 NPT 1/8 M5 x 0.8 40 46.5 28 34.5 50 56.5 38 44.5 33 39.5 40.5 10.5 11 10.5 60 66.5 68.5 50 56.5 68.5 43 49.5 50.5 78.5 50.5 10.5 88.5 NPT 1/

CATALOG

12 17 32 5, 10 32 16 13.3 38 43 5, 10 45 13 45 50 11 56.5 66.5 12 17 40 5, 10 40 16 18.3 44.5 41.5 5, 10 52 13 51.5 56.5 10.5 68.5 88.5 18 28 50 10, 20 50 20 17.6 50.5 60.5 10, 20 64 15 58.5 68.5 Bore NCQ2 i J K M N Z F P V L O U Stroke Orifice S CQ2(mm) Note) Except for A, L & Q, Size H (mm) H all other dimensions apply 12 5 22 3.5 8-32 6.5 25 3.5 6.5 Depth3.5 19.5 5, 10 35.5 M3x0.5 to

Vacuum System Peripherals:

ZYX3000: Flat Ribbon Cable 10 Polar Type DIN rail manifold Customer name Contact person Sheet number P .O. number Equipment Quantity set(s) Date required Manifold Specification Sheet Please fill in the order of q to r. q How to Order Manifold Fill in the blanks below with symbols of necessary specifications.

V

15 ZPR40D 40 43 29 42.5 53.3 71.1 25 97 87 17 15 A P P L I C A B L E T U B E A P P L I C A B L E T U B E Applicable Tube OD P Q R S Applicable Tube OD P Q R S 4 4 23.3 15.8 10.4 6 6 24.3 16.8 12.8 H O W T O O R D E R Z P R P A D H O R I Z O N T A L T Y P E W I T H O U T B U F F E R 6 6 24.3 16.8 12.8 8 8 26.2 18.7 15.2 8 8 26.2 18.7 15.2 ZPR P A D D I A M E T E R 02 2 04 4 06 6 08 8 10 10

3 Port Solenoid Valve/

M12 connector pin number Wiring specication w r q e w w q e e r q r VG342(R)-X87 Internal pilot External pilot External pilot/With check valve 2(A) 2(A) 2(A) w r w r w r q e q e q e 3(R) 3(R) 3(R) w r w r w r q e q e q e 3(R) 3(R) 3(R) 1(P) X X Safety limit switch terminal [N.C.]

3 Port Solenoid Valve/

M12 connector pin number Wiring specification w r q e w w q e e r q r VG342(R)-X87 Internal pilot External pilot External pilot/With check valve 2(A) 2(A) 2(A) w r w r w r q e q e q e 3(R) 3(R) 3(R) w r w r w r q e q e q e 3(R) 3(R) 3(R) 1(P) X X Safety limit switch terminal [N.C.]

This is a legacy product, and replaced byVFR5310-5DZ-04F-Q, Type of actuationModelPort sizeFlow characteristics (1)Max. (2)operating cycle(Hz)Response (3) time (ms)(4)(kg) Plug-inNon plug-in1 4/2 (P A/B)4/2 5/3 (A/B EA/EB) C [dm3/(s?bar)]bCvC [dm3/(s?bar)]bCv3 positionClosed centerVFR530VFR5313/8150.384.1160.314.3380 or less1.87(1.82)

This is a legacy product, and replaced byVT317-5DZ-02F-Q

This is a legacy product, and replaced byVFS5110-5DZ-04F-Q

This is a legacy product, and replaced byVFS4210-5DZ-Q

This is a legacy product, and replaced byVFS5110-5DZ-Q

This is a legacy product, and replaced byAV3000-F03-5DZ-Q AV SOFT START UP BODY PORT. VALVE, SOFT START 3/8. VALVE. AV BODY PORT 3/8 NPT. 1.15242 lb. GA.

This is a legacy product, and replaced byVFS6110-5DZ-Q VFS6000 SOL VALVE 4/5 PORT. VALVE, SOL. VALVE. VFS6000. 7.75336 lb. 2D.

This is a legacy product, and replaced byVK334-5DZ-01-Q VK300 SOL VALVE 3-PORT. VALVE, SGL SOL, BASE MT. VALVE. VK300 BASE MT 1/8. .64059 lb. NA.

Pilot: External Pilot, Voltage: 24VDC, Lead Wire: DIN Connector, Surge Suppressor: Light & Surge Suppressor, Port Size: 1, Thread: Rc, Passage: External Pilot (N.O/N.C), Option: Low Wattage 2WDC, CE Compliant: CE Compliant

Pilot: External Pilot, Voltage: 24VDC, Lead Wire: DIN Connector, Surge Suppressor: Light & Surge Suppressor, Port Size: 1, Thread: Rc, Passage: External Pilot (N.O/N.C), Option: Continuous Duty, CE Compliant: CE Compliant

Pilot: R (External Pilot), Voltage: 5 (24VDC), Lead Wire: D (DIN Connector), Surge Suppressor: Z (Light & Surge Suppressor), Port Size: 10 (1), Thread: Rc, Passage: External Pilot (N.O/N.C), Option: Y (Low Wattage 2WDC), CE Compliant: Q (CE Compliant)

Pilot: R (External Pilot), Voltage: 5 (24VDC), Lead Wire: D (DIN Connector), Surge Suppressor: Z (Light & Surge Suppressor), Port Size: 10 (1), Thread: Rc, Passage: External Pilot (N.O/N.C), Option: E (Continuous Duty), CE Compliant: Q (CE Compliant)

Type: Solenoid Valves, Application: Single Unit, Mounting Orientation: Direct, Voltage: DC24V, Specification: Standard / Low Vacuum Compatible / Lubrication Free, Valve Type: 3-Port Valve, Actuation: [Single] Single, Status at Power Off: Self-Recovery (Spring Return), Valve Positions: [Others] 2 positions universal, Pipe Port Type: [Rc (R)] Rc, Port Size: 1, Pressure Rating(MPa): -0.1 to

Pilot: R (External Pilot), Voltage: 5 (24VDC), Lead Wire: D (DIN Connector), Surge Suppressor: Z (Light & Surge Suppressor), Port Size: 10 (1)