5 Port Pilot Operated Solenoid Valve VFS1000/2000/3000/4000/5000/6000 Series

F 3 8 Option VV5FS4-10-061-03-A VFS4110-5D 1 4 The asterisk denotes the symbol for assembly.

Table of Contents

6 18 17 18 17 16.5 17 16.5 12.7 13.7 16.5 22 21 22 21 18 17 18 17 13.5 12.7 13.5 6.2 27.7 AS1001F-07T 1/4" AS2001F-04T 4 17.9 15.2 13.2 15.2 13.2 11.4 13.2 11.4 9.3 12 11.8 7 1.5 AS2001F-06T 6 AS2001F-03T 5/32" 9.5 8.2 7.4 8.1 7.1 6.2 7.1 6.2 5.2 47.2 46 45.2 36.7 35.7 34.9 33.7 32.8 31.9 AS AS2051F-06T 6 AS2001F-05T 3/16" 11.8 7 1.5 14.8 7 1.5 AS2051F-08T 8 AS2001F-07T 1/4" ASP AS3001F-

Tamper Proof Speed Controller with One-touch Fitting Series AS


1F-T Elbow Type/Universal Type 1

6 18 17 18 17 16.5 17 16.5 12.7 13.7 16.5 22 21 22 21 18 17 18 17 13.5 12.7 13.5 6.2 27.7 AS1001F-07T 1/4" AS2001F-04T 4 17.9 15.2 13.2 15.2 13.2 11.4 13.2 11.4 9.3 12 11.8 7 1.5 AS2001F-06T 6 AS2001F-03T 5/32" 9.5 8.2 7.4 8.1 7.1 6.2 7.1 6.2 5.2 47.2 46 45.2 36.7 35.7 34.9 33.7 32.8 31.9 AS AS2051F-06T 6 AS2001F-05T 3/16" 11.8 7 1.5 14.8 7 1.5 AS2051F-08T 8 AS2001F-07T 1/4" ASP AS3001F-

Tamper Proof and Flat Head Screw

6 11.4 48.7 16.5 11.6 40.7 6.2 27.7 13.5 6.2 27.7 AS1001F-07T 1/4" AS2001F-04T 4 12 40.7 13.7 9.3 40.7 5.2 31.9 12.7 11.8 7 1.5 AS2001F-06T 6 AS2001F-03T 5/32" 11.6 44.8 6.3 33 13.5 9.3 40.7 5.2 31.9 12.7 AS2051F-06T 6 12.8 53.2 6.7 35.2 17 AS2001F-05T 3/16" 11.8 7 1.5 11.4 50 6.2 32.8 16.5 14.8 7 1.5 AS2051F-08T 8 15.2 59.8 8.1 36.5 18 AS2001F-07T 1/4" 13.2 52.2 7.1 33.7 17 AS3001F-06T

AS

6 11.4 48.7 16.5 11.6 40.7 6.2 27.7 13.5 10 14 6.2 27.7 AS1001F-07T 1/4" AS2001F-04T 4 12 40.7 13.7 9.3 40.7 5.2 31.9 12.7 15 11 11.8 7 1.5 AS2001F-06T 6 AS2001F-03T 5/32" 11.6 44.8 6.3 33 13.5 16 9.3 40.7 5.2 31.9 12.7 15 AS2051F-06T 6 AS2001F-05T 3/16" 12.8 53.2 6.7 35.2 17 33 11.8 7 1.5 11.4 50 6.2 32.8 16.5 21 14.8 7 1.5 AS2051F-08T 8 AS2001F-07T 1/4" 15.2 59.8 8.1 36.5 18 36 13.2 52.2

Tamper Proof Speed Controller with One-touch Fitting Series AS


1F-T Elbow Type/Universal Type

6 18 17 18 17 16.5 17 16.5 12.7 13.7 16.5 22 21 22 21 18 17 18 17 13.5 12.7 13.5 6.2 27.7 AS1001F-07T 1/4" AS2001F-04T 4 17.9 15.2 13.2 15.2 13.2 11.4 13.2 11.4 9.3 12 11.8 7 1.5 AS2001F-06T 6 AS2001F-03T 5/32" 9.5 8.2 7.4 8.1 7.1 6.2 7.1 6.2 5.2 47.2 46 45.2 36.7 35.7 34.9 33.7 32.8 31.9 AS AS2051F-06T 6 AS2001F-05T 3/16" 11.8 7 1.5 14.8 7 1.5 AS2051F-08T 8 AS2001F-07T 1/4" ASP AS3001F-

Tamper Proof Speed Controller with One-touch Fitting Elbow Type/Universal Type Series AS  1F-T

6 11.4 48.7 16.5 11.6 40.7 6.2 27.7 13.5 10 14 6.2 27.7 AS1001F-07T 1/4" AS2001F-04T 4 12 40.7 13.7 9.3 40.7 5.2 31.9 12.7 15 11 12.3 7 1.5 AS2001F-06T 6 AS2001F-03T 5/32" 11.6 44.8 6.3 33 13.5 16 9.3 40.7 5.2 31.9 12.7 15 AS2051F-06T 6 AS2001F-05T 3/16" 12.8 53.2 6.7 35.2 17 12.3 7 1.5 33 11.4 50 6.2 32.8 16.5 21 15.5 7 1.5 AS2051F-08T 8 15.2 59.8 8.1 36.5 18 AS2001F-07T 1/4" 36 13.2 52.2

V

Electrical Coil Insulation 5.0VA/60Hz, 5.6VA/50Hz Apparent Power AC InRush 2.3VA(1.5W)/60Hz, 3.4VA(2.1W)/50Hz (Power Consumption) Holding 1.8W Power Consumption DC Conduit Terminal Electrical Entry With Indicator Light and Surge Option Voltage Suppressor (FZ Style) H O W T O O R D E R NVFS6000 0 NVFS 6 F P O S I T I O N P O R T S I Z E 1 2 Position Single 2 2 Position Double Without Subplate 06T

Tamper Proof Speed Controller with One-touch Fitting Series AS


1F-T Elbow Type/Universal Type 1

flats) M1 L3 A L5 L4 D3 L1 L2 D2 T Metric Size Inch Size A A D1 d T H D2 D3 D4 L1 L2 L3 L4 L5 L6 M1 d T H D1 D2 D3 D4 L1 L2 L3 L4 L5 L6 M1 Model Model AS131F-M5-23T AS131F-U10/32-01T 1/8" 8.4 3.2 8.4 19.8 19.8 12.7 17.5 28.7 17.5 28.7 12.7 AS131F-M5-04T AS131F-U10/32-03T 5/32" 9.3 M5 x 0.8 8 9.6 9.3 4.5 10.8 31 0.7 27.4 4 9.3 20.3 20.3 0.7 27.4 4.5 31 10.8 10-32 UNF 8 9.6 9.3 AS131F-M5-06T

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

Mounting bolt Model C Mounting bolt CDQP2B12-5D -10D -15D -20D -25D -30D CDQP2B16-5D -10D -15D -20D -25D -30D CDQP2B20-5D -10D -15D -20D -25D -30D -35D -40D -45D -50D CDQP2B25-5D -10D -15D -20D -25D -30D -35D -40D -45D -50D Model C Mounting bolt CDQP2B32-5D -10D -15D -20D -25D -30D -35D -40D -45D -50D -75D -100D CDQP2B40-5D -10D -15D -20D -25D -30D -35D -40D -45D -50D -75D -100D CDQP2B50-

CQ2

Mounting bolt Mounting bolt CDQP2B32-5D -10D -15D -20D -25D -30D -35D -40D -45D -50D -75D -100D CDQP2B40-5D -10D -15D -20D -25D -30D -35D -40D -45D -50D -75D -100D CDQP2B50-10D -15D -20D -25D -30D -35D -40D -45D -50D -75D -100D Mounting bolt CDQP2B12-5D -10D -15D -20D -25D -30D CDQP2B16-5D -10D -15D -20D -25D -30D CDQP2B20-5D -10D -15D -20D -25D -30D -35D -40D -45D -50D CDQP2B25-5D -10D -

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

Mounting bolt Model C Mounting bolt CDQP2B12-5D -10D -15D -20D -25D -30D CDQP2B16-5D -10D -15D -20D -25D -30D CDQP2B20-5D -10D -15D -20D -25D -30D -35D -40D -45D -50D CDQP2B25-5D -10D -15D -20D -25D -30D -35D -40D -45D -50D Mounting bolt CDQP2B32-5D -10D -15D -20D -25D -30D -35D -40D -45D -50D -75D -100D CDQP2B40-5D -10D -15D -20D -25D -30D -35D -40D -45D -50D -75D -100D CDQP2B50-10D -15D

V

(Except DIN Electrical Entry is not possible) 3 5 7 V O LTA G E B AC24v (Not VT325v) 3 AC110v (Not VT325v) 5 DC24v 6 DC12v (Not VT325v) 7 AC230v (Not VT325v) Refer to Series VT307/327 E L E C T R I C A L E N T R Y VZ100 S E R I E S (S E E V A LV E S E C T I O N) H O W T O O R D E R SY/SX B A S E M O U N T E D S E R I E S (T O S U I T T Y P E 42 M A N I F O L D S) External Pilot Types VG342R

Vacuum System Peripherals:

specifications Port size Solenoid valve , VS3115 1 8 1 4 3.8 4.0 9.0 20 , VS3110 1 4 3 8 Body ported , , , 1 2 3 4 VS3135 1 4 1 2 3 8 VS3145 Series VS 3 port solenoid valve Model/Rubber Seal Series VG342 Flow characteristics C (dm3/(sbar)) Effective area (mm2) (Cv) Piping specifications Port size Solenoid valve 210 210 1 2 to 26 to 38 26 to 38 3 4 VG342 1 Body ported 1 2 1 to 3 4 For Vacuum: VG342R

NCQ2/CQ2

CDQP2B32-5D -10D -15D -20D -25D -30D -35D -40D -45D -50D -75D -100D CDQP2B40-5D -10D -15D -20D -25D -30D -35D -40D -45D -50D -75D -100D CDQP2B50-10D -15D -20D -25D -30D -35D -40D -45D -50D -75D -100D CDQP2B12-5D -10D -15D -20D -25D -30D CDQP2B16-5D -10D -15D -20D -25D -30D CDQP2B20-5D -10D -15D -20D -25D -30D -35D -40D -45D -50D CDQP2B25-5D -10D -15D -20D -25D -30D -35D -40D -45D -50D 40

Compact Cylinder

CQP2B12-5D -10D -15D -20D -25D -30D CQP2B16-5D -10D -15D -20D -25D -30D CQP2B20-5D -10D -15D -20D -25D -30D -35D -40D -45D -50D CQP2B25-5D -10D -15D -20D -25D -30D -35D -40D -45D -50D CQP2B32-5D -10D -15D -20D -25D -30D -35D -40D -45D -50D -75D -100D CQP2B40-5D -10D -15D -20D -25D -30D -35D -40D -45D -50D -75D -100D CQP2B50-10D -15D -20D -25D -30D -35D -40D -45D -50D -75D -100D CQP2B63-10D

Compact Cylinder Series CQS

C D 30 35 40 45 50 55 30 35 40 45 50 55 35 40 45 50 C D 55 60 65 70 75 80 35 40 45 50 55 60 65 70 75 80 Cylinder model Mounting bolt size Cylinder model Mounting bolt size CQSWB12-5D -10D -15D -20D -25D -30D CQSWB16-5D -10D -15D -20D -25D -30D CQSWB20-5D -10D -15D -20D CQSWB20-25D -30D -35D -40D -45D -50D CQSWB25-5D -10D -15D -20D -25D -30D -35D -40D -45D -50D M3 x 30L x 35L x 40L x 45L x

CQS

Mounting bolt Mounting bolt D 30 35 40 45 50 55 30 35 40 45 50 55 35 40 45 50 Model C Model C D 55 60 65 70 75 80 35 40 45 50 55 60 65 70 75 80 CQSWB12-5D -10D -15D -20D -25D -30D CQSWB16-5D -10D -15D -20D -25D -30D CQSWB20-5D -10D -15D -20D CQSWB20-25D -30D -35D -40D -45D -50D CQSWB25-5D -10D -15D -20D -25D -30D -35D -40D -45D -50D M3 x 30l x 35l x 40l x 45l x 50l x 55l M3 x 30l x 35l x

Table of Contents

VFR2110-5D 5 sets (2 position single part no.) VFR2410-5D 1 set (3 position exhaust part no.) VVFS2000-R-01-2 1 set (Individual EXH spacer part no.) VV5FR2-01T1-061-02 1 set (Manifold base part no.) VFR2100-5FZ 3 sets (2 position single part no.) VFR2200-5FZ 2 sets (2 position double part no.) VVFS2000-10A 1 set (Blanking plate assembly part no.)

Series CQS 10-/21- 11-/22- ø12, ø16, ø20, ø25 Compact Cylinder

Rod side mounting/Without auto switch Head side mounting/Without auto switch C D Mounting bolt Model C D Mounting bolt Model CQSB12-5D -10D -15D -20D -25D -30D CQSB16-5D -10D -15D -20D -25D -30D CQSB20-5D -10D -15D -20D -25D -30D -35D -40D -45D -50D CQSB25-5D -10D -15D -20D -25D -30D -35D -40D -45D -50D CQSB12-5D -10D -15D -20D -25D -30D CQSB16-5D -10D -15D -20D -25D -30D CQSB20-5D -10D -