Vacuum System Peripherals:

m t r e w q U side D side 13-14-26 26 e Valve Model SX340 is for internal pilot.

V

U B E Applicable Tube OD P Q R S 4 4 23.3 15.8 10.4 H O W T O O R D E R ZPR P A D H O R I Z O N TA L T Y P E 6 6 24.3 16.8 12.8 8 8 26.2 18.7 15.2 W I T H B U F F E R ZPR D I M E N S I O N S PA D D I A M E T E R S 40, 50 P A D D I A M E T E R M O U N T I N G T H R E A D 16 16 20 20 25 25 32 32 40 40 50 50 02 2 04 4 06 6 08 8 10 10 13 13 Symbol Thread Dia 2~8 10~16 40~50 20~32 A8 M8X1 Male

smcmaintenancepartslist

Fit the grooved part of gasket w into the flange part of case q. b. Place element e in case q. Element e must be positioned at the center of case q. c. Set clamp ring t to case q. The tapered part of clamp ring t must be facing downward. d. Set seal part of the element e to the cover r while the flange part of case q is being placed on clamp ring t. e.

SX

Double solenoid SX3240-5MO Single solenoid Common connector assembly SX100-42-4D SX3140-5MO Common connector assembly SX100-42-4S Common connector assembly (With common lead wire) SX100-40-4S SS5X3-41-04-C6 1 set SX3140-5MO 2 set SX3240-5MO 2 set SX100-40-4S 1 set (Single solenoid with lead wire for common) SX100-42-4S 1 set (Single solenoid) SX100-42-4D 2 set (Double solenoid, 3 position

SZ3000

External power supply 24VDC10% Q DeviceNet compatible: OMRON Corp.

Suction Guard (Produced upon receipt of order) FHG Series

Air breather t (cap) Material r Seal (Nominal size) KA00463 (1A-G65) KA00793 (1A-G85) KA00065 (1A-G95) KA00614 (4D-G65) KA00703 (4D-G85) KA00705 (4D-G95) (Nominal size) KA00080 (1A-P34) KA00808 (1A-P60) q Seat seal 04 to 08 AL-180H AL-183H AL-162H Lubrication port strainer 10 to 16 NBR AL-181H AL-184H AL-163H Hexagon nut 20 to 24 AL-182H AL-185H AL-164H e Suction pipe Tension bolt KA00105

air-filter-e

KT-FGDC KT-FGDE KT-FGDT KT-FGDF Replacement parts A 1 kit for each of each one of seals q to t and gasket.

Air Preparation Equipment

KT-FGDC KT-FGDE KT-FGDT KT-FGDF Replacement parts A 1 kit for each of each one of seals q to t and gasket.

Series 10-SZ3000 5 Port Solenoid Valve Cassette Type Manifold

Ordering example Double solenoid (24 VDC) 10-SZ3260-5LOZ-C6(-Q) (3 sets) SUP/EXH block assembly (U side mounting) Single solenoid (24 VDC) 10-SZ3160-5LOZ-C6(-Q) (2 sets) Manifold base (5 stations) 10-SS5Z3-60S6BD-05U(-Q) SI unit part no. LOCK FREE SI unit specifications SI unit part no.

SZ3000

Specifications External power supply Q 0.1 A F, H, J1, J2, Q, R1, R2, V EX140-SDN1 DeviceNet, CompoBus/D (OMRON Corp.)

IDU/IDF

Note 5) Spare part for auto drain INA-20-41-04 is AD44x445.

Proposals for Energy Saving

06 08 10 12 16 Symbol 01 02 03 04 06 Tubing O.D. mm 4 6 8 10 12 16 Hose O.D.

Table of Contents

0 IS1000 No. q w e r t y u i o !

Table of Contents

Special resin Carbon steel Description No. q w e r t y u i o !

Table of Contents

6 q !4 @1 w @4 !0 y !3 !5 @3 !0 !

PF2A/PF2W

Connector size Number of pins Manufacturer Applicable series Correns Corporation VA-4D OMRON Corporation XS2 4 M12 PA5-4I Yamatake Corporation HR24 Hirose Electric Co., Ltd. CM01-8DP4S DDK Ltd. 16-11-15 12 Series PF2D Dimensions PF2A703H/706H/712H Internal circuit and wiring example to are terminal numbers.

Auto Switch Guide

DManufacturer Connector size Number of pins Applicable series example M8-3D 3 -X Corrence Corporation M8 M8-4D 20XS3 OMROM Corporation VA-4D Corrence Corporation Data XS2 OMROM Corporation 4 M12 PA5-4I Yamatake-Honeywell Co., Ltd. HR24 Hirose Electric Co., Ltd.

FQ1

Filtration material: HEPO II (PP) w q e r w q er 0.1 0.1 0.05 0.05 Pressure drop MPa Pressure drop MPa Filtration accuracy (m) 2 4 6 13 Filtration accuracy (m) 0.5 1 5 10 20 50 75 100 No.

Filter for Cleaning Solvent Quick Change Filter Series FQ1

Filtration material: HEPO II (PP) w q e r w q er 0.1 0.1 0.05 0.05 Pressure drop MPa Pressure drop MPa Filtration accuracy (m) 2 4 6 13 Filtration accuracy (m) 0.5 1 5 10 20 50 75 100 No.

LEC-OM07605CN

PB26](_ _ _ 1) 5 28 5. [] PB45 CNHF _ _ x x 5.5 00h _ x _ _ 5.6 0h x _ _ _ 0h 5.5 [Hz] [Hz] [Hz] 00 20 70 40 17.6 01 2250 21 66 41 16.5 02 1125 22 62 42 15.6 03 750 23 59 43 14.8 04 562 24 56 44 14.1 05 450 25 53 45 13.4 06 375 26 51 46 12.8 07 321 27 48 47 12.2 08 281 28 46 48 11.7 09 250 29 45 49 11.3 0A 225 2A 43 4A 10.8 0B 204 2B 41 4B 10.4 0C 187 2C 40 4C 10 0D 173 2D 38 4D