Aluminum High Vacuum Angle Valve

Note 2) Solenoid valves 2 position single: XLGV-16, 25, 40: SYJ3190 XLGV-50, 63, 80: SY3120 2 position double: XLGV-16, 25, 40: SYJ3290 XLGV-50, 63, 80: SY3220 Example) SYJ3190-1GS, SYJ3290-1GS, SY3120-1GS-C4, SY3220-1GS-C4 For details, consult your SMC sales representative. For option Q, the solenoid valve should be a CE-compliant product.

XL

Note 2) Solenoid valves 2 position single: XLGV-16, 25, 40: SYJ3190 XLGV-50, 63, 80: SYJ5190 2 position double: XLGV-16, 25, 40: SYJ3290 XLGV-50, 63, 80: SYJ5290 Examples) SYJ3190-1GS SYJ3290-1GS For further details on solenoid valves, refer to the SMC solenoid valve catalog "SYJ 3000, 5000, 7000" (N237). Note 3) The direction of solenoid valves cannot be changed.

High Vacuum Angle Valve, XL Series

Note 2) Solenoid valves 2 position single: XLGV-16, 25, 40: SYJ3190 XLGV-50, 63, 80: SYJ5190 2 position double: XLGV-16, 25, 40: SYJ3290 XLGV-50, 63, 80: SYJ5290 Examples) SYJ3190-1GS SYJ3290-1GS Note 3) The direction of solenoid valves cannot be changed.

Air Fittings & Tubing

No. of connecting tubes Applicable tubing Accessories (optional) Polyurethane TU0425 Socket side only DM6S-04N DM6S-04NU DM6S-06N DM6S-06NU DM12S-04N DM12S-04NU DM12S-06N DM12S-06NU Nylon T0425 T0403 T0604 Soft nylon TS0425 Plug side only DM6P-04N DM6P-04NU DM6P-06N DM6P-06NU DM12P-04N DM12P-04NU DM12P-06N DM12P-06NU Multiconnector DM6-04N DM6-04NU DM6-06N TU0604 DM6-06NU 6 DM-C-6 TS0604

Table of Contents

Model Model No. of connecting tubes Applicable tubing Accessory (Option) Multi-connector Polyurethane TU0425 Plug side DM6P-04N DM6P-04NU DM6P-06N DM6P-06NU DM12P-04N DM12P-04NU DM12P-06N DM12P-06NU Socket side DM6S-04N DM6S-04NU DM6S-06N DM6S-06NU DM12S-04N DM12S-04NU DM12S-06N DM12S-06NU Soft nylon TS0425 Nylon T0425 T0403 T0604 DM6-04N DM6-04NU DM6-06N DM6-06NU DM12-04N DM12-04NU DM12

DM

Model Model No. of connecting tubes Applicable tubing Accessory (Option) Multi-connector Polyurethane TU0425 Plug side DM6P-04N DM6P-04NU DM6P-06N DM6P-06NU DM12P-04N DM12P-04NU DM12P-06N DM12P-06NU Socket side DM6S-04N DM6S-04NU DM6S-06N DM6S-06NU DM12S-04N DM12S-04NU DM12S-06N DM12S-06NU Nylon T0425 T0403 T0604 Soft nylon TS0425 DM6-04N DM6-04NU DM6-06N DM6-06NU DM12-04N DM12-04NU DM12

One-touch installation and removal Series DM

(d) 1.6 3 1.6 3 DM6-04N DM6-06N DM6-04NU DM6-06NU DM12-04N DM12-06N DM12-04NU DM12-06NU 5 29 6 31 71

DM

No. of connecting tubes Applicable tubing Accessories (optional) Polyurethane TU0425 Socket side only DM6S-04N DM6S-04NU DM6S-06N DM6S-06NU DM12S-04N DM12S-04NU DM12S-06N DM12S-06NU Nylon T0425 T0403 T0604 Soft nylon TS0425 Plug side only DM6P-04N DM6P-04NU DM6P-06N DM6P-06NU DM12P-04N DM12P-04NU DM12P-06N DM12P-06NU Multiconnector DM6-04N DM6-04NU DM6-06N TU0604 DM6-06NU 6 DM-C-6 TS0604

High Vacuum Angle Valve

Example) XLFV-40L-2M9NA-1G-XAN1A *1 Produced by Mitsubishi Cable Industries, Ltd. * With solenoid valve: Option specifications/Combinations This model has indicator, auto switch, and K (DN) flange options, but hightemperature/heater options are not available. * Solenoid valves XLFV-16, 25, 40: SYJ319, XLFV-50, 63, 80: SYJ519 Example) SYJ319-1GS, etc.

KJ

(d) 1.6 3 1.6 3 A B DM12-04N DM12-06N DM12-04NU DM12-06NU DM6-04N DM6-06N DM6-04NU DM6-06NU 5 31 6 31 15-2-102 4 Multi-connector Series DM Precautions Be sure to read before handling. Refer to pages 15-18-3 to 15-18-4 in the front matter for Safety Instructions and Common Precautions mentioned in this catalog, and refer to pages 15-1-10 to 15-1-11 for Precautions on every series.

Pilot: External Pilot, Voltage: 100VAC 50/60HZ, Lead Wire: Grommet Lead Wire 0.3m, Surge Suppressor: Surge Suppressor, Port Size: 1, Thread: NPT, Passage: -, Option: -, CE Compliant: -

Pilot: R (External Pilot), Voltage: 1 (100VAC 50/60HZ), Lead Wire: G (Grommet Lead Wire 0.3m), Surge Suppressor: S (Surge Suppressor), Port Size: 10 (1), Thread: N (NPT)

CATALOG

(Except DIN Electrical Entry is not possible) 3 5 7 V O LTA G E B AC24v (Not VT325v) 3 AC110v (Not VT325v) 5 DC24v 6 DC12v (Not VT325v) 7 AC230v (Not VT325v) Refer to Series VT307/327 E L E C T R I C A L E N T R Y VZ100 S E R I E S (S E E V A LV E S E C T I O N) H O W T O O R D E R SY/SX B A S E M O U N T E D S E R I E S (T O S U I T T Y P E 42 M A N I F O L D S) External Pilot Types VG342R

V

(Except DIN Electrical Entry is not possible) 3 5 7 V O LTA G E B AC24v (Not VT325v) 3 AC110v (Not VT325v) 5 DC24v 6 DC12v (Not VT325v) 7 AC230v (Not VT325v) Refer to Series VT307/327 E L E C T R I C A L E N T R Y VZ100 S E R I E S (S E E V A LV E S E C T I O N) H O W T O O R D E R SY/SX B A S E M O U N T E D S E R I E S (T O S U I T T Y P E 42 M A N I F O L D S) External Pilot Types VG342R

Vacuum System Peripherals:

specifications Port size Solenoid valve , VS3115 1 8 1 4 3.8 4.0 9.0 20 , VS3110 1 4 3 8 Body ported , , , 1 2 3 4 VS3135 1 4 1 2 3 8 VS3145 Series VS 3 port solenoid valve Model/Rubber Seal Series VG342 Flow characteristics C (dm3/(sbar)) Effective area (mm2) (Cv) Piping specifications Port size Solenoid valve 210 210 1 2 to 26 to 38 26 to 38 3 4 VG342 1 Body ported 1 2 1 to 3 4 For Vacuum: VG342R

This is a legacy product, and replaced byVG342R-5DZ-06N

Pilot: External Pilot, Voltage: 110VAC 50/60HZ, Lead Wire: DIN Connector, Surge Suppressor: None, Port Size: 3/4, Thread: NPT, Passage: -, Option: -, CE Compliant: -

Pilot: External Pilot, Voltage: 240VAC 50/60HZ, Lead Wire: DIN Connector, Surge Suppressor: Light & Surge Suppressor, Port Size: 3/4, Thread: NPT, Passage: -, Option: -, CE Compliant: -

Pilot: External Pilot, Voltage: 24VDC, Lead Wire: Grommet Lead Wire 0.3m, Surge Suppressor: None, Port Size: 3/4, Thread: NPT, Passage: -, Option: -, CE Compliant: -

Pilot: External Pilot, Voltage: 200VAC 50/60HZ, Lead Wire: Grommet Lead Wire 0.3m, Surge Suppressor: None, Port Size: 3/4, Thread: NPT, Passage: -, Option: -, CE Compliant: -