2

M Q Q Note) D is maximum diameter.

AC Servo Motor Driver (Network card type ）

TROUBLESHOOTING Alarm No.: 7D Name: Safety observation error Alarm content The safety observation function detected an error. Detail No. Detail name Cause Check method Check result Action 7D.1 Stop (1) During activation of Check that the actual servo motor position is higher than the setting The travel distance of the servo motor is larger than the setting value in [Pr.PSA05].

Direct Operated Pilot Operated 2-Port Solenoid Valve Refer to pages 7, 9, 11, 25, 35, and 39 for details.

In the case of liquids: P Q = 53 Kv (9) G Q : Flow rate [L/min] Kv : Flow coefficient [m3/h] DP : Pressure difference [MPa] G : Relative density [water = 1] In the case of saturated aqueous vapor: Q = 232 Kv P (P2 + 0.1) (10) Q : Flow rate [kg/h] Kv : Flow coefficient [m3/h] DP : Pressure difference [MPa] P1 : Upstream pressure [MPa]: DP = P1 P2 P2 : Downstream pressure [MPa] 57 Solenoid

7

3 IN(P1) r OUT(P2) VXB B A OUT(P2) A B VXE IN(P1) C C IN(P1) e e q w VXP q w VXD2A VXD2B VXR !4 i VXH !4 u u !0 VXF A B !1 i VX3 !2 !0 !2 VXA o !1 t !3 o OUT (P2) w IN(P1) !3 B r OUT(P2) A r IN (P1) e C e IN(P1) C q w q VXD2E, 2F, 2G VXD2C, 2D Component Parts Operation When coil !

3

In the case of liquid: P Q = 53Kv (9) G Q : Flow rate [L/min] Kv : Flow coefficient [m3/h] P : Pressure difference [MPa] G : Relative density [water = 1] In the case of saturated aqueous vapor: Q = 232Kv P(P2 + 0.1) (10) Q : Flow rate [kg/h] Kv : Flow coefficient [m3/h] P : Pressure difference [MPa] P1 : Upstream pressure [MPa]: P = P1 P2 P2 : Downstream pressure [MPa] 230 Solenoid Valve

Series IDG

NS30-7D Membrane Air Dryer Series IDG Space Saving Design Low Dew Point Models (-76F) No Heat Generation No Vibration Membrane Air Dryer Series IDG Dew point indicator Environmentally friendly (non-freon) Dew point indicator confirms air drying at a glance Power supply not required (except IDG1) (optional on IDG3, IDG5, IDG3H, IDG5H) A power supply is completely unnecessary.

3 Port Solenoid Valve/

M12 connector pin number Wiring specification w r q e w w q e e r q r VG342(R)-X87 Internal pilot External pilot External pilot/With check valve 2(A) 2(A) 2(A) w r w r w r q e q e q e 3(R) 3(R) 3(R) w r w r w r q e q e q e 3(R) 3(R) 3(R) 1(P) X X Safety limit switch terminal [N.C.]

3 Port Solenoid Valve/

M12 connector pin number Wiring specication w r q e w w q e e r q r VG342(R)-X87 Internal pilot External pilot External pilot/With check valve 2(A) 2(A) 2(A) w r w r w r q e q e q e 3(R) 3(R) 3(R) w r w r w r q e q e q e 3(R) 3(R) 3(R) 1(P) X X Safety limit switch terminal [N.C.]

OMS0020

29 1D GS 61 3D = 93 5D ] 125 7D } 30 1E RS 62 3E > 94 5E ^ 126 7E ~ 31 1F US 63 3F ?

OMU0023

29 1D GS 61 3D = 93 5D ] 125 7D } 30 1E RS 62 3E > 94 5E ^ 126 7E ~ 31 1F US 63 3F ?

V100

r e w q r e w q VG VP S070 VQ VKF N.C.

Proposals for Energy Saving

Equipment w e q Digital flow switch for air Air leakage tester Compact manometer Equipment Equipment Equipment Equipment q w Air leakage tester Main Points w Measure air leakage rate and air blow rate Air leakage tester. (Made to order) Page 133 q Measure main line and branch line flow rates. Digital flow switch for air Series PFA Page 84 e Measure air blow rate.

Vacuum System Peripherals:

m t r e w q U side D side 13-14-26 26 e Valve Model SX340 is for internal pilot.

Secondary Batteries

Auto switch mounting brackets are not required. w q w e q Note 1) When a compact auto switch is mounted on 3 sides (A, B, and C above) other than the port side of each cylinder series with 32 to 50, auto switch mounting brackets above are required. Order them separately from cylinders.

In-line Air Filter

Applicable filter Element size Quantity ZFC-EL-1 ZFC1 5 x 3 x L11 10 ZFC-EL-2 ZFC3 6 x 4 x L25 10 2 Cover Resin PBT 2 ZFC-EL-3 ZFC5 12 x 8 x L20 10 3 Element Sintered resin 1 ZFC-EL-4 ZFC7 16 x 12 x L25 10 4 O-ring HNBR 2 5 Bracket Resin PBT 1 w OUT e w One-touch fitting r q IN r One-touch fitting t Element Replacement Procedure 1.

VG342

Pilot valve assembly for VG342 Valve option Light/Surge voltage suppressor Standard type Nil Energy-saving type Y Nil None Continuous duty type E S With surge voltage suppressor (Grommet type is only available.)

Pilot: Internal Pilot, Voltage: 220VAC 50/60HZ, Lead Wire: DIN Connector, Surge Suppressor: None, Port Size: 1/2, Thread: G, Passage: Normally Closed, Option: Standard, CE Compliant: CE Compliant

Pilot: Internal Pilot, Voltage: 110VAC 50/60HZ, Lead Wire: DIN Connector, Surge Suppressor: Light & Surge Suppressor, Port Size: 1/2, Thread: G, Passage: Normally Closed, Option: Standard, CE Compliant: CE Compliant

Type: Solenoid Valves, Application: Single Unit, Mounting Orientation: Direct, Voltage: DC24V, Specification: Standard / Lubrication Free, Valve Type: 3-Port Valve, Actuation: [Single] Single, Status at Power Off: Self-Recovery (Spring Return), Valve Positions: 2-Position Normally Closed, Pipe Port Type: G, Port Size: 1/2, Pressure Rating(MPa): 02 to 0.9, Driving Type: Pilot Type Poppet,

Type: Solenoid Valves, Application: Single Unit, Mounting Orientation: Direct, Voltage: DC24V, Specification: Standard / Lubrication Free, Valve Type: 3-Port Valve, Actuation: [Single] Single, Status at Power Off: Self-Recovery (Spring Return), Valve Positions: 2-Position Normally Closed, Pipe Port Type: G, Port Size: 1/2, Pressure Rating(MPa): 02 to 0.9, Driving Type: Pilot Type Poppet,