Pilot: Internal Pilot, Voltage: 5 (24VDC), Lead Wire: G (Grommet Lead Wire 0.3m), Surge Suppressor: S (Surge Suppressor), Port Size: 04 (1/2), Thread: N (NPT), Passage: A (Normally Closed)

High Vacuum L Type Valve

XLFV16A-30-1-2M9NA-5GS-XN1 Note 4) Bonnet assembly contains the valve seal 1, valve seal 2, and nut assembly. It does not contain external seal. Order separately if it is required.

3 Port Solenoid Valve/

M12 connector pin number Wiring specication w r q e w w q e e r q r VG342(R)-X87 Internal pilot External pilot External pilot/With check valve 2(A) 2(A) 2(A) w r w r w r q e q e q e 3(R) 3(R) 3(R) w r w r w r q e q e q e 3(R) 3(R) 3(R) 1(P) X X Safety limit switch terminal [N.C.]

3 Port Solenoid Valve/

M12 connector pin number Wiring specification w r q e w w q e e r q r VG342(R)-X87 Internal pilot External pilot External pilot/With check valve 2(A) 2(A) 2(A) w r w r w r q e q e q e 3(R) 3(R) 3(R) w r w r w r q e q e q e 3(R) 3(R) 3(R) 1(P) X X Safety limit switch terminal [N.C.]

V100

r e w q r e w q VG VP S070 VQ VKF N.C.

Proposals for Energy Saving

(P .E.)

VG342

Pilot valve assembly for VG342 Valve option Light/Surge voltage suppressor Standard type Nil Energy-saving type Y Nil None Continuous duty type E S With surge voltage suppressor (Grommet type is only available.)

Vacuum System Peripherals:

e Valve Model SX340 is for internal pilot.

Secondary Batteries

Electric Actuators/Cylinders 6 Electric Actuator Series LJ1/LG1 Electric Actuator with Integrated Guide Series LTF Series LJ1 Short Stroke Electric Actuator Series LX Electric Cylinder Series LZB/LDZB/LZC/LDZC Electric Gripper Series LEHZ/LEHF Series LX Electric Slide Table Series LES e-Rodless Actuator Series E-MY2 Series LEHZ Series E-MY2 Front matter 17 a C O N T E N T S Product

VG300-OMI0003

-2No.VG300**-OMI0003-A V V V VG342 G342 G342 G342 / / / / , 1 1 1 1 1.5 1.5 1.5 1.5 *3) *3) *3) *3) 3 3 3 3) ) ) ) 1 1 1 1 1 1 1 1 () -3No.VG300**-OMI0003-A VG342 VG342 VG342 VG342(R) (R) (R) (R) Series Series Series Series 3 3 3 3 / / / / C-R C-R DC % AC 15% SSR SSR SSR SSR AC AC AC AC 1 C-R OFF 2 1V -10 ( ( ( ( ) ) ) ) () 1 -4No.VG300**-OMI0003-A VG342 VG342 VG342 VG342(R) (R)

Pilot: Internal Pilot, Voltage: 12VDC, Lead Wire: DIN Connector, Surge Suppressor: None, Port Size: 1/2, Thread: NPT, Passage: Normally Closed, Option: Continuous Duty, CE Compliant: -

Pilot: Internal Pilot, Voltage: 12VDC, Lead Wire: DIN Connector, Surge Suppressor: Light & Surge Suppressor, Port Size: 1/2, Thread: NPT, Passage: Normally Closed, Option: Continuous Duty, CE Compliant: -

Pilot: Internal Pilot, Voltage: 110VAC 50/60HZ, Lead Wire: Grommet Lead Wire 0.3m, Surge Suppressor: Surge Suppressor, Port Size: 1/2, Thread: NPT, Passage: Normally Closed, Option: Continuous Duty, CE Compliant: -

Pilot: Internal Pilot, Voltage: 24VDC, Lead Wire: Grommet Lead Wire 0.3m, Surge Suppressor: None, Port Size: 1/2, Thread: NPT, Passage: Normally Closed, Option: Continuous Duty, CE Compliant: -

Type: Solenoid Valves, Application: Single Unit, Mounting Orientation: Direct, Voltage: AC110V, Specification: Standard / Lubrication Free, Valve Type: 3-Port Valve, Actuation: [Single] Single, Status at Power Off: Self-Recovery (Spring Return), Valve Positions: 2-Position Normally Closed, Pipe Port Type: NPT, Port Size: 1/2, Pressure Rating(MPa): 02 to 0.9, Driving Type: Pilot Type Poppet

Type: Solenoid Valves, Application: Single Unit, Mounting Orientation: Direct, Voltage: AC110V, Specification: Standard / Lubrication Free, Valve Type: 3-Port Valve, Actuation: [Single] Single, Status at Power Off: Self-Recovery (Spring Return), Valve Positions: 2-Position Normally Closed, Pipe Port Type: NPT, Port Size: 1/2, Pressure Rating(MPa): 02 to 0.9, Driving Type: Pilot Type Poppet

Type: Solenoid Valves, Application: Single Unit, Mounting Orientation: Direct, Voltage: AC110V, Specification: Standard / Lubrication Free, Valve Type: 3-Port Valve, Actuation: [Single] Single, Status at Power Off: Self-Recovery (Spring Return), Valve Positions: 2-Position Normally Closed, Pipe Port Type: NPT, Port Size: 1/2, Pressure Rating(MPa): 02 to 0.9, Driving Type: Pilot Type Poppet

Type: Solenoid Valves, Application: Single Unit, Mounting Orientation: Direct, Voltage: DC24V, Specification: Standard / Lubrication Free, Valve Type: 3-Port Valve, Actuation: [Single] Single, Status at Power Off: Self-Recovery (Spring Return), Valve Positions: 2-Position Normally Closed, Pipe Port Type: NPT, Port Size: 1/2, Pressure Rating(MPa): 02 to 0.9, Driving Type: Pilot Type Poppet

Type: Solenoid Valves, Application: Single Unit, Mounting Orientation: Direct, Voltage: DC24V, Specification: Standard / Lubrication Free, Valve Type: 3-Port Valve, Actuation: [Single] Single, Status at Power Off: Self-Recovery (Spring Return), Valve Positions: 2-Position Normally Closed, Pipe Port Type: NPT, Port Size: 1/2, Pressure Rating(MPa): 02 to 0.9, Driving Type: Pilot Type Poppet

Pilot: Internal Pilot, Voltage: 3 (110VAC 50/60HZ), Lead Wire: D (DIN Connector), Surge Suppressor: Z (Light & Surge Suppressor), Port Size: 04 (1/2), Thread: N (NPT), Passage: A (Normally Closed), Option: E (Continuous Duty)