Table of Contents

3 q !1 y r i e Component Parts Description Material Material Note Note Description No. q w e r t y u No. i o !0 !1 !2 !

Pilot: Internal Pilot, Voltage: 3 (110VAC 50/60HZ), Lead Wire: D (DIN Connector), Surge Suppressor: None, Port Size: 06 (3/4), Thread: N (NPT), Passage: A (Normally Closed), Option: E (Continuous Duty), CE Compliant: Q (CE Compliant)

Pilot: Internal Pilot, Voltage: 110VAC 50/60HZ, Lead Wire: DIN Connector, Surge Suppressor: None, Port Size: 3/4, Thread: NPT, Passage: Normally Closed, Option: Continuous Duty, CE Compliant: CE Compliant

2

M Q Q Note) D is maximum diameter.

Pilot: Internal Pilot, Voltage: 3 (110VAC 50/60HZ), Lead Wire: D (DIN Connector), Surge Suppressor: None, Port Size: 06 (3/4), Thread: N (NPT), Passage: A (Normally Closed)

Type: Solenoid Valves, Application: Single Unit, Mounting Orientation: Direct, Voltage: AC110V, Specification: Standard / Lubrication Free, Valve Type: 3-Port Valve, Actuation: [Single] Single, Status at Power Off: Self-Recovery (Spring Return), Valve Positions: 2-Position Normally Closed, Pipe Port Type: NPT, Port Size: 3/4, Pressure Rating(MPa): 02 to 0.9, Driving Type: Pilot Type Poppet

Series SV

SV400 SV300 SV200 SV100 Die-cast aluminium See thread types on page 86 for . 3/8: SY9000-27-1 1/4: SY7000-27-1-Q SY5000-27-1-Q SY3000-27-1-Q Sub-plate 8 1/2: SY9000-27-2 3/8: SY7000-27-2-Q Gasket SY5000-11-18 SY9000-11-2 SY7000-11-14 SY3000-11-25 9 For valve mounting (flat nickel plated) Round head combination screw SV2000-21-1 (M3 x 30) SV2000-21-2 (M3 x 40) SV3000-21-1 (M4 x 35) SX3000-

MRHQ

MRHQ10 P407090-1 MRHQ10D P407090-3D Switch holder B MRHQ16 MRHQ10S P407090-3S MRHQ20 P407060-1 MRHQ10C P407090-3C Switch case MRHQ25 MRHQ16D P407060-3D MRHQ16S P407060-3S MRHQ16C P407060-3C MRHQ20D P407080-3D MRHQ20S P407080-3S Switch holder A MRHQ20C P407080-3C MRHQ25D P408080-3D Each unit includes two of each of the parts indicated left. Switches are not included with a unit.

Table of Contents

0 t t r i w e r i u w y e q Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com q VQ7-8-FG-DVQ7-8-FG-D-R !0 !0 t t r i w y e q r i w e q VQ7-8-D-R FHG FJG FIG VQ7-8-DFHG FJG FIG !0 !0 t t r i w y e q r i w e q VQ7-8-FPG-D!

[Option] 3 Port Solenoid Valve Direct Operated Poppet Type VT317 Series Rubber Seal

Disassembly 1) After loosening the screw q, then if the housing r is pulled in the direction of the screw q, the connector will be removed from the body of equipment (solenoid, etc.). 2) Pull out the screw q, then remove the gasket or . 3) On the bottom part of the terminal block e, theres a cut-off part (indication of an arrow) .

3 Port Solenoid Valve/

M12 connector pin number Wiring specication w r q e w w q e e r q r VG342(R)-X87 Internal pilot External pilot External pilot/With check valve 2(A) 2(A) 2(A) w r w r w r q e q e q e 3(R) 3(R) 3(R) w r w r w r q e q e q e 3(R) 3(R) 3(R) 1(P) X X Safety limit switch terminal [N.C.]

Proposals for Energy Saving

Equipment w e q Digital flow switch for air Air leakage tester Compact manometer Equipment Equipment Equipment Equipment q w Air leakage tester Main Points w Measure air leakage rate and air blow rate Air leakage tester. (Made to order) Page 133 q Measure main line and branch line flow rates. Digital flow switch for air Series PFA Page 84 e Measure air blow rate.

New

Conduit P type Q R S Q R S T Q R Q R 1 2 1/8, 1/4 1/4, 3/8 1/4, 3/8 64.5 67 69.5 69.5 34 45 50 53 52.5 55 57.5 57.5 99.5 102 104.5 104.5 36 47 52 55 68.5 71 73.5 73.5 77 91 96 47.5 50 52.5 52.5 36 47 52 55 23 25.5 28 28 42 53.5 58 61 3 1/2 101.5 23 Series VX2 For Air mm Dimensions/Body Material: Resin Y Y Grommet (with surge voltage suppressor) Grommet W W U U X X U1 U1 X1 X1 z300 Q F D

IDU/IDF

Not available for IDF1D to 3D, IDU22C to 75C. Dust proof filter set (A) (25) (25) (B) (10) Part No.

Rotary Gripper Series MRHQ

P407090-1 P406090-3D MRHQ10D Switch holder B P406090-3S MRHQ10S P407060-1 P406090-3C MRHQ10C Switch case P406060-3D MRHQ16D P406060-3S MRHQ16S P406060-3C MRHQ16C P407080-3D MRHQ20D P407080-3S MRHQ20S Switch holder A P407080-3C MRHQ20C P408080-3D MRHQ25D Two of each part indicated at the left are included in a unit. Switches are not included with a unit.

LEC-OM02904

EEP-ROM 12 10 4. 3D No.PD16PD17 8 11 8 (2) 45 1. 55 0 55 2. ( 2.1) 3. 4. 5. 46 1. 40 0 40 2. 1. 2. 3. 3. 47 1. (2.6) 2. 3. 8 12 8 (2) 50 1 1. 1. 2. 3. 4. 5. 1 2. 2(51) 1. 2. 3. 1 3. 1. 12 2. 3. 4. 4. OFF 8 13 8 (2) 51 2 1. 2. 1. 2. 3. 4. 3. 1. 2. 3. 4. UVW UVW 5.

Vacuum System Peripherals:

m t r e w q U side D side 13-14-26 26 e Valve Model SX340 is for internal pilot.

Pilot: Internal Pilot, Voltage: 3 (110VAC 50/60HZ), Lead Wire: D (DIN Connector), Surge Suppressor: None, Port Size: 06 (3/4), Thread: N (NPT), Passage: A (Normally Closed), Option: E (Continuous Duty)

Pilot: Internal Pilot, Voltage: 110VAC 50/60HZ, Lead Wire: DIN Connector, Surge Suppressor: None, Port Size: 3/4, Thread: NPT, Passage: Normally Closed, Option: Continuous Duty, CE Compliant: -

Secondary Batteries

Auto switch mounting brackets are not required. w q w e q Note 1) When a compact auto switch is mounted on 3 sides (A, B, and C above) other than the port side of each cylinder series with 32 to 50, auto switch mounting brackets above are required. Order them separately from cylinders.