Pilot: Internal Pilot, Voltage: 110VAC 50/60HZ, Lead Wire: DIN Connector, Surge Suppressor: None, Port Size: 1/2, Thread: Rc, Passage: Normally Closed, Option: Continuous Duty, CE Compliant: -

Pilot: Internal Pilot, Voltage: 3 (110VAC 50/60HZ), Lead Wire: D (DIN Connector), Surge Suppressor: None, Port Size: 04 (1/2), Thread: Rc, Passage: A (Normally Closed), Option: Standard, CE Compliant: Q (CE Compliant)

Pilot: Internal Pilot, Voltage: 3 (110VAC 50/60HZ), Lead Wire: D (DIN Connector), Surge Suppressor: None, Port Size: 04 (1/2), Thread: Rc, Passage: A (Normally Closed), Option: E (Continuous Duty)

Series VG342 is a 3 port pilot poppet solenoid valve and can be used as a selector or divider valve (external pilot). Actuation is changeable between N.C., N.O., or external pilot types. VG342 is possible to use in vacuum or under low pressures.

Series VG342 is a 3 port pilot poppet solenoid valve and can be used as a selector or divider valve (external pilot). Actuation is changeable between N.C., N.O., or external pilot types. VG342 is possible to use in vacuum or under low pressures.

2

(mm) Weight (g) Nylon Urethane 2 4 KQ2R02-04A 5.8 27.8 14.5 11.9 0.9 1.4 0.6 D Applicable tubing 3.2 4 KQ2R23-04A 7.1 28.6 15.3 13.3 3.4 2.9 2.5 0.8 6 KQ2R23-06A 7.1 29.1 15.8 13.3 3.4 2.9 2.5 1 4 6 KQ2R04-06A 8.2 28.6 15.3 13.3 5.6 4 3 1.1 8 KQ2R04-08A 8.2 29.6 15.4 13.3 5.6 4 3 1.3 10 KQ2R04-10A 10.4 31.7 16.1 13.3 5.6 4 3 2.2 M A L Applicable fitting size d 4 KQ2R06-04A 10.4 33.6 20.3

LEC-OM071xx

In the following cases, error A.04A (parameter setting error) will occur when the power supply is turned back ON or CONFIG command is executed. One 4-byte parameter is not registered for two consecutive bank members. The total number of bank data entries exceeds 64 (Pn900 Pn901 > 64). 5.

V100

Take proper measures to prevent dust or foreign matter from accumulating in this area. (6) (3e) VQZ (3d) (3d) (3c) VZ (3) (9) (3a) VS (3e) (8) Electrical Connection VFN (9) For wiring to DIN terminal, connect the positive (+) polar side with connector terminal no. 1 and the negative () side with connector terminal no. 2 when the rated voltage is DC type. (3e) Magnifying figure (2a) Self-up

LEC-OM069xx

In the following cases, error A.04A (parameter setting error 2) will occur when the power supply is turned ON or CONFIG command is executed. One 4-byte parameter is not registered for two bank members. The total number of bank data entries exceeds 64 (Pn900 Pn901 > 64). 6.

One-touch Fittings

KQ2LE12-00A KQ16-P01N KQ2E16-00N KQ2E16-03N, KQ2E16-04N KQ16-P01A KQ2E16-00A KQ2E16-03A, KQ2E16-04A Color Cap Applicable tubing O.D.

Speed Controller with One-touch Fitting

X21 AS-FM AS-D Laser printing AS-T ASP Restrictor (Without check valve) 3 -X214 ASN Example) AS2201F-G01-04A-X214 AQ Note) The restrictor is only compatible with the part number of the meter-out type. ASV X214 AK Laser printing VCHC ASR ASQ Clean Series 4 10Example) 10-AS2201F-G01-04A Note 1) Fluorine grease is used. Note 2) The particle generation class is 5.

Speed Controller with

AS2002F-04A When connecting 4 pcs. and mounting L-brackets on both sides AS-34B AS-36B AS-37B AS-38B AS1002Fm-07A Speed controller AS2002F-04A 4 pcs. AS-32B AS-34B AS-36B AS-37B AS2002Fm-03A AS-38B AS2002Fm-07A L-bracket AS-20L 2 pcs.

Table of Contents

Port size VCB2 VCW20-12-01A 34 40 25 30 12.8 12.8 5 4.5 6 13 1/8, 1/4 VCW30-12-02A 42 52 30 40 19 19 6 5.5 7 19 1/4, 3/8 VCB3 VCW30-12-04A Note 1) 48 56 36 44 23 23 6 5.5 7 23 1/2 VCW40-12-02A 42 52 30 40 23 23 6 5.5 7 19 1/4, 3/8 VCB4 VCW30-12-04A Note 1) 48 56 36 44 23 23 6 5.5 7 23 1/2 VCW40-12-06A 56 65 44 53 28.2 28.2 6 5.5 7 26 3/4 2 mounting screws (for mounting bracket) are included

Speed Controller with One-touch Fitting Stainless Steel Type Elbow Type/Universal Type AS-FG Series Push-lock type

32UNF AS-FG Series Dimensions/ Universal type Seal method: Gasket seal For M5, 10-32UNF Applicable tubing O.D. d D3 D1 AS-F TMH L4 L3 M ASD AS D2 AS-FE L5 A KE AS-FG AS-FG H T AS-FP L1 L2 AS-FM AS-D Metric Size [mm] AS-T Model d T H D1 D2 D3 L1 L2 L3 L4 L5 Note 1) A Note 2) M Weight [g] Unlocked Locked Unlocked Locked AS13l1FG-M5-23A 3.2 ASP 7.2 11.6 19.7 AS13l1FG-U10/32-23A AS13l1FG-M5-04A

VCL

Valve model Port size VCL2l VCW20-12-01A 1/8, 1/4 34 40 25 30 12.8 12.8 5 4.5 6 13 VCW30-12-02A 1/4, 3/8 42 52 30 40 19 19 6 5.5 7 19 VCL3l VCW30-12-04A 1/2 48 56 36 44 23 23 6 5.5 7 23 VCW40-12-02A 1/4, 3/8 42 52 30 40 23 23 6 5.5 7 19 VCL4l VCW30-12-04A 1/2 48 56 36 44 23 23 6 5.5 7 23 VCW40-12-06A 3/4 56 65 44 53 28.2 28.2 6 5.5 7 26 2 Mounting screws (for mounting bracket) are included

AS

1/8" 03 5/32" 07 1/4" 09 5/16" 11 3/8" 13 1/2" -X214 Restrictor (Without check valve) 04 4 06 6 08 8 10 10 12 12 With One-touch ttings Example) AS2002F-04A-X214 10Clean Series Example) 10-AS2002F-04A 1 For selecting applicable tubing O.D., refer to the Model shown above. 2 Use 1/8" tubing. 1 Fluorine grease is used. 2 The cleanliness class (ISO class) is 5.

Compact Cylinder

Without Magnet for Auto Switch AS121F-M3-04 V V AS121F-M5E-04A V V V AS121F-M5E-06A V V V Elbow type Bore size [mm] 12 16 20 25 32 Port size M3 x 0.5 M5 x 0.8 Stroke [mm] 5 or more 5 or more 5 10 or more 5 10 or more 5 or more Male connector (with hexagon socket head) AS131F-M3-04 V V AS131F-M5E-04A V V V AS131F-M5E-06A V V V Universal type KQ2S04-M3G V V KQ2S04-M5m V V V V V KQ2S06

Speed Controller with Uni One-touch Fitting AS Series Push-lock type

4 8.2 AS22l1F-U01-06A 6 10.4 10 AS22l1F-U01-08A 8 13.2 22.4 29.5 14.2 11 AS22l1F-U01-10A 10 15.9 25.3 32.4 15.6 12 AS22l1F-U02-23A 3.2 1/8 13 7.2 20.9 30.2 22.6 36.6 35 30.2 28.6 13.3 17 AS22l1F-U02-04A 4 8.2 AS22l1F-U02-06A 6 10.4 23.4 32.7 AS22l1F-U02-08A 8 13.2 23.9 33.2 14.2 18 AS22l1F-U02-10A 10 15.9 26.9 36.2 15.6 19 AS32l1F-U02-06A 6 1/4 17 13 13.3 39 AS32l1F-U02-08A 8 13.2 22.7 33

IDU/IDF

Not available for IDF1D to 3D, IDU22C to 75C. Dust proof filter set (A) (25) (25) (B) (10) Part No.

Table of Contents

MRHQ10 P407090-1 MRHQ10D P407090-3D Switch holder B MRHQ16 MRHQ10S P407090-3S MRHQ20 P407060-1 MRHQ10C P407090-3C Switch case MRHQ25 MRHQ16D P407060-3D MRHQ16S P407060-3S MRHQ16C P407060-3C MRHQ20D P407080-3D MRHQ20S P407080-3S Switch holder A MRHQ20C P407080-3C MRHQ25D P408080-3D Each unit includes two of each of the parts indicated left. Switches are not included with a unit.