Function: 3 Position Exhaust Center, Model: Non Plug-in, Body Option: Standard, Voltage: 24 VDC, Lead Wire: DIN Terminal, Surge Suppressor: with Light/Surge Voltage Suppressor, Port Size: 1, Thread: NPT, CE-Compliant: -

Function: 3 Position Exhaust Center, Model: Non Plug-in, Body Option: Standard, Voltage: 110 to 120 VAC, 50/60 Hz, Lead Wire: Grommet Terminal, Surge Suppressor: None, Port Size: 1, Thread: NPT, CE-Compliant: -

Function: 4 (3 Position Exhaust Center), Model: 1 (Non Plug-in), Body Option: 0 (Standard), Voltage: 5 (24 VDC), Lead Wire: D (DIN Terminal), Surge Suppressor: Z (with Light/Surge Voltage Suppressor), Port Size: 10 (1), Thread: N (NPT)

Function: 4 (3 Position Exhaust Center), Model: 1 (Non Plug-in), Body Option: 0 (Standard), Voltage: 3 (110 to 120 VAC, 50/60 Hz), Lead Wire: E (Grommet Terminal), Surge Suppressor: None, Port Size: 10 (1), Thread: N (NPT)

LEC-OM071xx

Unit Remark Reference unit/s (default) 10n [reference unit/s] can be set. Reference unit/min 10n [reference unit/min] can be set. "%" of rated speed 10n [%] can be set. min1 (rpm) 10n [min1] can be set. Max. motor speed/40 (Hex.) Set "0" for common parameter 42. (2) Position The following units can be selected. Settings are made with common parameters 43 and 44.

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

Mounting bolt Model C Mounting bolt CDQP2B12-5D -10D -15D -20D -25D -30D CDQP2B16-5D -10D -15D -20D -25D -30D CDQP2B20-5D -10D -15D -20D -25D -30D -35D -40D -45D -50D CDQP2B25-5D -10D -15D -20D -25D -30D -35D -40D -45D -50D Model C Mounting bolt CDQP2B32-5D -10D -15D -20D -25D -30D -35D -40D -45D -50D -75D -100D CDQP2B40-5D -10D -15D -20D -25D -30D -35D -40D -45D -50D -75D -100D CDQP2B50-

CQ2

Mounting bolt Mounting bolt CDQP2B32-5D -10D -15D -20D -25D -30D -35D -40D -45D -50D -75D -100D CDQP2B40-5D -10D -15D -20D -25D -30D -35D -40D -45D -50D -75D -100D CDQP2B50-10D -15D -20D -25D -30D -35D -40D -45D -50D -75D -100D Mounting bolt CDQP2B12-5D -10D -15D -20D -25D -30D CDQP2B16-5D -10D -15D -20D -25D -30D CDQP2B20-5D -10D -15D -20D -25D -30D -35D -40D -45D -50D CDQP2B25-5D -10D -

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

Mounting bolt Model C Mounting bolt CDQP2B12-5D -10D -15D -20D -25D -30D CDQP2B16-5D -10D -15D -20D -25D -30D CDQP2B20-5D -10D -15D -20D -25D -30D -35D -40D -45D -50D CDQP2B25-5D -10D -15D -20D -25D -30D -35D -40D -45D -50D Mounting bolt CDQP2B32-5D -10D -15D -20D -25D -30D -35D -40D -45D -50D -75D -100D CDQP2B40-5D -10D -15D -20D -25D -30D -35D -40D -45D -50D -75D -100D CDQP2B50-10D -15D

NCQ2/CQ2

CDQP2B32-5D -10D -15D -20D -25D -30D -35D -40D -45D -50D -75D -100D CDQP2B40-5D -10D -15D -20D -25D -30D -35D -40D -45D -50D -75D -100D CDQP2B50-10D -15D -20D -25D -30D -35D -40D -45D -50D -75D -100D CDQP2B12-5D -10D -15D -20D -25D -30D CDQP2B16-5D -10D -15D -20D -25D -30D CDQP2B20-5D -10D -15D -20D -25D -30D -35D -40D -45D -50D CDQP2B25-5D -10D -15D -20D -25D -30D -35D -40D -45D -50D 40

Compact Cylinder

CQP2B12-5D -10D -15D -20D -25D -30D CQP2B16-5D -10D -15D -20D -25D -30D CQP2B20-5D -10D -15D -20D -25D -30D -35D -40D -45D -50D CQP2B25-5D -10D -15D -20D -25D -30D -35D -40D -45D -50D CQP2B32-5D -10D -15D -20D -25D -30D -35D -40D -45D -50D -75D -100D CQP2B40-5D -10D -15D -20D -25D -30D -35D -40D -45D -50D -75D -100D CQP2B50-10D -15D -20D -25D -30D -35D -40D -45D -50D -75D -100D CQP2B63-10D

3 Port Solenoid Valve, VQ100 Series, Base Mounted Type

VV3Q11 (L5) (L4) (L3) (8.5) 88 L2 48.7 L1 Plug ass'y VVQ100-12A2 3 1 (35) (45) 33 (5.5) 23.5 12.3 E 3 2 R11(Min. bending inner radius) 21.5 Manual override (29.3) 104 D side U side Stations 1 2 3 4 5 n 2-M50.8(E port) 2-M50.8(P port) 42.9 A A (8.5) 20 5 15 (7.5) 5 (A port) n-M50.8 15 P=10 Dimensions n: Stations(Max.18 stations) Equation : L1=10n+32 L2=10n+43 n L 2 52 63 83 112.5 123 3 62

Compact Cylinder Series CQS

C D 30 35 40 45 50 55 30 35 40 45 50 55 35 40 45 50 C D 55 60 65 70 75 80 35 40 45 50 55 60 65 70 75 80 Cylinder model Mounting bolt size Cylinder model Mounting bolt size CQSWB12-5D -10D -15D -20D -25D -30D CQSWB16-5D -10D -15D -20D -25D -30D CQSWB20-5D -10D -15D -20D CQSWB20-25D -30D -35D -40D -45D -50D CQSWB25-5D -10D -15D -20D -25D -30D -35D -40D -45D -50D M3 x 30L x 35L x 40L x 45L x

CQS

Mounting bolt Mounting bolt D 30 35 40 45 50 55 30 35 40 45 50 55 35 40 45 50 Model C Model C D 55 60 65 70 75 80 35 40 45 50 55 60 65 70 75 80 CQSWB12-5D -10D -15D -20D -25D -30D CQSWB16-5D -10D -15D -20D -25D -30D CQSWB20-5D -10D -15D -20D CQSWB20-25D -30D -35D -40D -45D -50D CQSWB25-5D -10D -15D -20D -25D -30D -35D -40D -45D -50D M3 x 30l x 35l x 40l x 45l x 50l x 55l M3 x 30l x 35l x

Table of Contents

VFR2110-5D 5 sets (2 position single part no.) VFR2410-5D 1 set (3 position exhaust part no.) VVFS2000-R-01-2 1 set (Individual EXH spacer part no.) VV5FR2-01T1-061-02 1 set (Manifold base part no.) VFR2100-5FZ 3 sets (2 position single part no.) VFR2200-5FZ 2 sets (2 position double part no.) VVFS2000-10A 1 set (Blanking plate assembly part no.)

3 Port Solenoid Valve Series VQ100 1

x 14 7 Manual override VZ 7 14 P E P E 37.4 16 VS 29 32 43.8 VFN 4-PT 1/8 P , E port 2-3.5 Mounting hole 300 300 15.5 P = 10 1 2 3 4 5 n U side D side 40.2 15.5 46.2 19.4 A A 9.5 16.7 P = 10 n-M5 x 0.8 A port Dimensions Formula: L1 = 10n + 21, L2 = 10n + 7, n: Station (Max. 20 stations) n L L1 L2 2 41 27 3 51 37 4 61 47 5 71 57 6 81 67 7 91 77 8 9 10 121 107 11 131 117 12 141 127 13 151

VM

Roller Lever/VM121-01-01, VM131-01-01 VM121-01-01S, VM131-01-01S JIS Symbol 2 port 3 port 10N F.O.F. 0.5MPa supply 3.2mm P.T. 2.3mm O.T. 5.5mm T.T. One Way Roller Lever/VM121-01-02, VM131-01-02 VM121-01-02S, VM131-01-02S JIS Symbol 2 port 3 port 10N F.O.F. 0.5MPa supply 3.2mm P.T. 2.3mm O.T. 5.5mm T.T.

VQ

SY SYJ (L5) Plug assembly (L4) VK 2-4.5Mounting hole 1 2 3 VVQ100-12A(L3) 88 (8.5) L2 VZ 48.7 L1 VT VT (45) (35) 33 25 (5.5) VP 23.5 12.3 VG R11 Manual override 21.5 (Min. bending inner radius) (29.3) VP 104 VQ VQZ Stations 1 2 3 4 5 n Dside Uside VZ 2-M5 X 0.8(E port) VS 2-M5 X 0.8(P port) 42.9 A A 20 (8.5) 1.5 5 n-M5 X 0.8 (A port) 5 (7.5) 15 P=10 38 Equation: L1=10n+32 L2=10n+43

3 Port Solenoid Valve Series VQ100

x 14 7 Manual override VZ 7 14 P E P E 37.4 16 VS 29 32 43.8 VFN 4-PT 1/8 P , E port 2-3.5 Mounting hole 300 300 15.5 P = 10 1 2 3 4 5 n U side D side 40.2 15.5 46.2 19.4 A A 9.5 16.7 P = 10 n-M5 x 0.8 A port Dimensions Formula: L1 = 10n + 21, L2 = 10n + 7, n: Station (Max. 20 stations) n L L1 L2 2 41 27 3 51 37 4 61 47 5 71 57 6 81 67 7 91 77 8 9 10 121 107 11 131 117 12 141 127 13 151

3 Port Solenoid Valve Series VQ100 1

x 14 7 Manual override VZ 7 14 P E P E 37.4 16 VS 29 32 43.8 VFN 4-PT 1/8 P , E port 2-3.5 Mounting hole 300 300 15.5 P = 10 1 2 3 4 5 n U side D side 40.2 15.5 46.2 19.4 A A 9.5 16.7 P = 10 n-M5 x 0.8 A port Dimensions Formula: L1 = 10n + 21, L2 = 10n + 7, n: Station (Max. 20 stations) n L L1 L2 2 41 27 3 51 37 4 61 47 5 71 57 6 81 67 7 91 77 8 9 10 121 107 11 131 117 12 141 127 13 151

Series CQS 10-/21- 11-/22- ø12, ø16, ø20, ø25 Compact Cylinder

Rod side mounting/Without auto switch Head side mounting/Without auto switch C D Mounting bolt Model C D Mounting bolt Model CQSB12-5D -10D -15D -20D -25D -30D CQSB16-5D -10D -15D -20D -25D -30D CQSB20-5D -10D -15D -20D -25D -30D -35D -40D -45D -50D CQSB25-5D -10D -15D -20D -25D -30D -35D -40D -45D -50D CQSB12-5D -10D -15D -20D -25D -30D CQSB16-5D -10D -15D -20D -25D -30D CQSB20-5D -10D -