Micro Mechanical Valve Series VM1000

Application Weight (g) Model Actuator Polyacetal roller 190 270 280 280 290 380 370 380 360 VFM350-02-00 Basic Mechanical operation Manual operation VM-08D VM-06DS VM-06D VM-05D VM-02CS VM-02C VM-01CS VM-01C Roller lever VFM350-02-01 VFM350-02-01S Hard steel roller One way roller lever VFM350-02-02 VFM350-02-02S Polyacetal roller Hard steel roller Straight plunger VFM350-02-05 Polyacetal

VFM300

Actuator Model Application VFM350-02-00 Basic Polyacetal roller Mechanical operation Manual operation Roller lever VFM350-02-01 VFM350-02-01S VM-08D VM-06DS VM-06D VM-05D VM-02CS VM-02C VM-01CS VM-01C Hard steel roller One way roller lever VFM350-02-02 VFM350-02-02S Polyacetal roller Hard steel roller Straight plunger VFM350-02-05 Polyacetal roller Hard steel roller Roller plunger VFM350

VM

Application Model Actuator Basic VFM350-02-00 VFM350-02-01 VFM350-02-01S VFM350-02-02 VFM350-02-02S Mechanical operation Polyacetal roller Hard steel roller VM-08D VM-06DS VM-06D VM-05D VM-02CS VM-02C VM-01CS VM-01C Roller lever Polyacetal roller Hard steel roller One way roller lever Straight plunger VFM350-02-05 Polyacetal roller Hard steel roller Roller plunger VFM350-02-06 VFM350-02

CATALOG

Capacity H O W T O O R D E R S E R I E S (N)AK T E C H N I C A L SPECIFICATIONS B O D Y S I Z E .P O RT . . .E F F E C T I V E S I Z E NPT . . .O R I F I C E* NAQ1500-M5 .M5 . . .2.8 NAQ1510-N01...1 8 . . . .5.8 NAQ2000-N01...1 8 . . . .25 NAQ2000-N02...1 4 . . . .40 NAQ3000-N02...1 4 . . . .42 NAQ3000-N03...3 8 . . . .70 NAQ5000-N04...1 2 . . . .115 NAQ5000-N06...3 4 . . . .180 Fluid Air

Table of Contents

Min. 1/8" 5/32" 3/16" 1/4" 1/8" 5/32" 3/16" 1/4" 5/16" 5/32" 3/16" 1/4" 5/16" 3/8" AS131FM-U10/32-01 AS131FM-U10/32-03 AS131FM-U10/32-05 AS131FM-U10/32-07 AS231FM-N01-01S AS231FM-N01-03S AS231FM-N01-05S AS231FM-N01-07S AS231FM-N01-09S AS231FM-N02-03S AS231FM-N02-05S AS231FM-N02-07S AS231FM-N02-09S AS231FM-N02-11S 19.8 20.3 21.3 21.6 24.4 24.9 26.8 29.9 30.9 30.6 31.1 34.2 35.2 38.7 8.4 9.3

ARX Series

1 ARX20 mm Nil F ARX21 mm Nil F Thread type G Pressure gauge Rc(PT) NPT G(PF) Nil N F ARX20Nmm ARX21Nmm P Port size Panel nut 1/8 1/4 01 02 Option combination numbers Panel nut is also included with B.

AS

AS131FM-U10/32-01 AS131FM-U10/32-03 AS131FM-U10/32-05 AS131FM-U10/32-07 AS231FM-N01-01S AS231FM-N01-03S AS231FM-N01-05S AS231FM-N01-07S AS231FM-N01-09S AS231FM-N02-03S AS231FM-N02-05S AS231FM-N02-07S AS231FM-N02-09S AS231FM-N02-11S 1/8" 19.8 8.4 7 28.7 17.5 12.7 5/32" 20.3 9.3 28.8 33.8 8 9.6 9.3 30.1 25.1 10.8 10-32 UNF 3/16" 21.3 34.5 23.3 11.4 16.5 8 1/4" 21.6 31.9 20.7 12 13.7 17 1/8"

IIIIIII

133-51 0.91 (231 0.47 (121 0.81 i20.5) 0.39 (10) Millimeters in Parentheses Millimeters in Parontheses NVM220-N02-08 230-N02-08 NVM220-N02-07 230-N02-07 Panel Mounling Panel Mounting F O F ' 1 2 3 s l b s ( 5 6 k 9 ) P T 0 138 in (3 5mm) o,T 0 079 in (2mm) T T 0 216 in (5 5mm) F O F ' 2 6 5 l b s , ( 1 2 k g ) T T 60" '75 PSIG (5 Kgf/cm2) '75 PSIG (5 Kgf/cm2) A B c D E F G A B c D E F G

Mechanical Valves Series NVM, NVFM, NVZNI

133-51 0.91 (231 0.47 (121 0.81 i20.5) 0.39 (10) Millimeters in Parentheses Millimeters in Parontheses NVM220-N02-08 230-N02-08 NVM220-N02-07 230-N02-07 Panel Mounling Panel Mounting F O F ' 1 2 3 s l b s ( 5 6 k 9 ) P T 0 138 in (3 5mm) o,T 0 079 in (2mm) T T 0 216 in (5 5mm) F O F ' 2 6 5 l b s , ( 1 2 k g ) T T 60" '75 PSIG (5 Kgf/cm2) '75 PSIG (5 Kgf/cm2) A B c D E F G A B c D E F G

Speed Controller for Low Speed Operation with One-touch Fitting Elbow Type/Universal Type (Resin Body) AS-FM Series

AS131FM-U10/32-01 AS131FM-U10/32-03 AS131FM-U10/32-05 AS131FM-U10/32-07 AS231FM-N01-01S AS231FM-N01-03S AS231FM-N01-05S AS231FM-N01-07S AS231FM-N01-09S AS231FM-N02-03S AS231FM-N02-05S AS231FM-N02-07S AS231FM-N02-09S AS231FM-N02-11S 1/8" 19.8 8.4 28.7 7 17.5 12.7 5/32" 20.3 9.3 10.8 33.8 28.8 10-32 UNF 8 9.6 9.3 30.1 25.1 34.5 3/16" 23.3 16.5 21.3 11.4 8 31.9 1/4" 20.7 13.7 21.6 12 17 1/8"

VM

Application 2 port 3 port 2 port 3 port VM120-01-00 VM121-01-00 VM130-01-00 VM131-01-00 VM122-M5-00 VM123-M5-00 VM132-M5-00 VM133-M5-00 Basic Mechanical operation Manual operation Roller lever VM121-01-01 VM121-01-01S VM131-01-01 VM131-01-01S VM123-M5-01 VM123-M5-01S VM133-M5-01 VM133-M5-01S Polyacetal roller Hard steel roller VM121-01-02 VM121-01-02S VM131-01-02 VM131-01-02S VM123-M5-

Speed Controller for Low Speed Operation Series AS-M Standard Type (Metal Body)

Min. 1/8" 5/32" 3/16" 1/4" 1/8" 5/32" 3/16" 1/4" 5/16" 5/32" 3/16" 1/4" 5/16" 3/8" AS131FM-U10/32-01 AS131FM-U10/32-03 AS131FM-U10/32-05 AS131FM-U10/32-07 AS231FM-N01-01S AS231FM-N01-03S AS231FM-N01-05S AS231FM-N01-07S AS231FM-N01-09S AS231FM-N02-03S AS231FM-N02-05S AS231FM-N02-07S AS231FM-N02-09S AS231FM-N02-11S 19.8 20.3 21.3 21.6 24.4 24.9 26.8 29.9 30.9 30.6 31.1 34.2 35.2 38.7 8.4 9.3

Speed Controller for Low Speed Operation with One-touch Fitting Series AS-FM Elbow Type/Universal Type (Resin Body) 1

Min. 1/8" 5/32" 3/16" 1/4" 1/8" 5/32" 3/16" 1/4" 5/16" 5/32" 3/16" 1/4" 5/16" 3/8" AS131FM-U10/32-01 AS131FM-U10/32-03 AS131FM-U10/32-05 AS131FM-U10/32-07 AS231FM-N01-01S AS231FM-N01-03S AS231FM-N01-05S AS231FM-N01-07S AS231FM-N01-09S AS231FM-N02-03S AS231FM-N02-05S AS231FM-N02-07S AS231FM-N02-09S AS231FM-N02-11S 19.8 20.3 21.3 21.6 24.4 24.9 26.8 29.9 30.9 30.6 31.1 34.2 35.2 38.7 8.4 9.3

Series AS-FM/AS-M/ASD-FM

Min. 1/8" 5/32" 3/16" 1/4" 1/8" 5/32" 3/16" 1/4" 5/16" 5/32" 3/16" 1/4" 5/16" 3/8" 19.8 20.3 21.3 21.6 24.4 24.9 26.8 29.9 30.9 30.6 31.1 34.2 35.2 38.7 AS131FM-U10/32-01 AS131FM-U10/32-03 AS131FM-U10/32-05 AS131FM-U10/32-07 AS231FM-N01-01S AS231FM-N01-03S AS231FM-N01-05S AS231FM-N01-07S AS231FM-N01-09S AS231FM-N02-03S AS231FM-N02-05S AS231FM-N02-07S AS231FM-N02-09S AS231FM-N02-11S 8.4 9.3

Speed Controller for Low Speed Operation with One-touch Fitting Series AS-FM Elbow Type/Universal Type (Resin Body) 1

Min. 1/8" 5/32" 3/16" 1/4" 1/8" 5/32" 3/16" 1/4" 5/16" 5/32" 3/16" 1/4" 5/16" 3/8" AS131FM-U10/32-01 AS131FM-U10/32-03 AS131FM-U10/32-05 AS131FM-U10/32-07 AS231FM-N01-01S AS231FM-N01-03S AS231FM-N01-05S AS231FM-N01-07S AS231FM-N01-09S AS231FM-N02-03S AS231FM-N02-05S AS231FM-N02-07S AS231FM-N02-09S AS231FM-N02-11S 19.8 20.3 21.3 21.6 24.4 24.9 26.8 29.9 30.9 30.6 31.1 34.2 35.2 38.7 8.4 9.3

Vacuum System Peripherals:

R L B 01 1 Nil F G Rc 1 8 ... ...

Stainless Steel 316 Fittings

KFG2H0122-N01 KFG2H0122-N02 KFG2H0325-N01 KFG2H0325-N02 KFG2H0704-N01 KFG2H0704-N02 KFG2H0906-N01 KFG2H0906-N02 KFG2H0906-N03 KFG2H1163-N02 KFG2H1163-N03 KFG2H1163-N04 KFG2H1395-N02 KFG2H1395-N03 KFG2H1395-N04 O.D. 19.4 23.8 19.4 23.8 21.1 25.5 23.3 26.7 28.3 29.7 30.3 33.5 31.5 31.9 35.1 16.2 19.4 16.2 19.4 17.9 21.1 20.1 22.3 23.6 25.3 25.6 27.1 27.1 27.2 28.7 1/8 1/4 1/8 1/4 1/8 1/4 1/

30

(mm) Note 2) Effective area (mm2) H (Width across flat) 8 10 14 Connection thread R, M Note 1) D M Weight (g) A L Model D Applicable tube KQB2H23-M5 KQB2H23-01S KQB2H23-02S KQB2H04-M5 KQB2H04-01S KQB2H04-02S KQB2H06-M5 KQB2H06-01S KQB2H06-02S KQB2H06-03S KQB2H08-01S KQB2H08-02S KQB2H08-03S KQB2H10-01S KQB2H10-02S KQB2H10-03S KQB2H10-04S KQB2H12-02S KQB2H12-03S KQB2H12-04S KQB2H16-03S KQB2H16

2

, 60C (F and FS type only)] IDF IDU IDF FS Refer to SMC website for details.

Secondary Batteries

B L F G D *Mounting brackets are shipped together, (but not assembled).